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Swaminathan Subramanian, Raghaw Rai
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Zhongling Qian, Christof Brillert
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Book
STEM in SEM: Introduction to Scanning Transmission Electron Microscopy for Microelectronics Failure Analysis
Available to PurchaseSeries: ASM Technical Books
Publisher: ASM International
Published: 23 January 2020
DOI: 10.31399/asm.tb.stemsem.9781627082921
EISBN: 978-1-62708-292-1
Book Chapter
Crystallographic Planes and Directions
Available to PurchaseSeries: ASM Technical Books
Publisher: ASM International
Published: 01 June 2008
DOI: 10.31399/asm.tb.emea.t52240631
EISBN: 978-1-62708-251-8
... is out of phase with the preceding one by exactly one wavelength, or any whole integer wavelength ( n = 1, 2, 3, …), then the reflected beam will consist of rays that are in phase again. The angle at which reflection occurs is known as the Bragg angle, θ. Two parallel planes of atoms identified...
Abstract
This appendix explains how to identify crystallographic planes and directions. It shows how Miller indices, a system for specifying crystallographic planes within a unit cell, are determined for cubic and hexagonal systems. It also explains how x-ray diffraction techniques are used in the study of crystalline structures.
Book Chapter
Imaging and Diffraction with Commercially Available Transmission Detectors
Available to PurchaseSeries: ASM Technical Books
Publisher: ASM International
Published: 23 January 2020
DOI: 10.31399/asm.tb.stemsem.t56000001
EISBN: 978-1-62708-292-1
... be determined experimentally by using a secondary electron detector to record a well-focused image of the transmission detector surface and another of the sample, and then subtracting the two working distances (WD) indicated by the SEM: CL = WDsample WDdetector. Acceptance angles, , can be calculated...
Abstract
This chapter discusses the principles of scanning transmission electron microscopy (STEM) as implemented using conventional scanning electron microscopes (SEMs). It describes the pros and cons of low-energy imaging and diffraction, addresses basic hardware requirements, and provides information on imaging modes, detector positioning and alignment, and the effect of contrast reversal. It also discusses beam convergence and angular selectivity, the use of application-specific masks, and how to generate grain orientation maps for different material systems.
Book Chapter
Imaging and Diffraction with a Programmable Pixelated Detector
Available to PurchaseSeries: ASM Technical Books
Publisher: ASM International
Published: 23 January 2020
DOI: 10.31399/asm.tb.stemsem.t56000020
EISBN: 978-1-62708-292-1
...-contrast. MBF images, (d) and (e), with slightly different inner acceptance angles. Chapter Two Imaging and Diffraction with a Programmable Pixelated Detector 25 Figures 3(d) and (e) show additional detector utility. Here, two nearly iden- tical apertures were programmed to the DMD to demonstrate MBF...
Abstract
This chapter discusses the setup and use of a transmission electron detector in a typical scanning electron microscope (SEM). It describes the arrangement and function of the primary components in the detector, following the signal path from the sample to a micromirror array where it is directed by the user to either a CMOS sensor (to record diffraction patterns) or a photomultiplier tube (to observe real-space images). The chapter discusses some of the nuances of digital imaging and diffraction and includes examples in which transmission electron detectors are used to analyze gold films, carbon nanotubes, zeolite sheets, and monolayer graphene. It also describes emerging techniques, including four-dimensional STEM, thermal diffuse scattering, energy filtering, aberration correction, and atomic resolution imaging.
Book
Series: ASM Technical Books
Publisher: ASM International
Published: 01 June 2008
DOI: 10.31399/asm.tb.emea.9781627082518
EISBN: 978-1-62708-251-8
Book Chapter
Appendix
Available to PurchaseSeries: ASM Technical Books
Publisher: ASM International
Published: 30 September 2024
DOI: 10.31399/asm.tb.pmamfa.t59400391
EISBN: 978-1-62708-479-6
... manufacturing XRD x-ray diffraction Nomenclature of symbols Table A2 Nomenclature of symbols Symbol Definition a 1 lattice parameter of solute 1 (pure) a 2 lattice parameter of solute 2 (pure) A lattice parameter of alloy; angle of repose Ar Archimedes number Β...
Abstract
This appendix defines abbreviations, acronyms, and symbols presented within this book.
Book Chapter
Review of Metallic Structure
Available to PurchaseSeries: ASM Technical Books
Publisher: ASM International
Published: 01 March 2012
DOI: 10.31399/asm.tb.pdub.t53420363
EISBN: 978-1-62708-310-2
... with the preceding one by exactly one wavelength, or any whole integer wavelength ( n = 1, 2, 3,…), then the reflected beam will consist of rays that are in phase again. The angle at which reflection occurs is known as the Bragg angle, θ. Two parallel planes of atoms identified as A-A ′ and B-B ′, which have...
Abstract
This appendix provides a detailed overview of the crystal structure of metals. It describes primary bonding mechanisms, space lattices and crystal systems, unit cell parameters, slip systems, and crystallographic planes and directions as well as plastic deformation mechanisms, crystalline imperfections, and the formation of surface or planar defects. It also discusses the use of X-ray diffraction for determining crystal structure.
Book Chapter
The Expanded Metallographic Laboratory
Available to PurchaseSeries: ASM Technical Books
Publisher: ASM International
Published: 01 March 2002
DOI: 10.31399/asm.tb.mgppis.t60400149
EISBN: 978-1-62708-258-7
... C, 0.5 Mn, 1.4 Cu, and 1.0 Ni). Dislocations aligned in a low-angle grain boundary can also be seen. 61,500×. Courtesy of K.A. Taylor, Bethlehem Steel Corporation Fig. 6.11 A transmission electron micrograph of a two-stage, shadowed surface replica of AISA/SAE 1080 pearlitic steel showing...
Abstract
Several specialized instruments are available for the metallographer to use as tools to gather key information on the characteristics of the microstructure being analyzed. These include microscopes that use electrons as a source of illumination instead of light and x-ray diffraction equipment. This chapter describes how these instruments can be used to gather important information about a microstructure. The instruments covered include image analyzers, transmission electron microscopes, scanning electron microscopes, electron probe microanalyzers, scanning transmission electron microscopes, x-ray diffractometers, microhardness testers, and hot microhardness testers. A list of other instruments that are usually located in a research laboratory or specialized testing laboratory is also provided.
Series: ASM Technical Books
Publisher: ASM International
Published: 30 September 2024
DOI: 10.31399/asm.tb.pmamfa.t59400027
EISBN: 978-1-62708-479-6
... of two or more elements, diffusion of solute elements in the solvent lattice may occur, depending on the extent of solubility of the solute elements in the solvent. The diffusion leads to forming an alloy and results in shifting of the diffraction peak compared to the initial peak position...
Abstract
This chapter explains how to measure the shape, size, microstructure, and composition of powders as well as their flowability and crystallization behavior. It presents detailed workflows and calculations based on SEM, TEM, FESEM, and STEM imaging, x-ray diffraction, differential scanning calorimetry, EDS and EELS spectroscopy, and powder sieving. It also discusses the measurement of crystallite size, lattice mismatch, and crystallinity and the relationship between surface area and flowability.
Book Chapter
Transmission Electron Microscopy
Available to PurchaseSeries: ASM Technical Books
Publisher: ASM International
Published: 01 November 2019
DOI: 10.31399/asm.tb.mfadr7.t91110461
EISBN: 978-1-62708-247-1
... with the aberration corrected instruments. Phase contrast images are formed because of interference between the transmitted and diffracted beams symmetrically included by the objective aperture. A periodic two-dimensional pattern resembling the atomic structure can be formed when three or more, non-collinear...
Abstract
The ultimate goal of the failure analysis process is to find physical evidence that can identify the root cause of the failure. Transmission electron microscopy (TEM) has emerged as a powerful tool to characterize subtle defects. This article discusses the sample preparation procedures based on focused ion beam milling used for TEM sample preparation. It describes the principles behind commonly used imaging modes in semiconductor failure analysis and how these operation modes can be utilized to selectively maximize signal from specific beam-specimen interactions to generate useful information about the defect. Various elemental analysis techniques, namely energy dispersive spectroscopy, electron energy loss spectroscopy, and energy-filtered TEM, are described using examples encountered in failure analysis. The origin of different image contrast mechanisms, their interpretation, and analytical techniques for composition analysis are discussed. The article also provides information on the use of off-axis electron holography technique in failure analysis.
Book Chapter
Tools and Techniques for Material Characterization of Boiler Tubes
Available to PurchaseSeries: ASM Technical Books
Publisher: ASM International
Published: 01 December 2018
DOI: 10.31399/asm.tb.fibtca.t52430107
EISBN: 978-1-62708-253-2
.... A close look at the XRD profiles for these two minerals ( Fig. 5.22 ) shows that the position and intensity of diffraction peaks for these two materials are different even though they have the same chemical formula ( Ref 5.19 ). This is because they have different crystal structures, and therefore...
Abstract
This chapter describes some of the most effective tools for investigating boiler tube failures, including scanning electron microscopy, optical emission spectroscopy, atomic absorption spectroscopy, x-ray fluorescence spectroscopy, x-ray diffraction, and x-ray photoelectron spectroscopy. It explains how the tools work and what they reveal. It also covers the topic of image analysis and its application in the measurement of grain size, phase/volume fraction, delta ferrite and retained austenite, inclusion rating, depth of carburization/decarburization, scale thickness, pearlite banding, microhardness, and hardness profiles. The chapter concludes with a brief discussion on the effect of scaling and deposition and how to measure it.
Book Chapter
Glossary
Available to PurchaseSeries: ASM Technical Books
Publisher: ASM International
Published: 01 March 2002
DOI: 10.31399/asm.tb.mgppis.t60400245
EISBN: 978-1-62708-258-7
.... It is used for detecting the effect of the object on plane-polarized light produced by the polarizer. angle of re ection. (1) Re ection: the angle between the re ected surface. See also normal. (2) Diffraction: the angle between the diffracted beam and the diffracting planes. angstrom unit. A unit of linear...
Abstract
This chapter presents definitions of terms related to the metallurgy and metallographic study of irons and steels.
Series: ASM Technical Books
Publisher: ASM International
Published: 01 June 2016
DOI: 10.31399/asm.tb.hpcspa.t54460121
EISBN: 978-1-62708-285-3
...) of the diffraction peak is estimated from the Scherrer formula ( Ref 5.26 ) for particle size broadening: (Eq 5.1) d = 0.9 λ/β cos θ where d is the particle size, λ is the wavelength of the x-ray, β is the FWHM of the x-ray peak (in radians), and θ is the angle of the peak. Typically, the Scherrer...
Abstract
This chapter elucidates the indispensable role of characterization in the development of cold-sprayed coatings and illustrates some of the common processes used during coatings development. Emphasis is placed on the advanced microstructural characterization techniques that are used in high-pressure cold spray coating characterization, including residual-stress characterization. The chapter includes some preliminary screening of tool hardness and bond adhesion strength, as well as a distinction between surface and bulk characterization techniques and their importance for cold spray coatings. The techniques covered are optical microscopy, X-Ray diffraction, scanning electron microscopy, focused ion beam machining, electron probe microanalysis, transmission electron microscopy, and electron backscattered diffraction. The techniques also include electron channeling contrast imaging, X-Ray photoelectron spectroscopy, X-ray fluorescence, Auger electron spectroscopy, Raman spectroscopy, oxygen analysis, and nanoindentation.
Book Chapter
Analysis of Structure
Available to PurchaseSeries: ASM Technical Books
Publisher: ASM International
Published: 01 December 2003
DOI: 10.31399/asm.tb.cfap.t69780343
EISBN: 978-1-62708-281-5
... diffraction analysis (XRD) Crystalline polymer component Crystalline structure, short- and long-range ordering, percent crystallinity, polymer blend/copolymer Small-angle x-ray diffraction X-ray scattering at low angle Crystallite size and shape, long-range periodicity Scanning electron microscopy...
Abstract
This article introduces procedures an engineer or materials scientist can use to investigate failures. It provides a brief survey of polymer systems and key properties that need to be measured during failure analysis. The article begins with an overview of the problem-solving approach pertinent to structure analysis. This is followed by a review of the characterization of plastics by infrared and nuclear magnetic resonance spectroscopy. The article then provides information on the distribution of molecular weight of an engineering plastic. It further discusses the methods used in thermal analysis, namely differential thermal analysis, thermogravimetric analysis, thermal-mechanical analysis, and dynamic mechanical analysis. The following sections provide details on X-ray diffraction for analyzing crystalline phases and on a minimal scheme for polymer analysis and characterization to assist the design engineer. The article ends with a discussion on the thermal-analytical scheme for analyzing the milligram quantities of polymer samples.
Series: ASM Technical Books
Publisher: ASM International
Published: 01 March 2002
DOI: 10.31399/asm.tb.mgppis.9781627082587
EISBN: 978-1-62708-258-7
Book Chapter
Detection and Sizing of Stress-Corrosion Cracks in Boiling Water Reactor Environments
Available to PurchaseSeries: ASM Technical Books
Publisher: ASM International
Published: 01 January 2017
DOI: 10.31399/asm.tb.sccmpe2.t55090359
EISBN: 978-1-62708-266-2
... evaluation (NDE) techniques because of its treelike branching pattern and its location in the heat-affected zone within the weld. As the chapter explains, by optimizing excitation and reflected waveforms, switching to dual-element sensing, properly orienting the scanning path, and using crack-tip diffraction...
Abstract
This chapter describes how ultrasonic testing came to be a viable method for evaluating intergranular stress-corrosion cracking (SCC) in large-diameter stainless steel pipe welds in boiling water reactor service. Intergranular SCC can be difficult to detect using nondestructive evaluation (NDE) techniques because of its treelike branching pattern and its location in the heat-affected zone within the weld. As the chapter explains, by optimizing excitation and reflected waveforms, switching to dual-element sensing, properly orienting the scanning path, and using crack-tip diffraction and amplitude-drop techniques, the height, length, and location of intergranular cracks can be accurately determined anywhere along the walls of the pipe as well as in weld areas.
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2019
DOI: 10.31399/asm.tb.mfadr7.t91110042
EISBN: 978-1-62708-247-1
.... The stereomicroscope creates parallax by actually offering two microscopes in a common housing, one for each eye, each seeing the sample from a different angle. For compactness the left and right eye microscope often share portions of the final lens as shown in the right design in figure 5 . Figure 5 Two...
Abstract
Moore's Law has driven many degree circuit features below the resolving capability of optical microscopy. Yet the optical microscope remains a valuable tool in failure analysis. This article describes the physics governing resolution and useful techniques for extracting the small details. It begins with the basic microscope column and construction. The article discusses microscope adjustments, brightfield and darkfield illumination, and microscope concepts important to liquid crystal techniques. It also discusses solid immersion lenses, infrared and ultraviolet microscopy and concludes with laser microscopy techniques such as thermal induced voltage alteration and external induced voltage alteration.
Book Chapter
Phase Diagram Determination
Available to PurchaseSeries: ASM Technical Books
Publisher: ASM International
Published: 01 March 2012
DOI: 10.31399/asm.tb.pdub.t53420239
EISBN: 978-1-62708-310-2
... of phase diagrams. A simple XRD pattern can be used for phase identification. X-ray diffraction can also be used for the establishment of the loci of phase boundaries. For instance, in a two-component system, lattice parameters can vary with composition within a single-phase region but are invariant...
Abstract
This chapter discusses some of the methods and measurements used to construct phase diagrams. It explains how cooling curves were widely used to determine phase boundaries, and how equilibrated alloys examined under controlled heating and cooling provide information for constructing isothermal and vertical sections as well as liquid projections. It also explains how diffusion couples provide a window into local equilibria and identifies typical phase diagram construction errors along with problems stemming from phase-boundary curvatures and congruent transformations.
Book Chapter
Tempering of Steel
Available to PurchaseSeries: ASM Technical Books
Publisher: ASM International
Published: 01 January 2015
DOI: 10.31399/asm.tb.spsp2.t54410373
EISBN: 978-1-62708-265-5
... and the composition Fe 5 C 2 . However, despite the differences between cementite and chi carbide, the relatively complex structures of the two carbide phases are similar and difficult to separate by X-ray or electron diffraction techniques. Therefore, in view of the experimental difficulty in separating the presence...
Abstract
Most steels that are hardened are subjected to a subcritical heat treatment referred to as tempering. Tempering improves the toughness of as-quenched martensitic microstructures but lowers strength and hardness. This chapter describes the microstructural changes that occur during tempering and their effect on the mechanical properties of steel. It also discusses the effect of alloying elements and the formation of oxide colors.
Book Chapter
Systems-Level: Development and Challenges of Solid Immersion Lens
Available to PurchaseSeries: ASM Technical Books
Publisher: ASM International
Published: 01 November 2023
DOI: 10.31399/asm.tb.edfatr.t56090083
EISBN: 978-1-62708-462-8
... even beyond the critical angle. SIL solutions are introduced in four main parts in this chapter: types, materials, quality and aberration, and commercial solutions. SIL Types Typically, there are two basic types of refractive SIL ( Table 1 ): Hemispherical SIL (hSIL), central SIL (cSIL...
Abstract
This chapter assesses the benefits of using a solid immersion lens (SIL) to detect faults in ICs via optical imaging and laser-stimulation techniques. It discusses the advantages and limitations of different types of SILs and their effect on spatial resolution, spot size, focus depth, and collection efficiency. It also provides a brief overview of technical challenges at the die level.
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