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transmission electron microscopes

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Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2019
DOI: 10.31399/asm.tb.mfadr7.t91110461
EISBN: 978-1-62708-247-1
... , 1986 . 10.1007/978-1-4899-2037-9 2. Williams D. B. and Carter C. B. , Transmission Electron Microscopy , Plenum Press, NY , 1996 . 10.1007/978-1-4757-2519-3 3. Egerton R.F. , Electron Energy Loss Spectroscopy in the Electron Microscope , Plenum Press , 1996 . 10.1007...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 August 2018
DOI: 10.31399/asm.tb.msisep.t59220085
EISBN: 978-1-62708-259-4
... data as well. It discusses the basic design and operating principles of scanning electron microscopes, transmission electron microscopes, and scanning transmission electron microscopes and how they are typically used. It describes the additional information contained in backscattered electrons...
Series: ASM Technical Books
Publisher: ASM International
Published: 23 January 2020
DOI: 10.31399/asm.tb.stemsem.9781627082921
EISBN: 978-1-62708-292-1
Series: ASM Technical Books
Publisher: ASM International
Published: 01 March 2002
DOI: 10.31399/asm.tb.mgppis.t60400149
EISBN: 978-1-62708-258-7
... equipment. This chapter describes how these instruments can be used to gather important information about a microstructure. The instruments covered include image analyzers, transmission electron microscopes, scanning electron microscopes, electron probe microanalyzers, scanning transmission electron...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2019
DOI: 10.31399/asm.tb.mfadr7.t91110323
EISBN: 978-1-62708-247-1
... identification, and circuit editing. The article also presents methods to prepare electron beam probing samples where some remaining silicon is required for the transistor functions and transmission electron microscope samples from units where the substrate silicon has been partially or completely removed...
Series: ASM Technical Books
Publisher: ASM International
Published: 23 January 2020
DOI: 10.31399/asm.tb.stemsem.t56000001
EISBN: 978-1-62708-292-1
... Abstract This chapter discusses the principles of scanning transmission electron microscopy (STEM) as implemented using conventional scanning electron microscopes (SEMs). It describes the pros and cons of low-energy imaging and diffraction, addresses basic hardware requirements, and provides...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2019
DOI: 10.31399/asm.tb.mfadr7.t91110434
EISBN: 978-1-62708-247-1
.... The discussion includes a comparison of scanning transmission electron microscope-EDS elemental mapping and mapping with an SDD. A brief section is devoted to the discussion on the artifacts that occur during X-ray mapping. elemental mapping energy dispersive X-ray spectroscopy lithium-drifted EDS...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2019
DOI: 10.31399/asm.tb.mfadr7.t91110447
EISBN: 978-1-62708-247-1
... six methods used in semiconductor industry are: Auger spectroscopy, dynamic secondary ion mass spectroscopy, time of flight static secondary ion mass spectroscopy (ToF-SIMS), X-ray photoelectron spectroscopy, scanning electron microscope-energy dispersive X-ray spectroscopy (SEM-EDX), and transmission...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2019
DOI: 10.31399/asm.tb.mfadr7.t91110413
EISBN: 978-1-62708-247-1
... Abstract This article provides an overview of how to use the scanning electron microscope (SEM) for imaging integrated circuits. The discussion covers the principles of operation and practical techniques of the SEM. The techniques include sample mounting, sample preparation, sputter coating...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 March 2002
DOI: 10.31399/asm.tb.mgppis.t60400109
EISBN: 978-1-62708-258-7
... light microscopes or light optical microscopes. If a beam of electrons is employed, the microscope would be called an electron microscope, and if a beam of ions is employed, it is called an ion microscope. Electron microscopes are valuable tools for the metallographer and are discussed in the next...
Book Chapter

Series: ASM Technical Books
Publisher: ASM International
Published: 01 December 2003
DOI: 10.31399/asm.tb.cfap.t69780383
EISBN: 978-1-62708-281-5
.... This is termed cathodoluminescence. There are three general types of instruments: the SEM, the scanning transmission electron microscope, and the scanning Auger microscope. These instruments all have in common the feature of obtaining information from the surface (or volume, for the scanning transmission...
Series: ASM Technical Books
Publisher: ASM International
Published: 23 January 2020
DOI: 10.31399/asm.tb.stemsem.t56000020
EISBN: 978-1-62708-292-1
... Abstract This chapter discusses the setup and use of a transmission electron detector in a typical scanning electron microscope (SEM). It describes the arrangement and function of the primary components in the detector, following the signal path from the sample to a micromirror array where...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 June 2016
DOI: 10.31399/asm.tb.hpcspa.t54460121
EISBN: 978-1-62708-285-3
...-specific sections for examination in the scanning and transmission electron microscopes, coating splat interface or coating-substrate interface 5 Electron probe microanalysis Precise chemistry, diffusion layers in a cold-sprayed coating, coating-substrate interface chemistry 6 Transmission...
Book Chapter

Series: ASM Technical Books
Publisher: ASM International
Published: 01 October 2005
DOI: 10.31399/asm.tb.faesmch.t51270025
EISBN: 978-1-62708-301-0
... there are two types: the transmission electron microscope (TEM) ( Ref 5 ) and the scanning electron microscope (SEM) ( Ref 6 , 7 ). The latter is more convenient for rapid examination of fracture surfaces. For many years, TEM has been a powerful tool for the study of fracture surfaces at high...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 December 2003
DOI: 10.31399/asm.tb.cfap.9781627082815
EISBN: 978-1-62708-281-5
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2019
DOI: 10.31399/asm.tb.mfadr7.t91110062
EISBN: 978-1-62708-247-1
...-ray Tomography . 1997 . San Diego, CA : SPIE . 10.1117/12.292721 [6] Wang Y. et al. , A transmission x-ray microscope (TXM) for non-destructive 3D imaging of integrated circuits at sub-100 nm resolution , Conference Proceeding from International 29th Symposium for Testing...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 January 2015
DOI: 10.31399/asm.tb.spsp2.t54410001
EISBN: 978-1-62708-265-5
.... In contrast, Transmission Electron Microscopes (TEM) make possible the evaluation of fine microstructural features within volumes of steel specimens made thin enough to permit the passage of incident high energy electron beams. Images are produced by electron diffraction from the crystal structures...
Book Chapter

Series: ASM Technical Books
Publisher: ASM International
Published: 01 January 2015
DOI: 10.31399/asm.tb.spsp2.t54410099
EISBN: 978-1-62708-265-5
... is a thin foil transmission electron microscope (TEM) micrograph that shows interlath cementite in a 4360 steel transformed to bainite at 495 °C. The carbide particles, compared with those that are present in lower bainite, are relatively coarse and appear black and elongated. In some steels, especially...
Book Chapter

Series: ASM Technical Books
Publisher: ASM International
Published: 01 December 1984
DOI: 10.31399/asm.tb.mpp.t67850267
EISBN: 978-1-62708-260-0
... to an investigator, the light microscope remains the single most important device. While the transmission electron microscope (TEM) and the scanning electron microscope (SEM) overcome two of the most important limitations of the light microscope, namely resolution and depth of field, they have not reduced...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 March 2002
DOI: 10.31399/asm.tb.mgppis.t60400087
EISBN: 978-1-62708-258-7
... with the scanning electron microscope, transmission electron microscope, or scanning transmission electron microscope. The metallographer must be able to prepare a specimen of iron or steel with the proper metallographic procedures to reveal the true microstructural features in the specimen. It is important...