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transmission electron detectors

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Series: ASM Technical Books
Publisher: ASM International
Published: 23 January 2020
DOI: 10.31399/asm.tb.stemsem.t56000020
EISBN: 978-1-62708-292-1
... Abstract This chapter discusses the setup and use of a transmission electron detector in a typical scanning electron microscope (SEM). It describes the arrangement and function of the primary components in the detector, following the signal path from the sample to a micromirror array where...
Series: ASM Technical Books
Publisher: ASM International
Published: 23 January 2020
DOI: 10.31399/asm.tb.stemsem.t56000001
EISBN: 978-1-62708-292-1
... scanning electron microscopy (SEM) scanning transmission electron microscopy (STEM) transmission electron detectors STEM-in-SEM Copyright © 2020 ASM International® J.D. Holm and B.W. Caplins All rights reserved 10.31399/asm.tb.stemsem.t56000001 www.asminternational.org Chapter One Imaging...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2019
DOI: 10.31399/asm.tb.mfadr7.t91110434
EISBN: 978-1-62708-247-1
... detector scanning transmission electron microscope-EDS silicon drift detector wavelength dispersive X-ray detector Introduction By far the most common micro-analytical technique in the failure analysis laboratory is energy dispersive x-ray spectroscopy, known as EDX or EDS. It is commonly...
Series: ASM Technical Books
Publisher: ASM International
Published: 23 January 2020
DOI: 10.31399/asm.tb.stemsem.9781627082921
EISBN: 978-1-62708-292-1
Series: ASM Technical Books
Publisher: ASM International
Published: 01 August 2018
DOI: 10.31399/asm.tb.msisep.t59220085
EISBN: 978-1-62708-259-4
... detectors may represent more than the area of the sample where the electron beam impinged, and may originate from a significantly larger volume than would be preferred. All electron microscopes (transmission and scanning) have in common some basic features: a source, which is able to generate an electron...
Image
Published: 01 November 2019
Figure 18 A schematic representation of STEM implementation in a transmission electron microscope. Electrons scattered at high angles are captured by the annular detector to form the Z-contrast image. X-ray photons are captured to form STEM-EDS elemental map. The bright field detector More
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2019
DOI: 10.31399/asm.tb.mfadr7.t91110461
EISBN: 978-1-62708-247-1
... image recorded under parallel electron beam illumination. Figure 18 A schematic representation of STEM implementation in a transmission electron microscope. Electrons scattered at high angles are captured by the annular detector to form the Z-contrast image. X-ray photons are captured to form...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 March 2002
DOI: 10.31399/asm.tb.mgppis.t60400149
EISBN: 978-1-62708-258-7
... equipment. This chapter describes how these instruments can be used to gather important information about a microstructure. The instruments covered include image analyzers, transmission electron microscopes, scanning electron microscopes, electron probe microanalyzers, scanning transmission electron...
Book Chapter

Series: ASM Technical Books
Publisher: ASM International
Published: 01 April 2013
DOI: 10.31399/asm.tb.imub.t53720139
EISBN: 978-1-62708-305-8
.... Such problems sometimes can be overcome by using wavelength dispersive spectrometers, rather than energy dispersive detectors, or by using optical emission spectroscopy. Operating Principles Physical Basis The negatively charged electrons surrounding each atom’s nucleus exist in discrete energy...
Book Chapter

Series: ASM Technical Books
Publisher: ASM International
Published: 01 December 2003
DOI: 10.31399/asm.tb.cfap.t69780383
EISBN: 978-1-62708-281-5
... electrons that emanate from the surface. The secondary electron detector can also be used to detect backscattered electrons, although specialized backscatter detectors are available at relatively low cost. Generally, scanning transmission electron and scanning Auger microscopes also use a secondary electron...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2019
DOI: 10.31399/asm.tb.mfadr7.t91110180
EISBN: 978-1-62708-247-1
... of contactless characterization for the most important electronic device, the MOS - Field Effect Transistor, the heart of ICs and their basic digital element, the CMOS inverter. The article discusses the specification and selection of detectors for proper PE applications. The main topics are image resolution...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2019
DOI: 10.31399/asm.tb.mfadr7.t91110413
EISBN: 978-1-62708-247-1
... The SEM consists of an electron column, a sample stage, and one or more detectors, see Fig. 1 . The electron column will have an electron source, a series of magnetic and electrostatic lenses, and raster coils for scanning the beam. Of course, the range of electrons in air is very limited so a vacuum...
Book Chapter

Series: ASM Technical Books
Publisher: ASM International
Published: 01 April 2013
DOI: 10.31399/asm.tb.imub.t53720267
EISBN: 978-1-62708-305-8
... of ultrasonic flaw detectors, ultrasonic transducers, and search units and couplants. It then discusses the principles of operation, presentation, and interpretation of data of pulse echo and transmission methods. This is followed by sections providing information on general characteristics of ultrasonic waves...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2019
DOI: 10.31399/asm.tb.mfadr7.t91110335
EISBN: 978-1-62708-247-1
... be incorporated to collect signals with trajectories parallel to the optical axis. In-lens BSE detectors are commonly used to monitor FIB milling processes [21] . Electron transmission detectors enable scanning transmission electron microscopy (STEM) which are useful where features are resolvable to >0.6 nm...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2019
DOI: 10.31399/asm.tb.mfadr7.t91110042
EISBN: 978-1-62708-247-1
... to light that can be manipulated and focused with lenses, i.e., the visible light spectrum, plus the infrared and ultraviolet. We will not address non-photonic microscopy, e.g., electron microscopes, focused ion beams, ultrasonic or atomic force microscopes, none of which use photonic light for image...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 December 2018
DOI: 10.31399/asm.tb.fibtca.t52430107
EISBN: 978-1-62708-253-2
... categories into which different material characterization techniques are grouped are ( Ref 5.1 ): Techniques based on microscopy principles such as optical microscopy, scanning electron microscopy (SEM), transmission electron microscopy (TEM), and focused ion beam microscopy. Techniques based...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2019
DOI: 10.31399/asm.tb.mfadr7.t91110550
EISBN: 978-1-62708-247-1
... (a) & (c) are low magnification overview images of the PFIB cross section performed at the suspected solder bumps. Images (b) & (d) are high magnification images of the TSVs connecting to the solder bumps. Delamination at the interposer to the underfill was observed. Transmission Electron...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 April 2013
DOI: 10.31399/asm.tb.imub.t53720233
EISBN: 978-1-62708-305-8
... of radiation detectors. The term radiography usually implies a radiographic process that produces a permanent image on film (conventional radiography) or paper (paper radiography or xeroradiography), although in a broad sense it refers to all forms of radiographic inspection. When inspection involves viewing...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 January 2015
DOI: 10.31399/asm.tb.spsp2.t54410001
EISBN: 978-1-62708-265-5
... electrons of the various atoms to be ejected with the release of X-ray energies and wavelengths characteristic of the atoms ( Ref 1.4 ). In the scanning electron microscope the characteristic energy spectra are typically measured by solid state detectors in the process referred to as Energy Dispersive...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2023
DOI: 10.31399/asm.tb.edfatr.t56090109
EISBN: 978-1-62708-462-8
..., microscopy, FIB circuit edit, and scanning probe microscopy. delayering dopant profiling FIB circuit edit FinFET transistors gate-all-around field-effect transistor nanoprobing sample preparation scanning probe microscopy spatial resolution transmission electron microscopy Introduction...