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sputter coating

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Image
Published: 01 November 2019
Figure 19 SEM image of an aluminum line with 10 nm of Au/Pd sputter coating. All the small dark jagged lines are sputter grain artifacts. More
Image
Published: 01 December 2003
Fig. 1 Artifacts generated by improper platinum sputter coating of a 4.6 mm (0.18 in.) diameter polycarbonate rotating beam fatigue specimen. This SEM view shows a pattern in the coating reminiscent of “mudcracking.” Source: Ref 2 More
Image
Published: 01 November 2019
Figure 28 Secondary electron image of aluminum metal sputter coated with 10 nm of Au/Pt. The image has high resolution, but the original surface detail is obscured and the sputter coating grains introduce artifacts seen as jagged dark lines. More
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2019
DOI: 10.31399/asm.tb.mfadr7.t91110413
EISBN: 978-1-62708-247-1
... Abstract This article provides an overview of how to use the scanning electron microscope (SEM) for imaging integrated circuits. The discussion covers the principles of operation and practical techniques of the SEM. The techniques include sample mounting, sample preparation, sputter coating...
Image
Published: 01 March 2002
Fig. 6.23 A vacuum sputtering device used to deposit a thin coating of gold, or some other element, onto the surface of a SEM or EMPA specimen. Source: Polaron Instruments, Inc. More
Image
Published: 01 December 2003
Fig. 27 Features observed on fatigue area of polymethyl methacrylate rotating beam specimen. Sample was sputter coated with platinum for SEM examination. More
Image
Published: 01 July 2009
Fig. 22.21 Artistic presentation of a model illustrating the combined influence of substrate temperature and argon pressure on the microstructure of sputtered coatings. Source: Thornton 1977 , Hill 1986 More
Image
Published: 01 December 2003
Fig. 28 Features observed on fatigue area of polycarbonate rotating beam specimen. (a) Optical view at base of notch. (b) Higher-magnification electron fractograph. Sample was sputter coated with platinum for SEM examination. More
Book Chapter

Series: ASM Technical Books
Publisher: ASM International
Published: 01 January 2015
DOI: 10.31399/asm.tb.spsp2.t54410551
EISBN: 978-1-62708-265-5
..., travel through the vacuum, and deposit on a substrate ( Ref 22.32 ). For many applications, deposition processes that are based solely on thermal evaporation are being replaced by sputtering and ion plating, more efficient processes that use glow discharge plasmas. Sputtering is a coating process...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 July 2009
DOI: 10.31399/asm.tb.bcp.t52230361
EISBN: 978-1-62708-298-3
... Abstract This chapter discusses coating technologies that are applicable to beryllium, including physical and chemical vapor deposition, thermal evaporation, electroplating, sputtering, ion plating, and plasma arc spraying. It describes the advantages and disadvantages of each method...
Series: ASM Technical Books
Publisher: ASM International
Published: 31 January 2023
DOI: 10.31399/asm.tb.itfdtktmse.t56060001
EISBN: 978-1-62708-440-6
... deposition processes coating microstructure coating properties compound films dielectric coatings e-beam evaporation ion plating metallic coatings physical deposition processes sputtering thin films vapor phase epitaxy Introduction Thin films, like all coatings, are applied to base...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 January 1998
DOI: 10.31399/asm.tb.ts5.t65900305
EISBN: 978-1-62708-358-4
... efficient sputtering or ion-plating processes using glow discharge plasmas. Sputtering is a PVD coating process in which atoms are ejected mechanically from a target by the impact of ions or energetic neutral atoms. Figure 16-8 shows schematically the mechanism of sputtering in a simple diode system...
Series: ASM Technical Books
Publisher: ASM International
Published: 31 January 2023
DOI: 10.31399/asm.tb.itfdtktmse.9781627084406
EISBN: 978-1-62708-440-6
Series: ASM Technical Books
Publisher: ASM International
Published: 31 January 2023
DOI: 10.31399/asm.tb.itfdtktmse.t56060013
EISBN: 978-1-62708-440-6
...-enhanced CVD process temperature sputtering thin film purity vacuum ion plating Problem 1 Gas leaks into a vacuum chamber at a rate of 5 cm 3 atm sec −1 . The pump has a volumetric flow rate of 2000 liters sec −1 . Calculate the limiting achievable pressure. Solution P = Q / S...
Book Chapter

Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2013
DOI: 10.31399/asm.tb.mfub.t53740325
EISBN: 978-1-62708-308-9
... Abstract This chapter covers a wide range of finishing and coating operations, including cleaning, honing, polishing and buffing, and lapping. It discusses the use of rust-preventative compounds, conversion coatings, and plating metals as well as weld overlay, thermal spray, and ceramic...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 December 2003
DOI: 10.31399/asm.tb.pnfn.t65900163
EISBN: 978-1-62708-350-8
... Abstract Stop-off coatings prevent nitriding of selected areas on components. This chapter discusses the processes, advantages, and disadvantages of stop-off techniques for gas nitriding, salt bath nitriding, and ion nitriding. gas nitriding ion nitriding salt bath nitriding stop-off...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 March 2001
DOI: 10.31399/asm.tb.secwr.t68350125
EISBN: 978-1-62708-315-7
... Abstract This chapter discusses the use of coating methods and materials and their impact on corrosion and wear behaviors. It provides detailed engineering information on a wide range of processes, including organic, ceramic, and hot dip coating, metal plating and cladding, and the use of weld...
Image
Published: 01 January 1998
Fig. 16-12 Schematic of structural zones in PVD coatings as a function of substrate temperature and argon pressure in sputtering as proposed by Thornton. Source: Ref 39 , 40 More
Series: ASM Technical Books
Publisher: ASM International
Published: 30 April 2021
DOI: 10.31399/asm.tb.tpsfwea.t59300335
EISBN: 978-1-62708-323-2
... 60 to 62 HRC. Vacuum Coating These are typically thin coatings, and most but not all are applied in a vacuum chamber. There are many processes for applying these coatings, but they evaporate or sputter materials so that ions, atoms, or molecules of an additive material are coated onto...
Book Chapter

Series: ASM Technical Books
Publisher: ASM International
Published: 01 December 2003
DOI: 10.31399/asm.tb.cfap.t69780383
EISBN: 978-1-62708-281-5
... is applied by a method such as vacuum evaporation or sputtering. Coating must be performed carefully to avoid damaging the fracture surface (e.g., by excessive heating) or introducing artifacts associated with the coating process ( Fig. 1 , Ref 2 ). Fig. 1 Artifacts generated by improper platinum...