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spatial resolution

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Published: 01 November 2023
Fig. 2 (a) Spatial resolution requirements with technology scaling trends until 2028. The required resolution (in blue) appears to flatten out at about 100 nm. The available microscope resolution (in green) tracks the required resolution well. With visible probing, the spatial resolution More
Image
Published: 01 November 2019
Figure 19 Example of SDL using a SIL showing better than 200nm spatial resolution using a 1340nm laser source. The green contrast indicates a passing condition. (Image courtesy of Steven Kasapi, Credence Systems, Inc.) More
Image
Published: 01 November 2019
Figure 96 Gate oxide rupture site and characterization of EBAC spatial resolution vs beam energy presented in [14] showing (a) simulation of e-beam penetration with 7kV also showing a structural cross section with dimensions. (b) 8kV had optimal localization with 10kV having reasonable More
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2023
DOI: 10.31399/asm.tb.edfatr.t56090083
EISBN: 978-1-62708-462-8
... Abstract This chapter assesses the benefits of using a solid immersion lens (SIL) to detect faults in ICs via optical imaging and laser-stimulation techniques. It discusses the advantages and limitations of different types of SILs and their effect on spatial resolution, spot size, focus depth...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2019
DOI: 10.31399/asm.tb.mfadr7.t91110196
EISBN: 978-1-62708-247-1
.... The thermal stimulus examples are Optical Beam-Induced Resistance Change/Thermally-Induced Voltage Alteration and Seebeck Effect Imaging. Lastly, the article discusses the application of solid immersion lenses to improve spatial resolution. laser-based failure analysis photocurrent techniques scanning...
Image
Published: 01 November 2023
time resolution (limited by thermal time constants). (c) Thermal laser stimulation (DLS): spatial resolution degraded by thermal spreading, ~50 ps time resolution from available pulsed laser sources likely limited by thermal time constants to ~1 μs in practice More
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2023
DOI: 10.31399/asm.tb.edfatr.t56090003
EISBN: 978-1-62708-462-8
... the factors that influence signal strength, spatial and timing resolution, and alignment accuracy between signal response images and the physical layout of the IC. crosstalk electrical fault isolation electron beam probing laser assisted device alteration laser probing optical fault isolation...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2019
DOI: 10.31399/asm.tb.mfadr7.t91110209
EISBN: 978-1-62708-247-1
... of the electromagnetic spectrum. In the semiconductor industry, there are few devices that operate at such high temperatures. If we expand the scale shown in Figure 1 to temperatures around room temperature, we begin to understand the difficulties in performing high spatial resolution thermal imaging on semiconductor...
Image
Published: 01 November 2019
Figure 25 Comparison interaction volume in thin section of TEM sample and bulk material in SEM (not drawn to scale). The electrons can penetrate as deep as 8 μm in to the bulk sample at 30 keV [36] and degrade spatial resolution. In a thin TEM section, the interaction volume is limited More
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2019
DOI: 10.31399/asm.tb.mfadr7.t91110545
EISBN: 978-1-62708-247-1
... for qualitative and quantitative analysis of solar cell parameters. IR-LIT can produce thermal images with 10 µK temporal resolution and 5-10 µm spatial resolution. By using an AC modulation heating can be confined to smaller regions depending on the thermal time constant of the hot spot. The lock...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2019
DOI: 10.31399/asm.tb.mfadr7.t91110434
EISBN: 978-1-62708-247-1
... available because it is relatively cheap and easy to add an x-ray detector to a scanning electron microscope. However, as seen in Table 1 , EDS lacks the lateral spatial resolution, depth resolution and sensitivity of many other techniques. Nevertheless, with careful analysis EDS can measure many elements...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2019
DOI: 10.31399/asm.tb.mfadr7.t91110062
EISBN: 978-1-62708-247-1
..., a different approach is now required. Some recent publications have suggested synchrotron imaging for this use case [18] . While synchrotron results show a drastic improvement in spatial resolution, logistical and time issues prevent synchrotrons from being considered for daily FA use. Thus, a lab-based...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2019
DOI: 10.31399/asm.tb.mfadr7.t91110244
EISBN: 978-1-62708-247-1
...) and more efficient (due to improved SNR from stronger modulation and higher detector responsivity). Laser damage threshold is also higher at 1340nm, providing greater margins when setting laser power. The primary advantage to using 1064nm is the improved spatial resolution. The choice for the FA lab can...
Book Chapter

Series: ASM Technical Books
Publisher: ASM International
Published: 01 April 2013
DOI: 10.31399/asm.tb.imub.t53720139
EISBN: 978-1-62708-305-8
... capable of collimating the incident x-ray beam to smaller diameters as low as ~0.1 mm (~0.004 in.), thus enabling operator defined adjustment of lateral spatial resolution. In addition, the sample is usually mounted on an x-y stage that automatically translates it to the successive measurement points...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2023
DOI: 10.31399/asm.tb.edfatr.t56090091
EISBN: 978-1-62708-462-8
..., no/poor time resolution. (b) Time-resolved thermal reflectance: resolution degraded by thermal spreading, low sensitivity, ~1 μs time resolution (limited by thermal time constants). (c) Thermal laser stimulation (DLS): spatial resolution degraded by thermal spreading, ~50 ps time resolution from available...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2023
DOI: 10.31399/asm.tb.edfatr.9781627084628
EISBN: 978-1-62708-462-8
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2019
DOI: 10.31399/asm.tb.mfadr7.t91110219
EISBN: 978-1-62708-247-1
... for the detection of temperature gradients in the μ-Kelvin range at a spatial resolution of below 5 μm. A profound description of the fundamentals of lock-in thermography can be found elsewhere [3] . The heat, generated upon the dissipation of electrical power within the defect propagates through the IC stack...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2023
DOI: 10.31399/asm.tb.edfatr.t56090109
EISBN: 978-1-62708-462-8
..., microscopy, FIB circuit edit, and scanning probe microscopy. delayering dopant profiling FIB circuit edit FinFET transistors gate-all-around field-effect transistor nanoprobing sample preparation scanning probe microscopy spatial resolution transmission electron microscopy Introduction...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2019
DOI: 10.31399/asm.tb.mfadr7.t91110010
EISBN: 978-1-62708-247-1
... Using the package material propagation velocity, the TDR time measurements can also be equated to distance in the sample and location of open can be identified. With 30-40ps rise time of the TDR instrument and with dielectric constant 4 of FR4 material, spatial resolution of TDR is about 1mm. While...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2023
DOI: 10.31399/asm.tb.edfatr.t56090155
EISBN: 978-1-62708-462-8
... and measurement methods, and cross-sectioning and imaging. chip packages fault isolation imaging logic devices memory devices sample preparation spatial resolution technology gaps vertical integration volume analysis This chapter is part of a series of reports on the findings to date...