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Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2019
DOI: 10.31399/asm.tb.mfadr7.t91110180
EISBN: 978-1-62708-247-1
... Abstract Photon emission (PE) is one of the major optical techniques for contactless isolation of functional faults in integrated circuits (ICs) in full electrical operation. This article describes the fundamental mechanisms of PE in silicon based ICs. It presents the opportunities...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2019
DOI: 10.31399/asm.tb.mfadr7.t91110323
EISBN: 978-1-62708-247-1
... Abstract This article presents methods that enable one to consistently, uniformly and quickly remove substrate silicon from units without imparting damage to the structure of interest. It provides examples of electron beam probing and backside nano-probing techniques. The electron beam probing...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2019
DOI: 10.31399/asm.tb.mfadr7.t91110351
EISBN: 978-1-62708-247-1
... tools for first silicon debug. The etching capabilities of circuit edit FIB tools are then discussed, providing information on chemistry assisted etching in silicon oxides and low-k dielectrics. The chapter also discusses the requirements and procedures involved in edit operation: high aspect ratio...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 December 2016
DOI: 10.31399/asm.tb.ascaam.t59190001
EISBN: 978-1-62708-296-9
... Abstract This chapter serves as a study and guide on the main phase constituents of cast aluminum-silicon alloys, alpha-Al solid solution and Si crystals. The first section focuses on the structure of Al-Si castings in the as-cast state, covering the morphology of the alpha-Al solid solution...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 December 2016
DOI: 10.31399/asm.tb.ascaam.t59190035
EISBN: 978-1-62708-296-9
... Abstract Structurally differentiated intermetallic phases are important constituents in the microstructure of aluminum alloys, with the potential to influence properties, behaviors, and processing characteristics. These phases can form in aluminum-silicon alloys with transition metals (Fe, Mn...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 December 2016
DOI: 10.31399/asm.tb.ascaam.t59190089
EISBN: 978-1-62708-296-9
... Abstract This chapter is an atlas of microstructures observed in AlSi7Mg, AlSi11, and Al21CuNiMg modified with either eutectic (strontium, sodium) or hypereutectic (phosphorus) silicon crystals. The microstructure images reveal the as-cast state of gravity castings made in sand and metal molds...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 December 2016
DOI: 10.31399/asm.tb.ascaam.9781627082969
EISBN: 978-1-62708-296-9
Image
Published: 01 November 2019
Figure 21 a) TEM image of a strained silicon PFET; the gate and embedded-Silicon Germanium (e-SiGe) areas are shown. b) SSRM image of strained silicon PFETs; darker areas indicate lower R sp [16] . More
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Published: 01 November 2007
Fig. 16.4 Carbon and silicon composition ranges for various cast irons and silicon-containing steels More
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Published: 01 December 2016
Fig. 1.25 Primary crystals of silicon in hypereutectic aluminum-silicon alloy ingots. (a) Faceted equiaxed crystals, alloy AlSi20. (b) Dendrite crystals, alloy AlSi26. (c) Plate crystals, alloy AlSi50. LM, etched 1HF(1) More
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Published: 01 December 2016
Fig. 1.35 Effect of modifiers on αAl and silicon nucleation in aluminum-silicon alloy. 1, Aluminum nucleation in the presence of unidentified additions; 2, Silicon nucleation in the presence of AlP; 3, Silicon nucleation in the presence of AlNaSi; 4, Silicon nucleation in the presence More
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Published: 01 August 2005
Fig. 7.6 Variation of contact angle for gold-silicon alloys on silicon carbide at 1200 °C (2190 °F) as a function of alloy composition in relatively high- and low-oxygen partial pressure atmospheres (the silicon-rich end of the curve is derived by extrapolation because silicon is not molten More
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Published: 01 November 2019
Figure 2 An image of a unit that has just completed the bulk silicon removal process. More
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Published: 01 November 2019
Figure 3 An optical microscope image from a unit after the backside silicon etch process was completed. Silicon is removed from regions where the unit appears dark. The few remaining small bright spots are locations where silicon remains. More
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Published: 01 November 2019
Figure 5 A top down SEM image taken during the final stage of silicon removal. Silicon is removed from the bright region where structures are visible. More
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Published: 01 November 2019
Figure 25 The thick insulating layer that replaces the substrate silicon in a conventional cross-section TEM sample is shown. More
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Published: 01 November 2019
Figure 26 Completed backside silicon removed inverted cross-section TEM sample. More
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Published: 01 November 2019
Figure 9 An example of SIMS depth profiling of a 500 eV 11 B implant in silicon. More
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Published: 01 November 2019
Figure 3 An example of through silicon substrate imaging with an infrared LED for illumination. [15] More
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Published: 01 November 2019
Figure 14 Measured milling rates of silicon dioxide; this shows that the NH 4 OH chemistry reduces the removal rate of silicon dioxide and thus improves selectivity of copper over silicon oxide. [37] More