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silicides
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Image
Published: 01 November 2019
Figure 98 AVC image of an SOI sample deprocessed from the backside to the silicide layer. The probed bitline set to - 7V results in a bright contrast showing the entire bitline path.
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Image
Published: 01 November 2019
Figure 2 STEM images of a silicide spike causing junction leakage. (a) High angle annular dark field (HAADF) or mass contrast image from a planar sample and, (b) HAADF and Bright Field (BF) images from a cross-section sample extracted from the planar sample.
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Image
Published: 01 November 2019
Figure 14 A cross-section TEM image of stringers in the trench oxide, at the edge of active. The contrast variations in the small stringer on the left suggest that it is polycrystalline material (silicide). The homogeneous contrast in the large stringer on the right is consistent
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Image
in Metallography of Titanium and Its Alloys[1]
> Titanium: Physical Metallurgy, Processing, and Applications
Published: 01 January 2015
Fig. 7.25 Ti-11Sn-5Zr-2.5Al-1Mo-0.2Si bar. Primary alpha, transformed beta, and fine dispersions of titanium silicide after heating at 900 °C (1650 °F) for 1 h and air cooling, followed by reheating at 500 °C (930 °F) for 24 h and air cooling. Etchant: 10%HF-5%HNO 3 . Original magnification
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Image
Published: 01 November 2019
. Silicon nanocrystals layer (arrow) is clearly visible. However, the contrast variations observed in areas with other device features (such as contact, nitride spacers, silicide) should be carefully interpreted by taking it to account the contrast mechanisms (diffraction and mass) dominating those areas.
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Book Chapter
Series: ASM Technical Books
Publisher: ASM International
Published: 01 June 2008
DOI: 10.31399/asm.tb.emea.t52240583
EISBN: 978-1-62708-251-8
... oxygen as internal oxide particles to promote better ductility. Before placing niobium products in service, they can be protectively coated with aluminide or silicide compounds, such as hafnium silicide or iron-chromium silicide applied as a mixture of Si-20Cr-20Fe. The properties of a number...
Abstract
The refractory metals include niobium, tantalum, molybdenum, tungsten, and rhenium. These metals are considered refractory because of their high melting points, high-temperature mechanical stability, and resistance to softening at elevated temperatures. This article discusses the composition, properties, fabrication procedures, advantages and disadvantages, and applications of these refractory metals and their alloys. A comparison of some of the properties of the refractory metals with those of iron, copper, and aluminum is given in a table. The article concludes with a brief section on refractory metal protective coatings.
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2019
DOI: 10.31399/asm.tb.mfadr7.t91110461
EISBN: 978-1-62708-247-1
.... For dopant profile analysis using electron holography thicker (<160 nm) [30] sections are preferred. Planar (or Plan View) vs. Cross-Section TEM Planar and cross-section STEM images of a silicide spike are shown in Figure 2 . In planar TEM analysis, the thin section is parallel to the surface...
Abstract
The ultimate goal of the failure analysis process is to find physical evidence that can identify the root cause of the failure. Transmission electron microscopy (TEM) has emerged as a powerful tool to characterize subtle defects. This article discusses the sample preparation procedures based on focused ion beam milling used for TEM sample preparation. It describes the principles behind commonly used imaging modes in semiconductor failure analysis and how these operation modes can be utilized to selectively maximize signal from specific beam-specimen interactions to generate useful information about the defect. Various elemental analysis techniques, namely energy dispersive spectroscopy, electron energy loss spectroscopy, and energy-filtered TEM, are described using examples encountered in failure analysis. The origin of different image contrast mechanisms, their interpretation, and analytical techniques for composition analysis are discussed. The article also provides information on the use of off-axis electron holography technique in failure analysis.
Series: ASM Technical Books
Publisher: ASM International
Published: 01 March 2001
DOI: 10.31399/asm.tb.secwr.t68350125
EISBN: 978-1-62708-315-7
...-performance ceramic coatings include high-temperature glasses; high-temperature coatings based on oxides, carbides, nitrides, and silicides; and cermets. Ceramic coatings are applied to metals to protect them from oxidation and corrosion at room temperature and at elevated temperature. Special coatings have...
Abstract
This chapter discusses the use of coating methods and materials and their impact on corrosion and wear behaviors. It provides detailed engineering information on a wide range of processes, including organic, ceramic, and hot dip coating, metal plating and cladding, and the use of weld overlays, thermal spraying, and various deposition technologies.
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2019
DOI: 10.31399/asm.tb.mfadr7.t91110485
EISBN: 978-1-62708-247-1
... to the electrical properties of a material (e.g., carrier concentration, conductivity), the probes must be electrically conductive. This can be accomplished by coating the probe with a conductive material such as Pt-Ir, fabricating a solid wire Pt-Ir probe [2] , or forming a conductive silicide layer on the probe...
Abstract
Scanning Probe Microscope (SPM) has an increasing important role in the development of nanoscale semiconductor technologies. This article presents a detailed discussion on various SPM techniques including Atomic Force Microscopy (AFM), Scanning Kelvin Probe Microscopy, Scanning Capacitance Microscopy, Scanning Spreading Resistance Microscopy, Conductive-AFM, Magnetic Force Microscopy, Scanning Surface Photo Voltage Microscopy, and Scanning Microwave Impedance Microscopy. An overview of each SPM technique is given along with examples of how each is used in the development of novel technologies, the monitoring of manufacturing processes, and the failure analysis of nanoscale semiconductor devices.
Book Chapter
Series: ASM Technical Books
Publisher: ASM International
Published: 01 December 2001
DOI: 10.31399/asm.tb.aub.t61170100
EISBN: 978-1-62708-297-6
... 0.0004–0.004 Promotes FSG and SSG and increases nodule number. A large excess stabilizes carbides Calcium Present in ferroalloys and in inoculants ND Promotes mottling Cerium Cast scrap or intentional addition, often as mischmetal or rare-earth silicides 0.01–0.40 Retards mottling...
Abstract
This article explains how malleable iron is produced and how its microstructure and properties differ from those of gray and ductile iron. Malleable iron is first cast as white iron then annealed to convert the iron carbide into irregularly shaped graphite particles called temper carbon. Although malleable iron has largely been replaced by ductile iron, the article explains that it is still sometimes preferred for thin-section castings that require maximum machinability and wear resistance. The article also discusses the annealing and alloying processes by which these properties are achieved.
Book Chapter
Series: ASM Technical Books
Publisher: ASM International
Published: 01 January 2015
DOI: 10.31399/asm.tb.spsp2.t54410009
EISBN: 978-1-62708-265-5
... gas bubbling to homogenize temperature and composition, addition of alloying elements, injection of calcium silicide or lime for desulfurization and inclusion shape control, deoxidation, and vacuum degassing to remove hydrogen that causes embrittlement in later stages of processing or application...
Abstract
This chapter traces the history of steelmaking over three millennia, from the discovery of martensite in a mining tool dating from the twelfth century B.C. to the nineteenth century development of the Bessemer and Siemens processes. It also describes the work of early metallographers who discovered many phases and microstructures associated with steel and gave them their now familiar names. The chapter concludes with a brief discussion on the emergence of continuous casting and the subsequent development of strip casting production techniques.
Book Chapter
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2013
DOI: 10.31399/asm.tb.mfub.t53740325
EISBN: 978-1-62708-308-9
Abstract
This chapter covers a wide range of finishing and coating operations, including cleaning, honing, polishing and buffing, and lapping. It discusses the use of rust-preventative compounds, conversion coatings, and plating metals as well as weld overlay, thermal spray, and ceramic coatings and various pack cementation and deposition processes. It also discusses the selection and use of industrial paints and paint application methods.
Book Chapter
Series: ASM Technical Books
Publisher: ASM International
Published: 01 December 2000
DOI: 10.31399/asm.tb.ttg2.t61120131
EISBN: 978-1-62708-269-3
... for protecting titanium aluminides: aluminizing, metal-chromium-aluminum-yttrium overlay coatings and silicides/ceramics. The former two approaches are adaptations of coating technology developed for superalloys while the latter approach is adapted from technology for refractory metal alloys. Protection...
Abstract
This chapter discusses some of the promising developments in the use of titanium, including titanium aluminides, titanium matrix composites, superplastic forming, spray forming, nanotechnology, and rapid solidification rate processing. It also reports on efforts to increase the operating temperature range of conventional titanium alloys and reduce costs.
Book Chapter
Series: ASM Technical Books
Publisher: ASM International
Published: 01 December 2015
DOI: 10.31399/asm.tb.cpi2.t55030169
EISBN: 978-1-62708-282-2
... temperatures to 65 °C (150 °F). The high-magnesium alloys are used extensively in marine vessels and structures. 6<italic>xxx</italic> Series The alloys in this series contain primarily magnesium (<2%) and silicon (<2%), which form a strengthening constituent, magnesium silicide. Several...
Abstract
This chapter addresses the general effects of composition, mechanical treatment, surface treatment, processing, and fabrication operations on the corrosion resistance of aluminum and its alloys. Different types of surface treatments covered include claddings, anodizing, and conversion coatings. The processing steps that can have relatively significant impact on corrosion resistance are homogenization, rolling, extrusion, quenching, aging, and annealing.
Book Chapter
Book: Principles of Brazing
Series: ASM Technical Books
Publisher: ASM International
Published: 01 August 2005
DOI: 10.31399/asm.tb.pb.t51230221
EISBN: 978-1-62708-351-5
Abstract
This chapter discusses the processes involved in the wetting, spreading, and chemical interaction of a braze on a nonmetal. The chapter reviews the key materials and process issues relating to the joining of nonmetals using active brazing. Emphasis is placed on the differences in brazing to metals by established methods. The chapter also describes the designing process and properties of metal/nonmetal joints.
Book Chapter
Book: Introduction to Thin Film Deposition Techniques: Key Topics in Materials Science and Engineering
Series: ASM Technical Books
Publisher: ASM International
Published: 31 January 2023
DOI: 10.31399/asm.tb.itfdtktmse.t56060001
EISBN: 978-1-62708-440-6
..., carbides, nitrides, borides, silicon and silicides, and oxides. Of these, the most prominent thin film materials deposited by CVD currently are those for electronic and protective (e.g., corrosion-resistant) applications. These include polysilicon, refractory materials (specifically oxides of silicon...
Abstract
This chapter presents the theory and practice associated with the application of thin films. The first half of the chapter describes physical deposition processes in which functional coatings are deposited on component surfaces using mechanical, electromechanical, or thermodynamic techniques. Physical vapor deposition (PVD) techniques include sputtering, e-beam evaporation, arc-PVD, and ion plating and are best suited for elements and compounds with moderate melting points or when a high-purity film is required. The remainder of the chapter covers chemical vapor deposition (CVD) processes, including atomic layer deposition, plasma-enhanced and plasma-assisted CVD, and various forms of vapor-phase epitaxy, which are commonly used for compound films or when deposit purity is less critical. A brief application overview is also presented.
Book Chapter
Series: ASM Technical Books
Publisher: ASM International
Published: 01 January 2015
DOI: 10.31399/asm.tb.tpmpa.t54480141
EISBN: 978-1-62708-318-8
... 7.25 shows a fine dispersion of titanium silicide (Ti 5 Si 3 ) in the Ti-679 alloy. The intermetallic phase, evident both within the alpha grains and at the grain boundaries, enhances the strength of the alloy at elevated temperatures. Fig. 7.24 Ti-5Ni sheet. Alpha and Ti2Ni (dark phase...
Abstract
The practical application of metals and alloys is guided largely by information obtained through the study of their microstructure. This chapter examines a wide range of titanium microstructures, identifying characteristic features and explaining what they reveal about processing, properties, and performance. It includes images of elongated and equiaxed structures, primary alpha, transformed beta, and metastable phases as well as spheroidal and intergranular beta, alpha case, and intermetallic compounds. It also defines important terms and provides step-by-step procedures for preparing titanium for metallographic analysis.
Book Chapter
Book: Principles of Brazing
Series: ASM Technical Books
Publisher: ASM International
Published: 01 August 2005
DOI: 10.31399/asm.tb.pb.t51230207
EISBN: 978-1-62708-351-5
... preforms that are ideal for diffusion brazing processes. Another melting-point depressant that is widely used in melt-spun foils is silicon. However, silicon diffuses much more slowly in nickel than do boron and phosphorus. As a result, relatively persistent silicides tend to form in joints during...
Series: ASM Technical Books
Publisher: ASM International
Published: 31 January 2023
DOI: 10.31399/asm.tb.itfdtktmse.9781627084406
EISBN: 978-1-62708-440-6
Book Chapter
Series: ASM Technical Books
Publisher: ASM International
Published: 01 October 2012
DOI: 10.31399/asm.tb.lmub.t53550299
EISBN: 978-1-62708-307-2
... be obtained through the use of protective coatings. Three general coating alloy approaches have been taken for protecting titanium aluminides: MCrAlY (M = Ni, Fe, Co), aluminizing, and silicides/ceramics. Protection of titanium aluminides under oxidizing conditions has been achieved with all three approaches...
Abstract
Titanium aluminides are lightweight materials that have relatively high melting points and good high-temperature strength. They also tend to be stronger and lighter than conventional titanium alloys, but considerably less ductile. This chapter begins with a review of the titanium-aluminum phase diagram, focusing on the properties, compositions, and microstructures of alpha-2 Ti3Al alloys. It then describes the properties, microstructures, and compositions of orthorhombic, gamma, and near-gamma alloys as well as the processing methods and procedures normally used in their production.
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