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scanning transmission electron microscope-EDS

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Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2019
DOI: 10.31399/asm.tb.mfadr7.t91110434
EISBN: 978-1-62708-247-1
... discussion includes a comparison of scanning transmission electron microscope-EDS elemental mapping and mapping with an SDD. A brief section is devoted to the discussion on the artifacts that occur during X-ray mapping. elemental mapping energy dispersive X-ray spectroscopy lithium-drifted EDS...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2019
DOI: 10.31399/asm.tb.mfadr7.t91110461
EISBN: 978-1-62708-247-1
... characteristic X-rays emitted as a result of the interaction of incident electron beam with inner shell electrons of the atoms of various elements are collected by a spectrometer. EDS can be performed using scanning or transmission electron microscopes. In SEM based EDS, when the high energy electron beam is...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2019
DOI: 10.31399/asm.tb.mfadr7.t91110413
EISBN: 978-1-62708-247-1
... Abstract This article provides an overview of how to use the scanning electron microscope (SEM) for imaging integrated circuits. The discussion covers the principles of operation and practical techniques of the SEM. The techniques include sample mounting, sample preparation, sputter coating...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2019
DOI: 10.31399/asm.tb.mfadr7.t91110447
EISBN: 978-1-62708-247-1
... six methods used in semiconductor industry are: Auger spectroscopy, dynamic secondary ion mass spectroscopy, time of flight static secondary ion mass spectroscopy (ToF-SIMS), X-ray photoelectron spectroscopy, scanning electron microscope-energy dispersive X-ray spectroscopy (SEM-EDX), and transmission...
Book Chapter

Series: ASM Technical Books
Publisher: ASM International
Published: 01 April 2013
DOI: 10.31399/asm.tb.imub.t53720139
EISBN: 978-1-62708-305-8
... interest, as in a scanning electron microscope. However, the primary tool for chemical analysis is the Auger electron detector. Fig. 9 Schematic of a scanning Auger microprobe. Source: Ref 3 Auger electrons are emitted as the excited atoms relax. In a sense, they are the complements of the...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 December 2003
DOI: 10.31399/asm.tb.cfap.9781627082815
EISBN: 978-1-62708-281-5
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2019
DOI: 10.31399/asm.tb.mfadr7.t91110335
EISBN: 978-1-62708-247-1
... axis. In-lens BSE detectors are commonly used to monitor FIB milling processes [21] . Electron transmission detectors enable scanning transmission electron microscopy (STEM) which are useful where features are resolvable to >0.6 nm dimensions. A variety of analytical tools such as EDS and EBSD...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 March 2012
DOI: 10.31399/asm.tb.pdub.t53420239
EISBN: 978-1-62708-310-2
... a sample, creating backscattered electrons, secondary electrons, characteristic X-rays, and Auger electrons, among other signals. Scanning electron microscopes are often coupled with energy-dispersive X-ray microanalysis (EDX), a microanalytical technique that uses the characteristic spectrum of X...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2019
DOI: 10.31399/asm.tb.mfadr7.t91110153
EISBN: 978-1-62708-247-1
... delayering and Transmission Electron Microscope (TEM), Scanning Electron Microscope (SEM), or FIB work. Will the preparation methods such as an epoxy mount complicate subsequent removal and potential topside delayering once the defect is identified with photon emission or laser stimulus methods from the...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2019
DOI: 10.31399/asm.tb.mfadr7.t91110506
EISBN: 978-1-62708-247-1
... [10] . DC characterization, for example of an individual bit cell [11] , is useful. This often requires making routing cuts and depositing probe pads using a FIB. Various imaging techniques such as Scanning Electron Microscopy (SEM), Transmission Electron Microscopy (TEM) can be employed [12...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2019
DOI: 10.31399/asm.tb.mfadr7.t91110351
EISBN: 978-1-62708-247-1
... product is not completely redesigned, which means that a few refinements are made to provide more performance or features over the last generation product. For the most part the design and layout software Electronic Design Automation (EDA) tools which also produce the GDSII (Graphic Database System) used...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 March 2002
DOI: 10.31399/asm.tb.mgppis.9781627082587
EISBN: 978-1-62708-258-7
Series: ASM Technical Books
Publisher: ASM International
Published: 01 August 1999
DOI: 10.31399/asm.tb.lmcs.9781627082914
EISBN: 978-1-62708-291-4
Series: ASM Technical Books
Publisher: ASM International
Published: 01 December 1984
DOI: 10.31399/asm.tb.mpp.9781627082600
EISBN: 978-1-62708-260-0
Series: ASM Technical Books
Publisher: ASM International
Published: 01 September 2008
DOI: 10.31399/asm.tb.fahtsc.t51130417
EISBN: 978-1-62708-284-6
... tempered tooth inside are obtained. Figures 27 ( a to d ) show various automobile parts that were induction surface hardened using the single-shot or scan-hardening technique (Ref 19) . They were prepared for macroscopic and microscopic examinations of the hardened layer. The segments of the...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 September 2008
DOI: 10.31399/asm.tb.fahtsc.t51130001
EISBN: 978-1-62708-284-6
... dimensional changes after austenitizing and then quenching in water are greater than quenching in oil (Ref 3) . The laws that govern heat transmission are very important to the engineer in heat treatment design. There are three different types of heat transfer: conduction, convection, and radiation (Ref...
Book Chapter

Series: ASM Technical Books
Publisher: ASM International
Published: 01 October 2012
DOI: 10.31399/asm.tb.lmub.t53550033
EISBN: 978-1-62708-307-2
... selected for its electrical conductivity, which is nearly twice that of copper on an equivalent weight basis. The requirements of high conductivity and mechanical strength can be met by use of long-line, high-voltage aluminum steel-cored reinforced transmission cable. The thermal conductivity of aluminum...