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scanning probe microscopy

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Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2019
DOI: 10.31399/asm.tb.mfadr7.t91110485
EISBN: 978-1-62708-247-1
... Abstract Scanning Probe Microscope (SPM) has an increasing important role in the development of nanoscale semiconductor technologies. This article presents a detailed discussion on various SPM techniques including Atomic Force Microscopy (AFM), Scanning Kelvin Probe Microscopy, Scanning...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 August 2018
DOI: 10.31399/asm.tb.msisep.t59220085
EISBN: 978-1-62708-259-4
..., and laser scanning microscopes. atom probe tomography atomic force microscopy laser scanning confocal microscopy metallography scanning electron microscopy scanning transmission electron microscopy transmission electron microscopy Although optical microscopy is based on the interaction...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 June 2016
DOI: 10.31399/asm.tb.hpcspa.t54460121
EISBN: 978-1-62708-285-3
... coatings. The techniques covered are optical microscopy, X-Ray diffraction, scanning electron microscopy, focused ion beam machining, electron probe microanalysis, transmission electron microscopy, and electron backscattered diffraction. The techniques also include electron channeling contrast imaging, X...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2019
DOI: 10.31399/asm.tb.mfadr7.t91110001
EISBN: 978-1-62708-247-1
..., deprocessing sequentially delayers, employing both mechanical and chemical means. The metallization and thin films are inspected using scanning electron microscopy until the defect site is revealed. Depending on the nature of the failure, a secondary localization step using nanoprobing may be required...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 January 2015
DOI: 10.31399/asm.tb.spsp2.t54410001
EISBN: 978-1-62708-265-5
... are given throughout this book, and the techniques used to produce the images are identified in the figure captions. Scanning Electron Microscopy Microstructures on polished and etched steel surfaces, shown by variations in reflected light within the resolution limits of the light microscope...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2019
DOI: 10.31399/asm.tb.mfadr7.t91110506
EISBN: 978-1-62708-247-1
... characterization, for example of an individual bit cell [11] , is useful. This often requires making routing cuts and depositing probe pads using a FIB. Various imaging techniques such as Scanning Electron Microscopy (SEM), Transmission Electron Microscopy (TEM) can be employed [12] . Cross-section or plan...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2019
DOI: 10.31399/asm.tb.mfadr7.t91110196
EISBN: 978-1-62708-247-1
... Abstract This article reviews the basic physics behind active photon injection for local photocurrent generation in silicon and thermal laser stimulation along with standard scanning optical microscopy failure analysis tools. The discussion includes several models for understanding the local...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2019
DOI: 10.31399/asm.tb.mfadr7.t91110285
EISBN: 978-1-62708-247-1
... probe transistor characterization, two probe transistor characterization, and probing and characterizing metallization issues. The imaging techniques discussed are those that are specific to atomic force nanoprober or scanning electron microscope based tools. They are current contrast imaging, scanning...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2019
DOI: 10.31399/asm.tb.mfadr7.t91110269
EISBN: 978-1-62708-247-1
... influencing the VC generation (capacitance, leakage, doping, and circuitry) is very helpful for successful failure localization. active voltage contrast failure localization focused ion beam passive voltage contrast scanning electron microscopy Introduction The common Passive Voltage...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2019
DOI: 10.31399/asm.tb.mfadr7.t91110461
EISBN: 978-1-62708-247-1
... preparation involves thinning the area of interest containing the defect to achieve electron transparency, which is an irreversible destructive process. A variety of TEM operation modes and techniques, including the conventional parallel beam illumination TEM, scanning transmission electron microscopy (STEM...
Series: ASM Technical Books
Publisher: ASM International
Published: 23 January 2020
DOI: 10.31399/asm.tb.stemsem.t56000001
EISBN: 978-1-62708-292-1
... Abstract This chapter discusses the principles of scanning transmission electron microscopy (STEM) as implemented using conventional scanning electron microscopes (SEMs). It describes the pros and cons of low-energy imaging and diffraction, addresses basic hardware requirements, and provides...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2019
DOI: 10.31399/asm.tb.mfadr7.t91110323
EISBN: 978-1-62708-247-1
... provides a smooth surface for the ensuing silicon etch. The silicon endpoint thickness depends on the requirements of the fault isolation technique that is going to be used. For Infrared Emission Microscopy (IREM), Laser Voltage Probing (LVP) and Laser Assisted Device Alteration (LADA) subsequent...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2019
DOI: 10.31399/asm.tb.mfadr7.t91110335
EISBN: 978-1-62708-247-1
... be incorporated to collect signals with trajectories parallel to the optical axis. In-lens BSE detectors are commonly used to monitor FIB milling processes [21] . Electron transmission detectors enable scanning transmission electron microscopy (STEM) which are useful where features are resolvable to >0.6 nm...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2019
DOI: 10.31399/asm.tb.mfadr7.t91110111
EISBN: 978-1-62708-247-1
... for this is that real life device scanning requires electrical connection to the circuit that is done by either using probe needles, or, in the case of packaged devices, wirebonding to the package interconnect. Furthermore, for backside or packaged devices with no direct access to the circuitry, sometimes...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2019
DOI: 10.31399/asm.tb.mfadr7.t91110244
EISBN: 978-1-62708-247-1
... the imaging optics of a laser scanning microscope, has interacted with the active layer of a device. Many light-matter interactions take place within the focal volume of the probe beam; however, for LVP there are specific optoelectronic phenomena that dominate. These are split into electro-optical effects...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 March 2002
DOI: 10.31399/asm.tb.mgppis.t60400149
EISBN: 978-1-62708-258-7
... equipment. This chapter describes how these instruments can be used to gather important information about a microstructure. The instruments covered include image analyzers, transmission electron microscopes, scanning electron microscopes, electron probe microanalyzers, scanning transmission electron...
Book Chapter

Series: ASM Technical Books
Publisher: ASM International
Published: 01 December 2009
DOI: 10.31399/asm.tb.sfa.t52780093
EISBN: 978-1-62708-268-6
.... Techniques in this area include visual examination, low-power magnification, optical and scanning electron microscopy, and photography. Dimensional inspection and related approaches for assessing suspected item dimensions and conformance to drawing and specification requirements and determining...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2019
DOI: 10.31399/asm.tb.mfadr7.t91110153
EISBN: 978-1-62708-247-1
... assisted Scanning Capacitive Microscopy (SCM) demonstrates the enabling importance of CMP [21] . Final polishing can be done in contour mode or simply with a constant loading force. The soft nature of the polish tip reduces the concern over curvature and tip convolution. Both the 3-axis and 5-axis...
Series: ASM Technical Books
Publisher: ASM International
Published: 23 January 2020
DOI: 10.31399/asm.tb.stemsem.9781627082921
EISBN: 978-1-62708-292-1
Book Chapter

Series: ASM Technical Books
Publisher: ASM International
Published: 01 April 2013
DOI: 10.31399/asm.tb.imub.t53720139
EISBN: 978-1-62708-305-8
... Techniques Nonsurface Specific Methods Nonsurface specific methods include scanning electron microscopy (SEM), electron probe microanalysis (EPMA), and transmission electron microscopy (TEM). Scanning Electron Microscopy, Electron Probe Microanalysis (SEM, EPMA) These methods are better...