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sample tilt

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Image
Published: 01 November 2019
Figure 5 Wax mounted sample with tilt designation. Top cavity access has been refilled with epoxy and backside leadframe ground off at this point. Points “M1” and “M2” are micrometer adjustment points forming a spring loaded adjustable triangle with fixed pivot point “P”. “O” is used More
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2019
DOI: 10.31399/asm.tb.mfadr7.t91110413
EISBN: 978-1-62708-247-1
..., sample tilt and image composition, focus and astigmatism correction, dynamic focus and image correction, raster alignment, and adjusting brightness and contrast. The article also provides information on achieving ultra-high resolution in the SEM. It concludes with information on the general...
Image
Published: 01 November 2019
Figure 11 Copper plane etched with Ga + only. The uneven etching is due to variation in copper grain orientations. Sample tilted relative to the beam to accentuate surface roughness. [19] More
Image
Published: 01 August 2018
Fig. 4.16 Illumination arrangement to avoid reflections. (a) Sample is tilted to avoid the camera reflection on the sample surface. This arrangement will lead to some distortion. (b) Camera axis is dislocated with respect to the sample. More
Series: ASM Technical Books
Publisher: ASM International
Published: 23 January 2020
DOI: 10.31399/asm.tb.stemsem.t56000020
EISBN: 978-1-62708-292-1
... that the particles are of different composition than the amorphous carbon. Diffraction patterns from individual particles can be recorded by tilting all of the DMD mirrors towards the CMOS camera, positioning the electron beam at locations of interest on the sample, and recording images of the scattering patterns...
Series: ASM Technical Books
Publisher: ASM International
Published: 23 January 2020
DOI: 10.31399/asm.tb.stemsem.9781627082921
EISBN: 978-1-62708-292-1
Image
Published: 01 November 2019
Figure 39 (a) A cross-section TEM image NMOS transistor, tilted few degrees away from [110] Si zone-axis to minimize diffraction effects. (b) An image of reference hologram without the sample in the path of the beam, recorded after positively biasing the biprism wire. (c) Image of the hologram More
Image
Published: 01 November 2019
Figure 4 A cross-sectional scanning electron image of the lift-out TEM sample inside the FIB milled cavity. The surface of the die is tilted 52° with reference to electron beam. More
Image
Published: 01 November 2019
Figure 8 Illustration showing how a specific region of a bowed device under test (DUT) can be selected for targeted lapping through tilt adjustments of the Microhub assembly sample holder. More
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2019
DOI: 10.31399/asm.tb.mfadr7.t91110153
EISBN: 978-1-62708-247-1
... films to establish a smooth surface. Since the device surface is in contact with a large region of the platen, wear-out of the lapping material is reduced. The sample is affixed to a removable puck such as in Figure 5 . The reference marks allow for tilt pivoting of the sample to ensure it is parallel...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2019
DOI: 10.31399/asm.tb.mfadr7.t91110391
EISBN: 978-1-62708-247-1
... would for a bare Si die, polishing to the area of interest. Coat as needed and mount for FIB as if you were going to do a cut on the top surface. When sample is loaded and aligned, tilt to 60°. If your tool doesn’t support a 60° tilt, you can either polish the cross-section at an angle or prop...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2019
DOI: 10.31399/asm.tb.mfadr7.t91110269
EISBN: 978-1-62708-247-1
... of leaving secondary electrons. Immediately after that the majority of produced secondary electrons are prevented from leaving the sample by the electric field. These structures appear dark in the image. Grounded structures do not charge and appear bright because of the high secondary electron yield...
Series: ASM Technical Books
Publisher: ASM International
Published: 23 January 2020
DOI: 10.31399/asm.tb.stemsem.t56000001
EISBN: 978-1-62708-292-1
... to be tilted or positioned in unique orientations with respect to the optic axis. Ideally, though, the sample holder allows the user to position a sample anywhere and in any orientation in 4 STEM-in-SEM the vacant space between the SEM pole piece and the transmission detector. To that end, single-sample...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 February 2005
DOI: 10.31399/asm.tb.chffa.t51040115
EISBN: 978-1-62708-300-3
... die force is not exerted centrally on the slide, causing it to tilt ( Fig. 11.5 ). The standard press is able to absorb a maximum slide tilt of 0.8 mm/m. If a higher offcenter loading capability is desired, then the press design must be more rigid. In this case, the slide gibs will have greater...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 August 2018
DOI: 10.31399/asm.tb.msisep.t59220085
EISBN: 978-1-62708-259-4
... have a significant effect on contrast in this image mode. Sample tilting with respect to the incident electron beam has also an important effect on the ability of SEs to reach the SE detector. Even though SEM construction is relatively complex, images from this microscope are normally easy...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2019
DOI: 10.31399/asm.tb.mfadr7.t91110144
EISBN: 978-1-62708-247-1
.... It also presents a case study illustrating the application of CNC milling to isolate MCM leakage failure. chemical etching CNC machining flat lapping frontside sample preparation laser decap method laser etching mechanical milling multi-chip module plasma reactive ion etching...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 December 2018
DOI: 10.31399/asm.tb.aceg.t68410029
EISBN: 978-1-62708-280-8
... are essential for all processes (GPM, low pressure permanent molding (LPPM), and squeeze casting) to deliver high-quality castings with superior properties. GPM casting uniquely requires tilt pouring, the use of a pour cup skimmer, and techniques for keeping feed paths open to ensure high-quality castings...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2019
DOI: 10.31399/asm.tb.mfadr7.t91110461
EISBN: 978-1-62708-247-1
... scanning electron image of the lift-out TEM sample inside the FIB milled cavity. The surface of the die is tilted 52° with reference to electron beam. Figure 5 (a) Low magnification optical image of the 3mm diameter membrane coated grid. The location of the sample is indicated by the arrow. (b...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 August 2018
DOI: 10.31399/asm.tb.msisep.t59220039
EISBN: 978-1-62708-259-4
... and glare can be found in photographic technique books ( Ref 10 ). Fig. 4.16 Illumination arrangement to avoid reflections. (a) Sample is tilted to avoid the camera reflection on the sample surface. This arrangement will lead to some distortion. (b) Camera axis is dislocated with respect...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2023
DOI: 10.31399/asm.tb.edfatr.t56090083
EISBN: 978-1-62708-462-8
... application is being considered ( Ref 8 ). Aberration correction of a combination of objective lens and spherical-shaped SIL is normally realized by adjusting the distance between the lens group according to the Si substrate thickness (left side, Fig. 4 ). It is only suitable for thin samples, because...