This chapter familiarizes readers with the basic concepts of corrosion, discussing chemical reactions, ion transfer mechanisms, electrochemical processes and variables, and the formation of solid corrosion products. It presents a simple but effective teaching tool, the elementary electrochemical corrosion circuit, using it to explain how electric potential differences drive the corrosion process and how corrosion rates vary in proportion to current density. The chapter concludes with a discussion on the importance of corrosion products, such as oxides and hydroxides, and how their formation can be a major factor in controlling corrosion.

This chapter discusses the principles of corrosion of metals in aqueous environments. The thermodynamics of aqueous corrosion is the subject of the first half of this chapter, which addresses concepts such as corrosion reactions and free-energy change, the relationship between free energy and electrochemical potential, the effect of ionic concentration on electrode potential, and the corrosion behavior of a metal based on its potential-pH diagram. The corrosion (potential-pH) behavior of iron, gold, copper, zinc, aluminum, and titanium are described. Understanding the kinetics of corrosion and the factors that control the rates of corrosion reactions requires examination of the concepts of polarization behavior and identification of the various forms of polarization in an electrochemical cell. These concepts, addressed in the remaining of this chapter, include anodic and cathodic reactions, the mixed-potential theory, and the exchange currents.

This chapter lays the groundwork for understanding electrode kinetics associated with corrosion. It presents a simple but useful theory relating kinetics to the polarization behavior of half-cell reactions. The theory is based on the observation that electrode potentials vary as a function of current density or charge transfer in a given area. The chapter explains how to measure and plot electrode potentials and currents and how to interpret the resulting polarization curves. It also discusses the effects of concentration gradients, explaining how they cause diffusion and, in some cases, produce changes in electrode potential.

This chapter provides a thorough introduction to the electrochemical thermodynamics that govern electrode reactions associated with corrosion. It begins with a review of the thermodynamic criteria for the stability of chemical reactions based on Gibbs free energy and explains how energies of formation are determined using the oxidation of iron as an example. It then considers how iron reacts with hydrochloric acid, explaining how it can be expressed as two half reactions modeled as electrodes in an electrochemical cell. It goes on to describe the chemical reactions occurring at each electrode, accounting for different variables, mechanisms, and electrochemical effects. The chapter concludes with an in-depth review of Pourbaix diagrams, explaining what they reveal about the stability of metal-water systems and the formation of corrosion products.

This chapter addresses the basic concepts important to understanding corrosion of metals. It begins with an overview of the three types of behaviors that a metal exhibits when immersed in an environment and of the four requirements of a corrosion cell. The chapter then covers the important characteristics of metals with respect to corrosion, namely the metallurgical characteristics, the inherent tendency to corrode, and the tendency to form insoluble corrosion products. The important characteristics of aqueous solutions with respect to corrosion are then addressed. The characteristics include: conductivity of the solution, acidity and alkalinity, oxidizing power, degree of ionization, and solubility in the solution. These characteristics, in combination with the characteristics of the metal, will determine the corrosion behavior of a metal/environment combination. The chapter concludes with a section on the determination of corrosion rates and corrosion rate allowances.

There are several analytical methods available that can be used in-line on whole wafers as well as off-line on de-processed products that are returned from the field. These techniques are surface analytical techniques that can be used to characterize the bulk of the material. The main six methods used in semiconductor industry are: Auger spectroscopy, dynamic secondary ion mass spectroscopy, time of flight static secondary ion mass spectroscopy (ToF-SIMS), X-ray photoelectron spectroscopy, scanning electron microscope-energy dispersive X-ray spectroscopy (SEM-EDX), and transmission electron microscope-EDX. This review specifically addresses ToF-SIMS and describes some typical examples of the application of Auger and SEM-EDX.

Titanium and its alloys are used chiefly for their high strength-to-weight ratio, but they also have excellent corrosion resistance, better even than stainless steels. Titanium, as the chapter explains, is protected by a tenacious oxide film that forms rapidly on exposed surfaces. The chapter discusses the factors that influence the growth and quality of this naturally passivating film, particularly the role of oxidizing and inhibiting species, temperature, and alloying elements. It also discusses the effect of different corrosion processes and environments as well as hydrogen, stress-corrosion cracking, liquid metal embrittlement, and surface treatments.

This chapter discusses the foundational principles of materials science. It begins with a review of the periodic table and the fundamental particles, including atoms, ions, and molecules, that constitute matter. It also reviews the types of bonds that form between atoms and the relative levels of force they produce. It describes the difference between crystalline and noncrystalline or amorphous materials and discusses common crystal structures, including face-centered cubic, body-centered cubic, hexagonal close packed, and diamond cubic. It also describes the structure of sodium chloride and includes a list of structurally similar compounds.

This chapter reviews the basic chemistry of beryllium metals and compounds, including beryllium hydroxide, beryllium carbonates, beryllium fluoride, and beryllium chloride. It discusses the uses as well as application challenges of various forms of beryllium and includes information on their chemical properties and reactions.

This chapter is a detailed study of the localized corrosion behavior of steel, copper, and aluminum alloys. It applies the basic principles of electrochemistry, as well as materials science and solid and fluid mechanics, to explain the causes and effects of pitting, crevice corrosion, stress corrosion cracking, and corrosion fatigue. It describes the underlying mechanisms associated with each process and how they relate to the microstructure of the metal or alloy, the physical condition of the surface, and other factors such as the coupling of the metal to a dissimilar metal or surface film.