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Felix Beaudoin, Edward Cole, Jr.
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Venkat Krishnan Ravikumar, Kristofor Dickson, Christian Boit
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The interaction images when using 1064nm and 1300nm lasers on a speed path ...
Available to Purchase
in LADA and SDL: Powerful Techniques for Marginal Failures
> Microelectronics Failure Analysis: Desk Reference
Published: 01 November 2019
Figure 25 The interaction images when using 1064nm and 1300nm lasers on a speed path failure. The images show that both lasers cause the pMOS transistor to speed up when its source was illuminated, which indicates that thermal heating was dominating in both cases.
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Published: 01 November 2010
Image
Laser Signal Injection Microscope (LSIM) forms an image by detecting laser ...
Available to PurchasePublished: 01 November 2019
Figure 37 Laser Signal Injection Microscope (LSIM) forms an image by detecting laser induced changes in microcircuits. More commonly known by OBIRCH, TIVA, XIVA, etc. Note that an LSIM can simultaneously produce an image by reflection.
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Scan cells’ bounding boxes overlay with (a) reflected laser and (b) laser-a...
Available to Purchase
in Overview of Wafer-level Electrical Failure Analysis Process for Accelerated Yield Engineering
> Microelectronics Failure Analysis: Desk Reference
Published: 01 November 2019
Figure 17 Scan cells’ bounding boxes overlay with (a) reflected laser and (b) laser-assisted device-alteration signal images.
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Book Chapter
Physics of Laser-Based Failure Analysis
Available to PurchaseSeries: ASM Technical Books
Publisher: ASM International
Published: 01 November 2019
DOI: 10.31399/asm.tb.mfadr7.t91110196
EISBN: 978-1-62708-247-1
... Abstract This article reviews the basic physics behind active photon injection for local photocurrent generation in silicon and thermal laser stimulation along with standard scanning optical microscopy failure analysis tools. The discussion includes several models for understanding the local...
Abstract
This article reviews the basic physics behind active photon injection for local photocurrent generation in silicon and thermal laser stimulation along with standard scanning optical microscopy failure analysis tools. The discussion includes several models for understanding the local thermal effects on metallic lines, junctions, and complete devices. The article also provides a description and case study examples of multiple photocurrent and thermal injection techniques. The photocurrent examples are based on Optical Beam-Induced Current and Light-Induced Voltage Alteration. The thermal stimulus examples are Optical Beam-Induced Resistance Change/Thermally-Induced Voltage Alteration and Seebeck Effect Imaging. Lastly, the article discusses the application of solid immersion lenses to improve spatial resolution.
Book Chapter
Laser-Based, Photon, and Thermal Emission
Available to PurchaseSeries: ASM Technical Books
Publisher: ASM International
Published: 01 November 2023
DOI: 10.31399/asm.tb.edfatr.t56090003
EISBN: 978-1-62708-462-8
... Abstract This chapter assesses the capabilities and limitations of electric fault isolation (EFI) technology, the measurement challenges associated with new device architectures, and the pathways for improvement in emission microscopy, laser stimulation, and optical probing. It also assesses...
Abstract
This chapter assesses the capabilities and limitations of electric fault isolation (EFI) technology, the measurement challenges associated with new device architectures, and the pathways for improvement in emission microscopy, laser stimulation, and optical probing. It also assesses the factors that influence signal strength, spatial and timing resolution, and alignment accuracy between signal response images and the physical layout of the IC.
Image
Schematic of decrease in reflected intensity (normalized) of a laser beam i...
Available to PurchasePublished: 01 March 2006
Fig. 10.6 Schematic of decrease in reflected intensity (normalized) of a laser beam impinged at an angle to the surface of a metal being fatigued
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Martensite (a) in laths, in a laser-welded steel containing 0.13% C and (b)...
Available to Purchase
in Conventional Heat Treatments—Usual Constituents and Their Formation
> Metallography of Steels: Interpretation of Structure and the Effects of Processing
Published: 01 August 2018
Fig. 9.20 Martensite (a) in laths, in a laser-welded steel containing 0.13% C and (b) in plates (or twined) in laser welded steel containing 0.27% C. Courtesy G. Thewlis, reprinted with permission from Maney Publishing. Source: Ref 30
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Schematic of the photothermal method. Courtesy of Institute for Laser Techn...
Available to Purchase
in Hardness Testing of Metals—Contactless and Other Nondestructive Methods
> Hardness Testing: Principles and Applications
Published: 01 October 2011
Fig. 2 Schematic of the photothermal method. Courtesy of Institute for Laser Technologies (ILM), Ulm
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Determination of the cone angle and of the cap radius by means of laser int...
Available to Purchase
in Hardness Testing of Metals—Contactless and Other Nondestructive Methods
> Hardness Testing: Principles and Applications
Published: 01 October 2011
Fig. 14 Determination of the cone angle and of the cap radius by means of laser interference Pseudo 3D display of an indenter. Courtesy of MPA NRW
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Image
Laser Scanning Microscope (LSM) forms an image by detecting reflections fro...
Available to PurchasePublished: 01 November 2019
Figure 36 Laser Scanning Microscope (LSM) forms an image by detecting reflections from a raster scanned laser. The example is a backside image showing interference lines caused by laser light waves reflecting from both surfaces of the die, which causes destructive and constructive interference.
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Image
Left: OBIC image from laser induced photo-carriers, courtesey of Optometrix...
Available to PurchasePublished: 01 November 2019
Figure 38 Left: OBIC image from laser induced photo-carriers, courtesey of Optometrix Inc. Right: Thermal XIVA image from microthermal heating showing current in a conductor. Scan direction on right image is vertical.
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Image
X-ray radiographic inspection (A) and scanning laser acoustic microscopy (S...
Available to Purchase
in Acoustic Microscopy of Semiconductor Packages
> Microelectronics Failure Analysis: Desk Reference
Published: 01 November 2019
Figure 44 X-ray radiographic inspection (A) and scanning laser acoustic microscopy (SLAM) (B) of IC packages.
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(Left) Local thinning through laser milling or FIB provides an opportunity ...
Available to Purchase
in Magnetic Field Imaging for Electrical Fault Isolation[1]
> Microelectronics Failure Analysis: Desk Reference
Published: 01 November 2019
Figure 15 (Left) Local thinning through laser milling or FIB provides an opportunity to get closer to an area of interest for high-resolution scanning. The SV MR sensor is shown in a cavity that is 500 µm ×500 µm and 250 µm deep. (Right) SV MR sensor on a die surface, with an illustrated
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Image
Laser ablated BGA package with copper wires. The ablation process was run u...
Available to PurchasePublished: 01 November 2019
Figure 3 Laser ablated BGA package with copper wires. The ablation process was run until the top of the bond wires were exposed (left side top of package, right side BGA bottom of package). At this point, a finishing step needs to be performed to expose the die surface. [4]
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Image
Decapsulation of laser-ablated PBGA microcircuit using downstream microwave...
Available to PurchasePublished: 01 November 2019
Figure 5 Decapsulation of laser-ablated PBGA microcircuit using downstream microwave plasma. This takes about two hours on an older 300-watt system, and less than 20 minutes on the newer 500-watt systems. [6]
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Image taken with 1064 nm laser illumination. The monochromatic light reveal...
Available to PurchasePublished: 01 November 2019
Figure 35 Image taken with 1064 nm laser illumination. The monochromatic light reveals Newton’s rings based on thickness variation.
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Laser Scan Microscope (LSM) image at 1064 nm of fringes in a 4 mm pocket. S...
Available to PurchasePublished: 01 November 2019
Figure 61 Laser Scan Microscope (LSM) image at 1064 nm of fringes in a 4 mm pocket. Scale bar is matched over region of X-axis line scan from the portion 0,-690 µm to -1000,-690 µm.
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Thermal gradients induced at a thermocouple as a function of the laser beam...
Available to PurchasePublished: 01 November 2019
Figure 5 Thermal gradients induced at a thermocouple as a function of the laser beam position.
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