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Published: 01 November 2019
Figure 25 The interaction images when using 1064nm and 1300nm lasers on a speed path failure. The images show that both lasers cause the pMOS transistor to speed up when its source was illuminated, which indicates that thermal heating was dominating in both cases. More
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Published: 01 November 2019
Figure 37 Laser Signal Injection Microscope (LSIM) forms an image by detecting laser induced changes in microcircuits. More commonly known by OBIRCH, TIVA, XIVA, etc. Note that an LSIM can simultaneously produce an image by reflection. More
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Published: 01 November 2019
Figure 17 Scan cells’ bounding boxes overlay with (a) reflected laser and (b) laser-assisted device-alteration signal images. More
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Published: 01 November 2010
Fig. 11.3 Laser projection location. Source: Laser Projection Technologies, Inc. More
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2023
DOI: 10.31399/asm.tb.edfatr.t56090003
EISBN: 978-1-62708-462-8
... Abstract This chapter assesses the capabilities and limitations of electric fault isolation (EFI) technology, the measurement challenges associated with new device architectures, and the pathways for improvement in emission microscopy, laser stimulation, and optical probing. It also assesses...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2019
DOI: 10.31399/asm.tb.mfadr7.t91110196
EISBN: 978-1-62708-247-1
... Abstract This article reviews the basic physics behind active photon injection for local photocurrent generation in silicon and thermal laser stimulation along with standard scanning optical microscopy failure analysis tools. The discussion includes several models for understanding the local...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2019
DOI: 10.31399/asm.tb.mfadr7.t91110244
EISBN: 978-1-62708-247-1
... Abstract Laser Voltage Probing (LVP) is a key enabling technology that has matured into a well-established and essential analytical optical technique that is crucial for observing and evaluating internal circuit activity. This article begins by providing an overview on LVP history and LVP...
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Published: 01 November 2023
Fig. 1 Example of photoemission and thermal laser stimulation maps for an analog circuit More
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Published: 01 November 2019
Figure 36 Laser Scanning Microscope (LSM) forms an image by detecting reflections from a raster scanned laser. The example is a backside image showing interference lines caused by laser light waves reflecting from both surfaces of the die, which causes destructive and constructive interference. More
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Published: 01 November 2019
Figure 38 Left: OBIC image from laser induced photo-carriers, courtesey of Optometrix Inc. Right: Thermal XIVA image from microthermal heating showing current in a conductor. Scan direction on right image is vertical. More
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Published: 01 November 2019
Figure 44 X-ray radiographic inspection (A) and scanning laser acoustic microscopy (SLAM) (B) of IC packages. More
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Published: 01 November 2019
Figure 15 (Left) Local thinning through laser milling or FIB provides an opportunity to get closer to an area of interest for high-resolution scanning. The SV MR sensor is shown in a cavity that is 500 µm ×500 µm and 250 µm deep. (Right) SV MR sensor on a die surface, with an illustrated More
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Published: 01 November 2019
Figure 3 Laser ablated BGA package with copper wires. The ablation process was run until the top of the bond wires were exposed (left side top of package, right side BGA bottom of package). At this point, a finishing step needs to be performed to expose the die surface. [4] More
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Published: 01 November 2019
Figure 5 Decapsulation of laser-ablated PBGA microcircuit using downstream microwave plasma. This takes about two hours on an older 300-watt system, and less than 20 minutes on the newer 500-watt systems. [6] More
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Published: 01 November 2019
Figure 35 Image taken with 1064 nm laser illumination. The monochromatic light reveals Newton’s rings based on thickness variation. More
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Published: 01 November 2019
Figure 61 Laser Scan Microscope (LSM) image at 1064 nm of fringes in a 4 mm pocket. Scale bar is matched over region of X-axis line scan from the portion 0,-690 µm to -1000,-690 µm. More
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Published: 01 November 2019
Figure 5 Thermal gradients induced at a thermocouple as a function of the laser beam position. More
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Published: 01 November 2019
Figure 11 A plot of the laser power necessary at various numerical apertures to maintain a constant 10mW/μm 2 irradiance. Typical NAs are indicated: a low magnification 0.4NA, a high magnification air gap 0.8NA, and a near-3.0NA SIL. More
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Published: 01 November 2019
Figure 26 LADA laser interactions shown on a simplified cross-sectional view of the CMOS structures with two examples of laser illumination (on the left the laser is illuminating a pMOS drain and on the right the laser is illuminating the nMOS drain.) with major interactions and effects listed. More
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Published: 01 November 2019
Figure 30 For a 10ps laser pulse into a p-n junction there are two components of OBIC. Data for graph taken [29] . More