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laser patterning
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Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2019
DOI: 10.31399/asm.tb.mfadr7.t91110228
EISBN: 978-1-62708-247-1
... This figure compares a continuous wave LADA (CWLADA) image (a) with an optimally timed TRLADA image of (b). The timing of the pulsed laser OBIC response is shown in (c). Figure 4 High-level view of the test pattern modifications necessary for LADA/SDL. At the beginning of the loop is the trigger...
Abstract
Diagnosing the root cause of a failure is particularly challenging if the symptom of the failure is not consistently observable. This article focuses on Laser Assisted Device Alteration/Soft Defect Localization (LADA/SDL), a global fault isolation technique, for detecting such failures. The discussion begins with a section describing the three steps in LADA/SDL analysis setup: create the test loop with the fail flag and loop trigger, select the laser dwell time, and select the shmoo bias point. An overview of LADA/SDL workflow is then presented followed by a brief section on time-resolved LADA. The closing pages of the article consider in detail SDL laser interaction physics and LADA laser interaction physics.
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2019
DOI: 10.31399/asm.tb.mfadr7.t91110244
EISBN: 978-1-62708-247-1
...Laser wavelengths, respective absorption depth in Si, required SIL material for LVP, and expected resolution <xref rid="t91110244-ref45" ref-type="bibr">[45]</xref> Table 1 Laser wavelengths, respective absorption depth in Si, required SIL material for LVP, and expected resolution [45...
Abstract
Laser Voltage Probing (LVP) is a key enabling technology that has matured into a well-established and essential analytical optical technique that is crucial for observing and evaluating internal circuit activity. This article begins by providing an overview on LVP history and LVP theory, providing information on electro-optical effects and free-carrier effects. It then focuses on commercially available continuous wave LVP systems. Alternative optoelectronic imaging and probing technologies for fault isolation, namely frequency mapping and laser voltage tracing, are also discussed. The subsequent section provides information on the use of Visible Laser Probing. The article closes with some common LVP observations/considerations and limitations and future work concerning LVP.
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2019
DOI: 10.31399/asm.tb.mfadr7.t91110499
EISBN: 978-1-62708-247-1
... of the electronic devices. Laser scanning localization with a test system utilizes the trigger or synchronous input of the microscope electronics shown in Fig. 10 : a functional pattern is executed and any local defect may cause a fail depending on the pattern. The tester evaluates the result (pass or fail) from...
Abstract
This article provides an introduction to the dynamic random access memory (DRAM) operation with a focus to localization techniques of the defects combined with some physical failure analysis examples and case studies for memory array failures. It discusses the electrical measurement techniques for array failure analysis. The article then presents know-how-based analysis techniques of array failures by bitmap classification. The limits of bitmapping that lead to well-known localization techniques like thermally induced voltage alteration and optical beam induced resistance change are also discussed. The article concludes by providing information on soft defect localization techniques.
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2019
DOI: 10.31399/asm.tb.mfadr7.t91110379
EISBN: 978-1-62708-247-1
... CMP directly to thick metal pitch layer Figure 6 Illustration of the die layers that are removed using the parallel lapping film technique Figure 7 Illustrations of the LDT steps Figure 8 Laser window opening result with a good uniformity Figure 9 Rounding...
Abstract
With semiconductor device dimension continuously scaling down and increasing complexity in integrated circuits, delayering techniques for reverse engineering is becoming increasingly challenging. The primary goal of delayering in semiconductor failure analysis is to successfully remove layers of material in order to locate and identify the area of interest. Several of the top-down delayering techniques include wet chemical etching, dry reactive ion etching, top-down parallel lapping (including chemical-mechanical polishing), ion beam milling and laser delayering techniques. This article discusses the general procedure, types, advantages, and disadvantages of each of these techniques. In this article, two types of different semiconductor die level backend of line technologies are presented: aluminum metallization and copper metallization.
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2019
DOI: 10.31399/asm.tb.mfadr7.t91110153
EISBN: 978-1-62708-247-1
... to thin and polish the part. Figure 61 Laser Scan Microscope (LSM) image at 1064 nm of fringes in a 4 mm pocket. Scale bar is matched over region of X-axis line scan from the portion 0,-690 µm to -1000,-690 µm. Figure 67 Another 4 x 4 mm area thinned on a deliberate tilt to confirm...
Abstract
The need for precise targeted interactive surgery on boards or modules is the main driver of backside preparation technology. This article assists the analyst in making decisions on backside thinning and polishing requirements. Thinning of the substrates can be accomplished by flat lapping, laser assisted chemical etch, plasma reactive ion etch, and CNC based milling and polishing. The article discusses the general characteristics, key principles, advantages, and disadvantages of these processes. It also contains case studies that illustrate the application of these processes to ceramic cavity devices, injection molded parts, and ball grid arrays.
Book Chapter
Series: ASM Technical Books
Publisher: ASM International
Published: 01 March 2006
DOI: 10.31399/asm.tb.pht2.t51440159
EISBN: 978-1-62708-262-4
.... and Panzer S. , Electron Beam Surface Hardening , Heat Treating , Vol 4 , ASM Handbook , ASM International , 1991 , p 297 – 311 7. Sandven O.A. , Laser Surface Hardening , Heat Treating , Vol 4 , ASM Handbook , ASM International , 1991 , p 286 – 296 Hardened Zones in Low...
Abstract
This chapter discusses the processes involved in heat treating of stainless steels, providing information on the classification, chemical compositions, and corrosion resistance of stainless steels. Five groups of stainless steels are discussed: austenitic, ferritic, martensitic, precipitation-hardening, and duplex grades. The chapter also describes the heat treatment conditions that should be followed for processing of stainless steels.
Book Chapter
Series: ASM Technical Books
Publisher: ASM International
Published: 01 December 1995
DOI: 10.31399/asm.tb.sch6.t68200133
EISBN: 978-1-62708-354-6
... the cold metal spray process. Two RP processes are specific to the production of investment castings. The Selective Laser Sintering Process (SLS) is a method to directly produce wax patterns from solid models. The Direct Shell Production Casting (DSPC) produces ceramic shell molds from solid model data...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2019
DOI: 10.31399/asm.tb.mfadr7.t91110042
EISBN: 978-1-62708-247-1
.... The LSIM is actually an adaptation of a laser-scanning microscope (LSM). In the LSM, the injected laser light is scanned over a circuit in a raster pattern, and the reflection is detected and displayed. An LSM image appears much like any light microscope image. As can be seen in figure 36 , images...
Abstract
Moore's Law has driven many degree circuit features below the resolving capability of optical microscopy. Yet the optical microscope remains a valuable tool in failure analysis. This article describes the physics governing resolution and useful techniques for extracting the small details. It begins with the basic microscope column and construction. The article discusses microscope adjustments, brightfield and darkfield illumination, and microscope concepts important to liquid crystal techniques. It also discusses solid immersion lenses, infrared and ultraviolet microscopy and concludes with laser microscopy techniques such as thermal induced voltage alteration and external induced voltage alteration.
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2019
DOI: 10.31399/asm.tb.mfadr7.t91110524
EISBN: 978-1-62708-247-1
... Fig 1 Picture of ridge-waveguide laser. Arrows below p-contact show where current flow is concentrated. Fig 2 Picture of vertical cavity laser (VCSEL). Arrows below emitting aperture show where current is concentrated. Fig 4 Drawing of ❬100❭ DLD originating from a crack...
Abstract
Optoelectronic components can be readily classified as active light-emitting components (such as semiconductor lasers and light emitting diodes), electrically active but non-emitting components, and inactive components. This chapter focuses on the first category, and particularly on semiconductor lasers. The discussion begins with the basics of semiconductor lasers and the material science behind some causes of device failure. It then covers some of the common failure mechanisms, highlighting the need to identify failures as wearout or maverick failures. The chapter also covers the capabilities of many key optoelectronic failure analysis tools. The final section describes the common steps that should be followed so as to assure product reliability of optoelectronic components.
Book Chapter
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2013
DOI: 10.31399/asm.tb.mfub.t53740163
EISBN: 978-1-62708-308-9
... otherwise have been blanked out by punch press or fabricated by hand after laborious layout of the pattern. Currently, most metal cutting falls within 9.5 mm (0.375 in.) and thinner, although CO 2 lasers are now competitive with PAC for metal thicknesses of 13 mm (0.5 in.) and greater. A schematic...
Abstract
This chapter describes sheet metal forming operations, including cutting, blanking, piercing, and bending as well as deep drawing, spinning, press-brake and stretch forming, fluid forming, and drop hammer and electromagnetic forming. It also discusses the selection and use of die materials and lubricants along with superplastic forming techniques.
Book Chapter
Series: ASM Technical Books
Publisher: ASM International
Published: 01 March 2001
DOI: 10.31399/asm.tb.secwr.t68350087
EISBN: 978-1-62708-315-7
...Abstract Abstract This chapter discusses surface engineering treatments, including flame hardening, induction hardening, high-energy beam hardening, laser melting, and shot peening. It describes the basic implementation of each method, the materials for which they are suited, and their effect...
Abstract
This chapter discusses surface engineering treatments, including flame hardening, induction hardening, high-energy beam hardening, laser melting, and shot peening. It describes the basic implementation of each method, the materials for which they are suited, and their effect on surface metallurgy.
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2019
DOI: 10.31399/asm.tb.mfadr7.t91110262
EISBN: 978-1-62708-247-1
... [5] Lesly Endrinal , Kinger Rakesh , Ranganathan Lavakumar , Sheth Amit , Solving Critical Issues in 10nm Technology using Innovating Laser-based Fault Isolation and DFT Diagnosis Techniques , IEEE International Reliability Physics Symposium ( 2018 ) 10.1109/IRPS...
Abstract
Over the revolutionary era of semiconductor technology, Computer-Aided Design Navigation (CADNav) tools have played an increasingly critical role in silicon debug and failure analysis (FA) in efforts to improve manufacturing yield while reducing time-to-market for integrated circuit (IC) products. This article encompasses the key principles of CADNav for various aspects of semiconductor FA and its importance for improved yield and profitability. An overview of the required input data and formats are described for both IC and package devices, along with key considerations and best practices recommended for fast fault localization, accurate root cause analysis, FA equipment utilization, efficient cross-team collaboration, and database management. Challenges with an FA lab ecosystem are addressed by providing an integrated database and software platform that enable design layout and schematic analysis in the FA lab for quick and accurate navigation and cross-tool collaboration.
Book Chapter
Series: ASM Technical Books
Publisher: ASM International
Published: 01 December 2018
DOI: 10.31399/asm.tb.aceg.t68410029
EISBN: 978-1-62708-280-8
... patterns mounted on plates or match plates. Sand cores are set into the bottom mold, and the top mold is placed over it to form a hollow casting configuration. Gates are formed in the pattern plates, and feeders for feeding shrinkage are provided for by cylindrical or rectangular blocks mounted on the top...
Abstract
This chapter discusses the advantages, limitations, and applications of various aluminum casting processes, namely green sand casting process, air set or no-bake molding process, vacuum molding process, evaporative foam casting process, and die casting process. The processes covered also include gravity permanent molding, low-pressure permanent molding, counter pressure, squeeze casting, investment casting, rapid prototype casting, cast forge hybrid, and semisolid metal processes.
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2019
DOI: 10.31399/asm.tb.mfadr7.t91110613
EISBN: 978-1-62708-247-1
... site location of parametric failures using scanning thermal and electron-hole-pair laser beams [19 - 21] . This technique powers the chip, and then drives it with a digital tester that repetitively cycles a test pattern. The output signal of the pin that shows failure is monitored and adjusted...
Abstract
Electronics spans a number of devices, their configurations, and properties. A challenge is to identify those electronic subjects essential for failure analysis. This article reviews the normal operation and terminal characteristics of MOSFET. It describes the electronic behavior of bridges, opens, and parametric delay defects, which is essential for understanding the symptoms of a failing IC. These electronic principles are then applied to a CMOS failure analysis technique using a power supply signature analysis.
Book Chapter
Series: ASM Technical Books
Publisher: ASM International
Published: 01 September 2005
DOI: 10.31399/asm.tb.gmpm.t51250001
EISBN: 978-1-62708-345-4
... of two or three types are applied at a time. Commonly they are tensile, compressive, shear (slide), rolling, rolling-slide, and torsion. Each type of gear tooth will have its own characteristic stress patterns. Fig. 19 Basic stresses that are applied to gear teeth. Often, two or three...
Abstract
This chapter begins with a review of some of the terms used in the gear industry to describe the design of gears and gear geometries. It then discusses the types of gears that operate on parallel shafts, intersecting shafts, and nonparallel and nonintersecting shafts. Next, the processes involved in the selection of gear are discussed, followed by information on the basic stresses applied to a gear tooth, the strength of a gear tooth, and the most widely used gear materials. Further, the chapter briefly reviews gear manufacturing methods and the heat treating processing steps including prehardening processes, through hardening, and case hardening processes.
Book Chapter
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2011
DOI: 10.31399/asm.tb.jub.t53290061
EISBN: 978-1-62708-306-5
... the electrode wheels may advance either continuously or intermittently. Advantages of seam welding, compared with resistance spot welding, projection welding, and laser welding, are: Gas-tight or liquid-tight joints can be produced (not possible with spot welding or projection welding). Seam width...
Abstract
Resistance welding is a group of processes in which the heat for welding is generated by the resistance to the flow of an electrical current through the parts being joined. This chapter discusses the processes, advantages, and limitations of specific resistance welding processes, namely resistance spot welding, resistance seam welding, projection welding, flash welding, and upset welding.
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2019
DOI: 10.31399/asm.tb.mfadr7.t91110144
EISBN: 978-1-62708-247-1
.... Potting epoxy protects the package and leadframe. Figure 2 Close up view of TSOP style package cavity down. Distance between the leads is 2.54mm. Potting epoxy protects the package and leadframe. Figure 3 Laser ablated BGA package with copper wires. The ablation process was run until...
Abstract
The orientation of the devices within a package determine the best chosen approach for access to a select component embedded in epoxy both in package or System in Package and multi-chip module (MCM). This article assists the analyst in making decisions on frontside access using flat lapping, chemical decapsulation, laser ablation, plasma reactive ion etching (RIE), CNC based milling and polishing, or a combination of these coupled with optical or electrical endpoint means. This article discusses the general characteristics, advantages, and disadvantages of each of these techniques. It also presents a case study illustrating the application of CNC milling to isolate MCM leakage failure.
Book Chapter
Series: ASM Technical Books
Publisher: ASM International
Published: 01 October 2012
DOI: 10.31399/asm.tb.lmub.t53550033
EISBN: 978-1-62708-307-2
... Effect of hot isostatic pressing (HIP) on fatigue life of A201.0-T7 casting. Source: Ref 2.25 Fig. 2.28 Sand casting process Fig. 2.29 Shell molding process Fig. 2.30 Evaporative pattern casting. (a) Casting. (b) Pattern Fig. 2.31 Casting processes can...
Abstract
This chapter provides basic engineering information on aluminum alloys with an emphasis on their use in applications where weight is a significant design factor. It discusses the advantages and limitations of various types of aluminum along with their compositions, designations, and achievable strengths. It explains how some alloys are hardened through solution strengthening and cold working, while others are strengthened by precipitation hardening. It also describes production and fabrication processes such as melting, casting, rolling, forging, forming, extruding, heat treating, and joining, and includes a section on the causes and effects of corrosion and how they are typically controlled.
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2019
DOI: 10.31399/asm.tb.mfadr7.t91110001
EISBN: 978-1-62708-247-1
... power supplies with abnormal current 4 22 2 power supplies with abnormal current 11 11 1 power supply with abnormal current 33 66 All power supplies normal 52 Figure 15 Dynamic photon emission images of four dice that fail bin 66. Figure 13 (a) (c) Reflected laser...
Abstract
This article introduces the wafer-level fault localization failure analysis (FA) process flow for an accelerated yield ramp-up of integrated circuits. It discusses the primary design considerations of a fault localization system with an emphasis on complex tester-based applications. The article presents examples that demonstrate the benefits of the enhanced wafer-level FA process. It also introduces the setup of the wafer-level fault localization system. The application of the wafer-level FA process on a 22 nm technology device failing memory test is studied and some common design limitations and their implications are discussed. The article presents a case study and finally introduces a different value-add application flow capitalizing on the wafer-level fault localization system.
Book Chapter
Series: ASM Technical Books
Publisher: ASM International
Published: 01 March 2006
DOI: 10.31399/asm.tb.fdsm.t69870237
EISBN: 978-1-62708-344-7
... by loading causes a variation in the distance between the plate glass and the specimen at different points and results in the pattern shown on the right of the figure. Fig. 10.4 Phase-interference method to determine strain distribution at notch tip. Source: Ref 10.9 Optical Magnification...
Abstract
This chapter focuses on the processes and mechanisms involved in fatigue. It begins with a review of some of the early theories of fatigue and the tools subsequently used to obtain a better understanding of the fatigue process. It then explains how plasticity plays a major role in creating dislocations, breaking up grains into subgrains, and causing microscopic imperfections to coalesce into larger flaws. It also discusses the factors that contribute to the development and propagation of fatigue cracks, including surface deterioration, volumetric and environmental effects, foreign particles, and stresses generated by rolling contact.