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ion implantation

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Book Chapter

Series: ASM Technical Books
Publisher: ASM International
Published: 01 January 2015
DOI: 10.31399/asm.tb.spsp2.t54410551
EISBN: 978-1-62708-265-5
... This chapter describes surface modification processes that go beyond conventional heat treatments, including plasma nitriding, plasma carburizing, low-pressure carburizing, ion implantation, physical and chemical vapor deposition, salt bath coating, and transformation hardening via high-energy...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 January 2000
DOI: 10.31399/asm.tb.cub.t66910363
EISBN: 978-1-62708-250-1
... inspection and quality assurance. The next section discusses the methods by which metals, and in some cases their alloys, can be applied to almost all other metals and alloys: electroplating, electroless plating, hot dipping, thermal spraying, cladding, pack cementation, vapor deposition, ion implantation...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 March 2001
DOI: 10.31399/asm.tb.secwr.t68350095
EISBN: 978-1-62708-315-7
... chapter also covers ion implantation and laser alloying. anodizing conversion coating diffusion coating pack cementation SURFACE TREATMENTS that change the surface chemistry of a metal or alloy, but that do not involve intentional buildup or increase in part dimension, include...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2019
DOI: 10.31399/asm.tb.mfadr7.t91110391
EISBN: 978-1-62708-247-1
...) device sectioning techniques, non-encapsulated device techniques, utilization of the focused ion beam (FIB) making a cross-section and/or enhancing a physically polished one. Delineation methods for revealing structures are also discussed. These can be chemical etchants, chemo-mechanical polishing, and...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2019
DOI: 10.31399/asm.tb.mfadr7.t91110335
EISBN: 978-1-62708-247-1
..., spot size, interaction volume, and signal yield achievable by FIB instruments. For comparison, Figure 1 shows simulated models of beam interactions and sputter yield values on silicon for a variety of ion species. Figure 1 Modeled sputter yield (y) and implant depth of Cs + , Xe + , Ga + , Ar...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2019
DOI: 10.31399/asm.tb.mfadr7.t91110447
EISBN: 978-1-62708-247-1
... comparison of O 2 + and large O 2 -cluster ion sputtering, to measure the in-depth distribution of Li + (7 keV, 10 14 atoms/cm 2 ), Na + (25 keV, 10 14 atoms/cm 2 ) and K + (45 keV, 10 14 atoms/cm 2 ) implants in a 200 nm thin SiO 2 layer on Si has been demonstrated by Holzer et al. [24] Their...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2019
DOI: 10.31399/asm.tb.mfadr7.t91110153
EISBN: 978-1-62708-247-1
... part of the machine eliminating errors with plate reattachment at each step. Regardless of the removal method, PLACE, FIB, Plasma, and so on. The preferred method to smooth and remove lattice damage from either mechanical or ion implantation damage is CMP. FIB assisted Scanning Capacitive...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 July 2009
DOI: 10.31399/asm.tb.bcp.t52230459
EISBN: 978-1-62708-298-3
... oxides that form on the surface of beryllium and their ability to withstand acids, bases, and corrosive agents found in rain and seawater. It explains how carbides, inclusions, ions, and impurities contribute to corrosion damage, particularly pitting, and how corrosion reduces the ductility and fracture...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 July 2000
DOI: 10.31399/asm.tb.fec.t65940001
EISBN: 978-1-62708-302-7
... hot combustion gases Corrosion of metallic surgical implant materials used in orthopedic, cardiovascular, and dental devices resulting in the release of metal ions to tissues, and degradation of the physical properties of polymeric implant materials due to interactions with tissue fluids and/or...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2019
DOI: 10.31399/asm.tb.mfadr7.t91110351
EISBN: 978-1-62708-247-1
... Abstract Circuit edit has been instrumental to the development of focused ion beam (FIB) systems. FIB tools for advanced circuit edit play a major role in the validation of design and manufacture. This chapter begins with an overview of value, role, and unique capabilities of FIB circuit edit...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2019
DOI: 10.31399/asm.tb.mfadr7.t91110461
EISBN: 978-1-62708-247-1
... preparation often introduces undesirable damage to the thin section. The damage caused by the 30 keV focused gallium ions beam milling include implantation of gallium ions, amorphization of crystalline structures, mixing of components, and loss of fine structural detail [24 - 29] . In order to prevent die...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 July 2009
DOI: 10.31399/asm.tb.bcp.t52230361
EISBN: 978-1-62708-298-3
... Abstract This chapter discusses coating technologies that are applicable to beryllium, including physical and chemical vapor deposition, thermal evaporation, electroplating, sputtering, ion plating, and plasma arc spraying. It describes the advantages and disadvantages of each method and the...
Book Chapter

Series: ASM Technical Books
Publisher: ASM International
Published: 01 December 1984
DOI: 10.31399/asm.tb.mpp.t67850165
EISBN: 978-1-62708-260-0
..., results in implantation of the bombarding gas ions. Three modes of ion etching are used [ 47 ]: Physical sputtering with an ion beam Physical cathodic sputtering by gas discharge ion bombardment Chemical sputtering by activated gas discharge Physical sputtering with an ion beam under...
Book Chapter

Series: ASM Technical Books
Publisher: ASM International
Published: 01 December 2000
DOI: 10.31399/asm.tb.ttg2.t61120085
EISBN: 978-1-62708-269-3
... active fluoride ion make it impossible to use glass electrodes for pH measurements. Indicator paper and colorimetry are the most satisfactory methods for measuring in the degreasing and chemical immersion baths, which are held in the pH range from 5 to 7. The pickling bath is quite acidic, and...
Book Chapter

Series: ASM Technical Books
Publisher: ASM International
Published: 01 March 2001
DOI: 10.31399/asm.tb.secwr.t68350183
EISBN: 978-1-62708-315-7
... nitrocarburizing, sulfurizing, and spark hardening Fig. 16 Compares the wear, scuffing, and spalling resistance of sheet-metal dies coated by the following surface-hardening processes: uncoated, nitrided, borided, nitrogen ion implanted, chrome plated, sulfurized, uncoated cemented carbide, TiC + TiN by CVD...
Book Chapter

Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2013
DOI: 10.31399/asm.tb.mfub.t53740325
EISBN: 978-1-62708-308-9
... combination of these two processes. A fourth type of process is ion implantation, which does not produce a coating; instead, high-energy ions are made to penetrate into and modify the substrate surface. A comparison of PVD process characteristics is provided in Table 10 . Table 10 Comparison of...
Book Chapter

Series: ASM Technical Books
Publisher: ASM International
Published: 01 December 2001
DOI: 10.31399/asm.tb.aub.t61170003
EISBN: 978-1-62708-297-6
... changing the chemical composition of the surface of a part by such processes as plating, cladding, nitriding, ion implantation, carburizing, and hot dip galvanizing, this book is limited to only those alloying processes that affect the bulk of the material, while surface modification is discussed in other...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 March 2001
DOI: 10.31399/asm.tb.secwr.t68350001
EISBN: 978-1-62708-315-7
... oxidation resistance Boronizing (boriding) Improved wear resistance, oxidative wear, and surface fatigue Ion implantation Improved friction and wear resistance for a variety of substrates Laser alloying Improved wear resistance Adding a surface layer or coating Organic coatings (paints...
Book Chapter

Series: ASM Technical Books
Publisher: ASM International
Published: 01 December 2000
DOI: 10.31399/asm.tb.ttg2.t61120123
EISBN: 978-1-62708-269-3
... nitric acid. The alloy resists corrosion in reducing environments, such as HCl and H 2 SO 4 , better than CP titanium but not as well as the titanium-palladium alloy. Precious metals, such as platinum and palladium, have been ion plated, ion implanted, or thermal diffused into titanium alloy surfaces...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 January 2017
DOI: 10.31399/asm.tb.sccmpe2.t55090333
EISBN: 978-1-62708-266-2
... thus depends on alloy composition. The amorphous alloys can be prepared by various methods, including melt spinning, sputter deposition, mechanical alloying, electrodeposition, electroless deposition, and ion implantation. Mechanical alloying forms powders, and the other methods form amorphous...