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ion implantation
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Book Chapter
Series: ASM Technical Books
Publisher: ASM International
Published: 01 January 2015
DOI: 10.31399/asm.tb.spsp2.t54410551
EISBN: 978-1-62708-265-5
... This chapter describes surface modification processes that go beyond conventional heat treatments, including plasma nitriding, plasma carburizing, low-pressure carburizing, ion implantation, physical and chemical vapor deposition, salt bath coating, and transformation hardening via high-energy...
Abstract
This chapter describes surface modification processes that go beyond conventional heat treatments, including plasma nitriding, plasma carburizing, low-pressure carburizing, ion implantation, physical and chemical vapor deposition, salt bath coating, and transformation hardening via high-energy laser and electron beams. The chapter compares methods and includes several example applications.
Book Chapter
Series: ASM Technical Books
Publisher: ASM International
Published: 01 January 1998
DOI: 10.31399/asm.tb.ts5.t65900305
EISBN: 978-1-62708-358-4
... Abstract Surface modification technologies improve the performance of tool steels. This chapter discusses the processes involved in oxide coatings, nitriding, ion implantation, chemical and physical vapor deposition processing, salt bath coating, laser and electron beam surface modification...
Abstract
Surface modification technologies improve the performance of tool steels. This chapter discusses the processes involved in oxide coatings, nitriding, ion implantation, chemical and physical vapor deposition processing, salt bath coating, laser and electron beam surface modification, and boride coatings that improve the performance of hot-work and high-speed tool steels.
Series: ASM Technical Books
Publisher: ASM International
Published: 01 January 2000
DOI: 10.31399/asm.tb.cub.t66910363
EISBN: 978-1-62708-250-1
..., and inspection and quality assurance. The next section discusses the methods by which metals, and in some cases their alloys, can be applied to almost all other metals and alloys: electroplating, electroless plating, hot dipping, thermal spraying, cladding, pack cementation, vapor deposition, ion implantation...
Abstract
Organic coatings (paints and plastic or rubber linings), metallic coatings, and nonmetallic inorganic coatings (conversion coatings, cements, ceramics, and glasses) are used in applications requiring corrosion protection. These coatings and linings may protect substrates by three basic mechanisms: barrier protection, chemical inhibition, and galvanic (sacrificial) protection. This chapter begins with a section on organic coating and linings, providing a detailed account of the steps involved in the coating process, namely, design and selection, surface preparation, application, and inspection and quality assurance. The next section discusses the methods by which metals, and in some cases their alloys, can be applied to almost all other metals and alloys: electroplating, electroless plating, hot dipping, thermal spraying, cladding, pack cementation, vapor deposition, ion implantation, and laser processing. The last section focuses on nonmetallic inorganic coatings including ceramic coating materials, conversion coatings, and anodized coatings.
Book Chapter
Series: ASM Technical Books
Publisher: ASM International
Published: 01 March 2001
DOI: 10.31399/asm.tb.secwr.t68350095
EISBN: 978-1-62708-315-7
.... The chapter also covers ion implantation and laser alloying. anodizing conversion coating diffusion coating pack cementation SURFACE TREATMENTS that change the surface chemistry of a metal or alloy, but that do not involve intentional buildup or increase in part dimension, include...
Abstract
This chapter provides practical information on surface treatments that work by altering the surface chemistry of metals and alloys. It discusses the use of phosphate and chromate conversion coatings as well as anodizing, steam oxidation, diffusion coatings, and pack cementation. The chapter also covers ion implantation and laser alloying.
Image
Published: 01 December 2000
Fig. 11.7 Percent increase in hardness with depth into material for nitrogen ion or carbon ion implanted in the alpha-beta alloy Ti-6Al-4V
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Image
Published: 01 December 2000
Fig. 11.6 Percent increase in hardness with depth into material for nitrogen ion implanted in the alpha-beta alloy Ti-6Al-4V
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Image
Published: 01 January 2015
Fig. 22.4 Schematic illustration of implantation of iron with nitrogen ions (top). Nitrogen and damage profiles (lower left). Cascade region of high-defect-density generation (lower right). Source: Ref 22.26
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Book Chapter
Series: ASM Technical Books
Publisher: ASM International
Published: 01 December 2000
DOI: 10.31399/asm.tb.ttg2.t61120085
EISBN: 978-1-62708-269-3
... immersion solution Na 2 B 4 O 7 ·10H 2 O 40 5.2 85 185 6.3–6.6 20 KF·2H 2 O 18 2.3 HF solution (a) 16 2.1 (a) Hydrofluoric acid, 50.3% by weight The control of pH and immersion time is important. Dissolved titanium and the active fluoride ion make it impossible to use glass...
Abstract
Cleaning procedures serve to remove scale, tarnish films, and other contaminants that form or are otherwise deposited on the surface of titanium during processing operations such as hot working and heat treatment. This chapter explains what makes titanium susceptible to the formation of scale and how it can be removed via belt grinding, abrasive blasting, and molten salt descaling baths. It also discusses the role of acid pickling, barrel finishing, polishing, and buffing as well as the use of chemical conversion coatings and protective platings.
Book Chapter
Series: ASM Technical Books
Publisher: ASM International
Published: 01 March 2001
DOI: 10.31399/asm.tb.secwr.t68350183
EISBN: 978-1-62708-315-7
... nickel-phosphorus plating, ferritic nitrocarburizing, sulfurizing, and spark hardening Fig. 16 Compares the wear, scuffing, and spalling resistance of sheet-metal dies coated by the following surface-hardening processes: uncoated, nitrided, borided, nitrogen ion implanted, chrome plated, sulfurized...
Abstract
This chapter compares and contrasts surface-engineering processes based on process availability, corrosion and wear performance, distortion effects, penetration depth or attainable coating thickness, and cost. It provides both quantitative and qualitative information as well as measured property values.
Book Chapter
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2013
DOI: 10.31399/asm.tb.mfub.t53740325
EISBN: 978-1-62708-308-9
... process in which metal ions in an electrolyte solution are deposited onto a cathode workpiece. The setup is shown in Fig. 5 . The anode is generally made of the metal being plated and serves as the source of the plate metal. Direct current from an external power supply is passed between the anode...
Abstract
This chapter covers a wide range of finishing and coating operations, including cleaning, honing, polishing and buffing, and lapping. It discusses the use of rust-preventative compounds, conversion coatings, and plating metals as well as weld overlay, thermal spray, and ceramic coatings and various pack cementation and deposition processes. It also discusses the selection and use of industrial paints and paint application methods.
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2019
DOI: 10.31399/asm.tb.mfadr7.t91110335
EISBN: 978-1-62708-247-1
... volume, and signal yield achievable by FIB instruments. For comparison, Figure 1 shows simulated models of beam interactions and sputter yield values on silicon for a variety of ion species. Figure 1 Modeled sputter yield (y) and implant depth of Cs + , Xe + , Ga + , Ar + , Ne + , and He...
Abstract
With the commercialization of heavier and lighter ion beams, adoption of focused ion beam (FIB) use for analysis of challenging regions of interest (ROI) has grown. In this chapter, the authors focus on highlighting commercially available and complementary FIB technologies and their implementation challenges and application trends.
Book Chapter
Series: ASM Technical Books
Publisher: ASM International
Published: 01 March 2001
DOI: 10.31399/asm.tb.secwr.t68350195
EISBN: 978-1-62708-315-7
... Ion implantation for improved wear resistance of alloy tool steels and chrome-plated parts Anodizing plus PTFE seal for nonstick and wear resistance with aluminum alloy parts Die Casting For die casting, consider: Nitriding for H-series tool steels Physical vapor deposition (PVD...
Abstract
This chapter provides helpful guidelines for selecting a surface treatment for a given application. It identifies important design factors and applicable treatments for common design scenarios, materials, and operating conditions. It explains why heat treatments and finishing operations may be required before or after processing and how to estimate or predict coating thickness, case depth, hardness, and the likelihood of distortion. It also addresses related issues and considerations such as part handling and fixturing, surface preparation and cleaning requirements, processability, aesthetics, and the influence of design features.
Image
in Surface Analysis and Material Characterization Techniques Used in Semiconductor Industry to Identify and Prevent Failures
> Microelectronics Failure Analysis: Desk Reference
Published: 01 November 2019
Figure 15 Depth profiles of Li + , Na + and K + implants in a 200 nm SiO 2 dielectric layer using O 2 + as sputter projectile. The profile clearly shows the sputter beam induced diffusion of the mobile ions through the dielectric layer and, pilling up at the SiO 2 /Si interface.
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Image
Published: 01 November 2019
Figure 1 Modeled sputter yield (y) and implant depth of Cs + , Xe + , Ga + , Ar + , Ne + , and He + with a beam energy of 30keV in silicon. For each ion, 30 trajectories are shown in red, while the resulting silicon atom recoils are shown in green. The x-axis radial spread shown for each
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Book Chapter
Series: ASM Technical Books
Publisher: ASM International
Published: 01 December 2001
DOI: 10.31399/asm.tb.aub.t61170003
EISBN: 978-1-62708-297-6
... changing the chemical composition of the surface of a part by such processes as plating, cladding, nitriding, ion implantation, carburizing, and hot dip galvanizing, this book is limited to only those alloying processes that affect the bulk of the material, while surface modification is discussed in other...
Abstract
This article discusses the general purpose of alloying and identifies some of the material properties and behaviors that can be improved by adding various elements to the base metal. It explains how alloying can make metals stronger and more resistant to corrosion and wear as well as easier to cast, weld, form, and machine. It also discusses some of the alloying techniques that have been developed to address problems stemming from dissimilarities between the base metal and alloying or inoculate material.
Series: ASM Technical Books
Publisher: ASM International
Published: 01 March 2001
DOI: 10.31399/asm.tb.secwr.t68350001
EISBN: 978-1-62708-315-7
...) siliconizing Improved oxidation resistance Boronizing (boriding) Improved wear resistance, oxidative wear, and surface fatigue Ion implantation Improved friction and wear resistance for a variety of substrates Laser alloying Improved wear resistance Adding a surface layer or coating...
Abstract
This chapter begins with a brief review of the different types of surface treatments and coatings used in industry and their effect on properties and performance. It then discusses the importance of corrosion and wear treatments and the consequences of failing to properly implement them in critical industries such as mining, energy production, transportation, and mineral and chemical processing. The chapter also describes basic approaches to dealing with corrosion and wear in steel.
Book Chapter
Series: ASM Technical Books
Publisher: ASM International
Published: 30 April 2021
DOI: 10.31399/asm.tb.tpsfwea.t59300363
EISBN: 978-1-62708-323-2
... to the presence of metal particles or metal ions. Some researchers are studying the effects of rubbing on biomaterials by investigating changes to DNA and RNA after rubbing; others are assessing the effect of chromium-cobalt and nickel (from metal-on-metal implants) in the blood. The metal is thought...
Book Chapter
Series: ASM Technical Books
Publisher: ASM International
Published: 01 December 2000
DOI: 10.31399/asm.tb.ttg2.t61120123
EISBN: 978-1-62708-269-3
.... Surface Treatment Precious metals, such as platinum and palladium, have been ion plated, ion implanted, or thermal diffused into titanium alloy surfaces to achieve improved resistance to reducing acids. This approach has not been used commercially for industrial components because of high cost...
Abstract
Titanium and its alloys are used chiefly for their high strength-to-weight ratio, but they also have excellent corrosion resistance, better even than stainless steels. Titanium, as the chapter explains, is protected by a tenacious oxide film that forms rapidly on exposed surfaces. The chapter discusses the factors that influence the growth and quality of this naturally passivating film, particularly the role of oxidizing and inhibiting species, temperature, and alloying elements. It also discusses the effect of different corrosion processes and environments as well as hydrogen, stress-corrosion cracking, liquid metal embrittlement, and surface treatments.
Series: ASM Technical Books
Publisher: ASM International
Published: 01 July 2000
DOI: 10.31399/asm.tb.fec.t65940001
EISBN: 978-1-62708-302-7
... combustion gases Corrosion of metallic surgical implant materials used in orthopedic, cardiovascular, and dental devices resulting in the release of metal ions to tissues, and degradation of the physical properties of polymeric implant materials due to interactions with tissue fluids and/or blood...
Abstract
This chapter familiarizes readers with the basic concepts of corrosion, discussing chemical reactions, ion transfer mechanisms, electrochemical processes and variables, and the formation of solid corrosion products. It presents a simple but effective teaching tool, the elementary electrochemical corrosion circuit, using it to explain how electric potential differences drive the corrosion process and how corrosion rates vary in proportion to current density. The chapter concludes with a discussion on the importance of corrosion products, such as oxides and hydroxides, and how their formation can be a major factor in controlling corrosion.
Book Chapter
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2019
DOI: 10.31399/asm.tb.mfadr7.t91110447
EISBN: 978-1-62708-247-1
... in good accordance with the TRIM simulations (not shown here). Figure 15 Depth profiles of Li + , Na + and K + implants in a 200 nm SiO 2 dielectric layer using O 2 + as sputter projectile. The profile clearly shows the sputter beam induced diffusion of the mobile ions through the dielectric...
Abstract
There are several analytical methods available that can be used in-line on whole wafers as well as off-line on de-processed products that are returned from the field. These techniques are surface analytical techniques that can be used to characterize the bulk of the material. The main six methods used in semiconductor industry are: Auger spectroscopy, dynamic secondary ion mass spectroscopy, time of flight static secondary ion mass spectroscopy (ToF-SIMS), X-ray photoelectron spectroscopy, scanning electron microscope-energy dispersive X-ray spectroscopy (SEM-EDX), and transmission electron microscope-EDX. This review specifically addresses ToF-SIMS and describes some typical examples of the application of Auger and SEM-EDX.
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