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electron probe X-ray microanalysis

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Series: ASM Technical Books
Publisher: ASM International
Published: 01 June 2016
DOI: 10.31399/asm.tb.hpcspa.t54460121
EISBN: 978-1-62708-285-3
... coatings. The techniques covered are optical microscopy, X-Ray diffraction, scanning electron microscopy, focused ion beam machining, electron probe microanalysis, transmission electron microscopy, and electron backscattered diffraction. The techniques also include electron channeling contrast imaging, X...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 March 2002
DOI: 10.31399/asm.tb.mgppis.t60400149
EISBN: 978-1-62708-258-7
... microscopes, x-ray diffractometers, microhardness testers, and hot microhardness testers. A list of other instruments that are usually located in a research laboratory or specialized testing laboratory is also provided. electron probe microanalyzers image analyzers metallographic laboratory...
Book Chapter

Series: ASM Technical Books
Publisher: ASM International
Published: 01 April 2013
DOI: 10.31399/asm.tb.imub.t53720139
EISBN: 978-1-62708-305-8
... in metals. Electron Probe Microanalysis (EPMA) Electron probe microanalysis (EPMA) operates on the same atomic principle as XRF, but it uses a focused electron beam to excite and generate x-rays in very small portions of the sample. Thus, it can be used to perform quantitative analyses on features...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 August 2018
DOI: 10.31399/asm.tb.msisep.t59220085
EISBN: 978-1-62708-259-4
... and emitted x-rays and the methods used to access it, namely wavelength and energy dispersive spectroscopy and electron backscattering diffraction techniques. It also describes the role of focused ion beam milling in sample preparation and provides information on atom probes, atomic force microscopes...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 March 2012
DOI: 10.31399/asm.tb.pdub.t53420239
EISBN: 978-1-62708-310-2
... in the sample and generate, among other signals, characteristic X-rays. These X-rays are detected and identified for qualitative analysis, and with the use of suitable standards, they can be corrected for matrix effects in order to perform quantitative analysis. Electron probe microanalysis is used...
Book Chapter

Series: ASM Technical Books
Publisher: ASM International
Published: 01 December 2009
DOI: 10.31399/asm.tb.sfa.t52780093
EISBN: 978-1-62708-268-6
... identification capabilities. If these capabilities are not available to the failure analysis team, many commercial laboratories can provide the services. Chemical and materials analysis technologies include energy-dispersive analysis of x-rays, spectrographic techniques (including electron probe microanalysis...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 October 2005
DOI: 10.31399/asm.tb.faesmch.t51270019
EISBN: 978-1-62708-301-0
...%; accuracy, 2 to 5% X-ray fluorescence analysis: Normally applicable to elements heavier than sodium; accessible range, 0.005 to 10%; accuracy, 2 to 5% Techniques for Local Composition Variations Laser probe microanalysis: Applicable to nearly all elements; accessible range, 0.01 to 100...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 January 2015
DOI: 10.31399/asm.tb.spsp2.t54410001
EISBN: 978-1-62708-265-5
... Spectroscopy (EDS). In Electron Probe Microanalyzers the spectra are resolved with better resolution by diffraction of the characteristic Xrays from single crystals in a process referred to as Wavelength Dispersive Spectroscopy (WDS) ( Ref 1.3 ). Auger Electron Spectroscopy The X-ray spectra generated...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2019
DOI: 10.31399/asm.tb.mfadr7.t91110461
EISBN: 978-1-62708-247-1
...-specimen interactions occur. These interactions yield transmitted electrons, elastically and inelastically scattered electrons, secondary electrons, back-scattered electrons, Auger electrons and X-ray photons. Most of the transmitted and elastically scattered electrons and some of the inelastically...
Book Chapter

Series: ASM Technical Books
Publisher: ASM International
Published: 01 December 2003
DOI: 10.31399/asm.tb.cfap.t69780383
EISBN: 978-1-62708-281-5
... with photons, x-rays, ions, neutrons, or electrons and analyzing the radiation emitted and/or reflected from the surface. Other techniques use other interactions, such as physical probing of the surface. Analyzing the chemistry and topography of failure surfaces is an important part of failure analysis...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2019
DOI: 10.31399/asm.tb.mfadr7.t91110335
EISBN: 978-1-62708-247-1
...) <1 eV [5] 5 eV [2] 5 eV [2] Angular current intensity (A/sr) 0.000001 A/sr [2] 15 microA/sr [2] 5 - 10 mA/sr [2] Source brightness (A m -2 sr -1 V -1 ) 4E10 9 (He) [5] 1E10 6 [2 , 3] 9 x 10 3 (Xe) [3] Operating probe current range 0.1 pA - 40 pA [6] <1...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 December 2018
DOI: 10.31399/asm.tb.fibtca.t52430107
EISBN: 978-1-62708-253-2
... (EDAX), is a chemical and microanalysis technique used in conjunction with SEM. This technique detects x-rays emitted from the sample to determine the elemental composition of the analyzed volume when the sample is bombarded by a beam of electrons. Because the x-rays generated have energy...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2019
DOI: 10.31399/asm.tb.mfadr7.t91110413
EISBN: 978-1-62708-247-1
... shaped figure known as the “excitation volume” (see Figure 7 .) Signals that can be collected from this volume include secondary electrons, backscattered electrons, Auger electrons, and characteristic x-rays. X-ray and Auger analysis in the SEM are discussed in other chapters and will not be further...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 January 2000
DOI: 10.31399/asm.tb.cub.t66910475
EISBN: 978-1-62708-250-1
... may be detected by vacuum emission equipment.) Full range of photomultipliers may not be available. C.6 Electron probe microanalysis Analysis by crystal spectrometry or energy dispersion of x-rays emitted as a result of applying a focused (1 μm diam) electron beam to a surface Qualitative...
Book Chapter

Series: ASM Technical Books
Publisher: ASM International
Published: 01 August 1999
DOI: 10.31399/asm.tb.lmcs.t66560001
EISBN: 978-1-62708-291-4
... present, but the phases themselves cannot be identified positively. Such identification is done indirectly as a result of correlations that have been established throughout the years by positive techniques, such as electron or x-ray diffraction, chemical analysis, electron probe microanalysis...
Series: ASM Technical Books
Publisher: ASM International
Published: 23 January 2020
DOI: 10.31399/asm.tb.stemsem.t56000001
EISBN: 978-1-62708-292-1
... in the Transmission Electron Microscope, Ultramicroscopy, Vol 1, 1975, p 97 112. httpsdoi.org/10.1016/S0304-3991(75)80012-X 16. C. Lyman, et al., Scanning Electron Microscopy, X-Ray Microanalysis, and Analytical Electron Microscopy, Plenum Press, 1990, p 12 17. D.B. Williams and C.B. Carter, Electron Sources...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2019
DOI: 10.31399/asm.tb.mfadr7.t91110351
EISBN: 978-1-62708-247-1
... failure. Figure 10 shows an example of exposed copper degraded by assisted milling with iodine-based compound enhanced (aluminum) metal etch chemistry. Circled area indicates region where copper metal was milled with a 1.33 µm x 0.5 µm box with 10 pA. Bright regions are “corroded” copper. Corrosion...
Series: ASM Technical Books
Publisher: ASM International
Published: 23 January 2020
DOI: 10.31399/asm.tb.stemsem.9781627082921
EISBN: 978-1-62708-292-1
Series: ASM Technical Books
Publisher: ASM International
Published: 01 December 2018
DOI: 10.31399/asm.tb.fibtca.9781627082532
EISBN: 978-1-62708-253-2
Series: ASM Technical Books
Publisher: ASM International
Published: 01 August 1999
DOI: 10.31399/asm.tb.lmcs.9781627082914
EISBN: 978-1-62708-291-4