1-20 of 96 Search Results for

electron beam probing

Follow your search
Access your saved searches in your account

Would you like to receive an alert when new items match your search?
Close Modal
Sort by
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2019
DOI: 10.31399/asm.tb.mfadr7.t91110323
EISBN: 978-1-62708-247-1
...Abstract Abstract This article presents methods that enable one to consistently, uniformly and quickly remove substrate silicon from units without imparting damage to the structure of interest. It provides examples of electron beam probing and backside nano-probing techniques. The electron beam...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2019
DOI: 10.31399/asm.tb.mfadr7.t91110285
EISBN: 978-1-62708-247-1
...-invasive Short-Localization in thin dielectric layers by electron beam absorbed (EBAC) current imaging” [15] Wang W.C. , et al. “ A Study of Electron Beam Irradiation Influence on Device Contact Junction Characteristics of Advanced DRAM Using Atomic Force Probing ,” Proc 39th International...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 August 2018
DOI: 10.31399/asm.tb.msisep.t59220085
EISBN: 978-1-62708-259-4
... and emitted x-rays and the methods used to access it, namely wavelength and energy dispersive spectroscopy and electron backscattering diffraction techniques. It also describes the role of focused ion beam milling in sample preparation and provides information on atom probes, atomic force microscopes...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 June 2016
DOI: 10.31399/asm.tb.hpcspa.t54460121
EISBN: 978-1-62708-285-3
... spray coatings. The techniques covered are optical microscopy, X-Ray diffraction, scanning electron microscopy, focused ion beam machining, electron probe microanalysis, transmission electron microscopy, and electron backscattered diffraction. The techniques also include electron channeling contrast...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2019
DOI: 10.31399/asm.tb.mfadr7.t91110244
EISBN: 978-1-62708-247-1
...-6_34 [3] Heinrich H. K. et al. , “ Noninvasive Optical Sheet Charge Density Probe for Silicon Integrated Circuits ,” IEEE Trans. Electron Devices , vol. ED-33 , no. 11 , p. 1860 , ( 1987 ) 10.1109/T-ED.1986.22815 [4] Kindereit Ulrike , “ Investigation of Laser-Beam...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2019
DOI: 10.31399/asm.tb.mfadr7.t91110180
EISBN: 978-1-62708-247-1
... Devices, ” Proc. ISTFA 2015 , pp. 1 – 8 , 2015 . [19] Li J. et al. , “ Thermal Exposure Effects of Backside Thinned Flip-Chip Device on Visible Light Probing, ” Proc. ISTFA 2018 , vol. 44 , pp. 195 – 199 , 2018 . [20] Tong T. , et al. , “ Electron beam probing of active...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2019
DOI: 10.31399/asm.tb.mfadr7.t91110269
EISBN: 978-1-62708-247-1
... facts influencing the VC generation (capacitance, leakage, doping, and circuitry) is very helpful for successful failure localization. active voltage contrast failure localization focused ion beam passive voltage contrast scanning electron microscopy Introduction Passive Voltage Contrast...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2019
DOI: 10.31399/asm.tb.mfadr7.t91110335
EISBN: 978-1-62708-247-1
... 3D tomography and chemical mapping in a slice by slice fashion. The ion beam is used as a tool for removing material while the electron beam performs the crucial analysis. In contrast to EDS, SIMS allows more direct 3D mapping by utilizing the ion beam itself as the analysis probe. In a SIMS...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 April 2013
DOI: 10.31399/asm.tb.imub.t53720321
EISBN: 978-1-62708-305-8
... of probe relative to flaw inside of bar and resulting wave display obtained for two methods of ultrasonic flaw detection. (a) Normal beam method. (b) Angle beam method. Wave display nomenclature: T, transmit pulse; S, surface reflection echo; F 1 , flaw echo; B 1 , back wall echo. Source: Ref 2...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2019
DOI: 10.31399/asm.tb.mfadr7.t91110461
EISBN: 978-1-62708-247-1
... beam assisted metal deposition and subsequently isolated from the probe by cutting the sample from the probe. The area of interest is then thinned for electron transparency using the FIB ( Figure 7(b)) . This lift-out approach eliminates the uncertainties of the glass needle based lift-out technique...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2019
DOI: 10.31399/asm.tb.mfadr7.t91110351
EISBN: 978-1-62708-247-1
... Analysis , Bellevue, WA , November 2000 p. 397 . [21] Wang L. , Keckley D. , Bui D. , “ OPTIMIZED COMPACT SECONDARY ELECTRON COLLECTOR WITH 100-PERCENT COLLECTION EFFICIENCY FOR FOCUSED ION BEAM SYSTEMS .,” Rev. Sci. Instrum 69 ( 1998 ) pg. 91 - 94 10.1063/1.1148483 [22...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2019
DOI: 10.31399/asm.tb.mfadr7.t91110196
EISBN: 978-1-62708-247-1
.... Active photon probing takes advantage of the interactions of a scanned photon beam with an IC. For photon energies greater than the indirect band gap of silicon (≥ 1.1eV or wavelength ≤ 1100nm) electron-hole pairs are generated in silicon. Normally the electron-hole pairs will randomly recombine...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 January 2015
DOI: 10.31399/asm.tb.spsp2.t54410001
EISBN: 978-1-62708-265-5
... & Sons , 1997 1.6 Williams D. B. and Carter C. B. , Transmission Electron Microscopy, A Text for Materials Science , Second Edition , Springer , 2009 10.1007/978-0-387-76501-3_1 1.7 Giannuzzi L. A. and Stevie F. A. , Introduction to Focused Ion Beams...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 March 2002
DOI: 10.31399/asm.tb.mgppis.t60400149
EISBN: 978-1-62708-258-7
.... Fig. 6.7 A sketch showing some of the different types of electrons and x-rays generated by the interaction of the primary incident electron beam with the specimen in the electron microscope The Transmission Electron Microscope The Scanning Electron Microscope The Electron Probe...
Book Chapter

Series: ASM Technical Books
Publisher: ASM International
Published: 01 April 2013
DOI: 10.31399/asm.tb.imub.t53720139
EISBN: 978-1-62708-305-8
... in metals. Electron probe microanalysis (EPMA) operates on the same atomic principle as XRF, but it uses a focused electron beam to excite and generate x-rays in very small portions of the sample. Thus, it can be used to perform quantitative analyses on features as small as several micrometers...
Book Chapter

Series: ASM Technical Books
Publisher: ASM International
Published: 01 December 2003
DOI: 10.31399/asm.tb.cfap.t69780383
EISBN: 978-1-62708-281-5
...-of-flight secondary ion mass spectrometry; FTIR, Fourier transform infrared (spectroscopy) General features of AES, XPS, and TOF-SIMS Table 4 General features of AES, XPS, and TOF-SIMS Feature Technique AES XPS TOF-SIMS Probe beam Electrons X-ray photons Ions Analyzed beam...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2019
DOI: 10.31399/asm.tb.mfadr7.t91110563
EISBN: 978-1-62708-247-1
... will discuss aspects of FA techniques that are of particular interest to MEMS. Sample Preparation: Decapping Sample Preparation: Removing MEMS FIB (Focused Ion Beam) TEM (Transmission Electron Microscopy) LSIM (Laser Signal Injection Microscopy) PEM (Photon Emission Microscopy) 3-D Motion...
Book Chapter

Series: ASM Technical Books
Publisher: ASM International
Published: 01 April 2013
DOI: 10.31399/asm.tb.imub.t53720293
EISBN: 978-1-62708-305-8
... be measured with fewer probe contacts. When measuring complex castings, maximum use should be made of the ability of the coordinate measuring machine to electronically rotate measurement planes without physically moving the part; unclamping and turning a part will lower the accuracy of the overall layout...
Series: ASM Technical Books
Publisher: ASM International
Published: 23 January 2020
DOI: 10.31399/asm.tb.stemsem.9781627082921
EISBN: 978-1-62708-292-1
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2019
DOI: 10.31399/asm.tb.mfadr7.t91110673
EISBN: 978-1-62708-247-1
... of electrical testing hardware, endless electrical fixture configurations, x-ray and acoustic microscopy, electron beam tools, optical beam tools, thermal detection techniques, the focused ion beam (FIB), the scanning probe/atomic force microscope, and a bevy of surface science tools. Many times, the analyst...