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Rutherford backscattering spectroscopy

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Series: ASM Technical Books
Publisher: ASM International
Published: 01 March 2002
DOI: 10.31399/asm.tb.mgppis.t60400149
EISBN: 978-1-62708-258-7
... of the microscope column (the rectangular boxlike attachments shown on the microscope column in Fig. 6.24 ). These detectors analyze the wavelength of the x-rays generated from the interaction of the primary and backscattered electrons and the specimen. The technique is called wavelength dispersive spectroscopy...
Book Chapter

Series: ASM Technical Books
Publisher: ASM International
Published: 01 December 2003
DOI: 10.31399/asm.tb.cfap.t69780383
EISBN: 978-1-62708-281-5
... are incident electrons that have undergone elastic Rutherford scattering from the nuclei of atoms in the sample. Imaging is somewhat different for primary (Type 1) BSEs. For this signal, as the size of the nuclei gets larger (i.e., higher atomic number), the BSE emission increases in a nearly linear fashion...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2019
DOI: 10.31399/asm.tb.mfadr7.t91110434
EISBN: 978-1-62708-247-1
... (with thin samples), wavelength dispersive x-ray spectroscopy (WDS), Auger electron spectroscopy (AES), x-ray photoelectron spectroscopy (XPS, also knows as ESCA), secondary ion mass spectrometry (SIMS), Rutherford backscattering spectrometry (RBS), Fourier transform infrared spectroscopy (FTIR), and total...
Series: ASM Technical Books
Publisher: ASM International
Published: 01 March 2012
DOI: 10.31399/asm.tb.pdub.t53420239
EISBN: 978-1-62708-310-2
...), secondary ion mass spectrometry (SIMS), Rutherford backscattering spectrometry (RBS), EPMA, and analytical electron microscopy (AEM). In EPMA, high-energy electrons are focused to a fine probe and directed at the point of interest in the diffusion couple. The incident electrons interact with the atoms...