This article presents methods that enable one to consistently, uniformly and quickly remove substrate silicon from units without imparting damage to the structure of interest. It provides examples of electron beam probing and backside nano-probing techniques. The electron beam probing techniques are E-beam Logic State Imaging, Electron-beam Signal Image Mapping, and E-beam Device Perturbation. Backside nano-probing techniques discussed include: Electron Beam Absorbed Current, Electron Beam Induced Resistance Change, four terminal resistance measurements, resistive gate defect identification, and circuit editing. The article also presents methods to prepare electron beam probing samples where some remaining silicon is required for the transistor functions and transmission electron microscope samples from units where the substrate silicon has been partially or completely removed.

Circuit edit has been instrumental to the development of focused ion beam (FIB) systems. FIB tools for advanced circuit edit play a major role in the validation of design and manufacture. This chapter begins with an overview of value, role, and unique capabilities of FIB circuit edit tools for first silicon debug. The etching capabilities of circuit edit FIB tools are then discussed, providing information on chemistry assisted etching in silicon oxides and low-k dielectrics. The chapter also discusses the requirements and procedures involved in edit operation: high aspect ratio milling, endpointing, and cutting copper. It then provides an introduction to FIB metal/conductor deposition and FIB dielectric deposition. Edit design rules that can facilitate prototype production from first silicon are also provided. The chapter concludes with a discussion on future trends in circuit edit technology.

The properties of cast iron are determined primarily by the form of carbon they contain, which in turn, is controlled by modifying compositions and cooling rates during casting. Certain alloys (such as Si, Al, Ni, Co, and Cu) promote graphite formation, while others (such as S, V, Cr, Sn, Mo, and Mn) promote the formation of cementite. This chapter examines the relative potencies of these alloys and their effect on microstructure. It covers the five most common commercial cast irons, including white, gray, ductile, malleable, and compacted graphite, describing their compositional ranges, distinguishing features, advantages, limitations, and applications.

This chapter describes the most effective ways to improve the corrosion resistance of sintered stainless steels, including increasing alloy content, optimizing the sintering process, and the use of surface treatments and modifications.

The shock-resisting tool steels, designated as group S steels in the AISI classification system, have been developed to produce good combinations of high hardness, high strength, and high toughness or impact fracture resistance. This chapter describes the alloying effects of silicon on the properties of shock-resisting tool steels. In addition, it discusses the compositions, characteristics, applications, advantages, and disadvantages of shock-resisting steels with and without tungsten.