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Book Chapter

Thin Film Deposition Techniques—Problems and Solutions

Series: ASM Technical Books
Publisher: ASM International
Published: 31 January 2023
DOI: 10.31399/asm.tb.itfdtktmse.t56060013
EISBN: 978-1-62708-440-6
Abstract
This appendix provides a brief review of thin film deposition methods and their uses in a question and answer format. The questions deal with recommended practices, process conditions, terminology, and classifications.
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