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Sputter deposition
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Series: ASM Technical Books
Publisher: ASM International
Published: 01 February 2022
DOI: 10.31399/asm.tb.mbheaktmse.t56030021
EISBN: 978-1-62708-418-5
Series: ASM Technical Books
Publisher: ASM International
Published: 01 November 2019
DOI: 10.31399/asm.tb.mfadr7.t91110413
EISBN: 978-1-62708-247-1
Series: ASM Technical Books
Publisher: ASM International
Published: 01 July 2009
DOI: 10.31399/asm.tb.bcp.t52230131
EISBN: 978-1-62708-298-3