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STEM in SEM: Introduction to Scanning Transmission Electron Microscopy for Microelectronics Failure Analysis

By Jason D. Holm, Benjamin W. Caplins
Series: ASM Technical Books
Publisher: ASM International
Published: 23 January 2020
DOI: 10.31399/asm.tb.stemsem.9781627082921
EISBN: 978-1-62708-292-1