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Introduction to Thin Film Deposition Techniques: Key Topics in Materials Science and Engineering
ASM International
ISBN electronic:
978-1-62708-440-6
Publication date:
2023
Book Chapter
Appendix: Thin Film Deposition Techniques—Problems and Solutions
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Published:2023
Page range:
13 - 17
Abstract
This appendix provides a brief review of thin film deposition methods and their uses in a question and answer format. The questions deal with recommended practices, process conditions, terminology, and classifications.
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Citation
Thin Film Deposition Techniques—Problems and Solutions, Introduction to Thin Film Deposition Techniques: Key Topics in Materials Science and Engineering, By Robert B. Mason, Jr., ASM International, 2023, p 13–17, https://doi.org/10.31399/asm.tb.itfdtktmse.t56060013
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