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ASM Technical Books
Introduction to Thin Film Deposition Techniques: Key Topics in Materials Science and Engineering
ASM International
ISBN electronic:
978-1-62708-440-6
Publication date:
2023
Introduction to Thin Film Deposition Techniques: Key Topics in Materials Science and Engineering provides an overview of the processes and equipment used to apply thin films. It covers the basic concepts of physical and chemical vapor deposition processes and the nuances of sputtering, thermal evaporation, cathodic arc deposition, ion plating, and vapor-phase epitaxy. It explains where, how, and why different processes are employed depending on the materials involved, the intended function of the coating, and the desired microstructure and properties of the surface layer. It also includes a brief Q&A review of the information covered.
Introduction to Thin Film Deposition Techniques: Key Topics in Materials Science and Engineering
By: Robert B. Mason, Jr.
https://doi.org/10.31399/asm.tb.itfdtktmse.9781627084406
ISBN (electronic): 978-1-62708-440-6
Publisher: ASM International
Published: 2023
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