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STEM in SEM: Introduction to Scanning Transmission Electron Microscopy for Microelectronics Failure Analysis

ASM International

DOI:

https://doi.org/10.31399/asm.tb.stemsem.9781627082921

ISBN electronic:

978-1-62708-292-1

Publication date:

2020

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Authors

Jason D. Holm, National Institute of Standards and Technology
Benjamin W. Caplins, National Institute of Standards and Technology

Staff

ASM International staff who worked on this project include Vicki Burt, Managing Editor; Joanne Miller, Senior Editor, Magazines and Digital Media; Scott Henry, Senior Content Engineer; Karen Marken, Senior Managing Editor; Madrid Tramble, Manager of Production; and Larry Berardinis, Technology Projects Manager.

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