STEM in SEM: Introduction to Scanning Transmission Electron Microscopy for Microelectronics Failure Analysis
This ebook is an introduction to scanning transmission electron microscopy in a scanning electron microscope (STEM-in-SEM). It is for users with some SEM experience but little to no transmission or scanning transmission electron microscopy experience, and those who are interested in learning how to gain additional utility from their existing transmission detector.
This basic introduction to STEM-in-SEM describes how to extract different information from samples using various transmission detectors. We define some basic terms and emphasize the importance of access to the diffraction pattern for understanding STEM image contrast. The benefits of on-axis imaging and diffraction, and the ability to controllably select which electrons contribute to images is also demonstrated. It is our opinion that adding a STEM detector to an SEM is a worthwhile investment given the additional knowledge that can be obtained.
The information in this ebook was originally presented in a tutorial session at the 2019 International Symposium for Testing and Failure Analysis conference in Portland, Oregon, USA. We wish to thank the Electronic Device Failure Analysis Society for their support and encouragement in creating this ebook.
Benjamin W. Caplins
Preface, STEM in SEM: Introduction to Scanning Transmission Electron Microscopy for Microelectronics Failure Analysis, By Jason D. Holm, Benjamin W. Caplins, ASM International, 2020
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