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ASM Technical Books
STEM in SEM: Introduction to Scanning Transmission Electron Microscopy for Microelectronics Failure Analysis
ASM International
ISBN electronic:
978-1-62708-292-1
Publication date:
2020
Book Chapter
-
Published:2020
You do not currently have access to this chapter.
Citation
STEM in SEM: Introduction to Scanning Transmission Electron Microscopy for Microelectronics Failure Analysis, By Jason D. Holm, Benjamin W. Caplins, ASM International, 2020
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