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STEM in SEM: Introduction to Scanning Transmission Electron Microscopy for Microelectronics Failure Analysis
ASM International
ISBN electronic:
978-1-62708-292-1
Publication date:
2020
Book Chapter
About the Authors
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Published:2020
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About the Authors, STEM in SEM: Introduction to Scanning Transmission Electron Microscopy for Microelectronics Failure Analysis, By Jason D. Holm, Benjamin W. Caplins, ASM International, 2020
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