Skip to Main Content


With the commercialization of heavier and lighter ion beams, adoption of focused ion beam (FIB) use for analysis of challenging regions of interest (ROI) has grown. In this chapter, the authors focus on highlighting commercially available and complementary FIB technologies and their implementation challenges and application trends.

You do not currently have access to this chapter.
Don't already have an account? Register

Chris Park, Amir Avishai, David Pan, Brett Lewis, Alex Buxbaum, 2019. "FIB Overview", Microelectronics Failure Analysis: Desk Reference, Tejinder Gandhi

Download citation file:

Close Modal
This Feature Is Available To Subscribers Only

Sign In or Create an Account

Close Modal
Close Modal