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Abstract

With the commercialization of heavier and lighter ion beams, adoption of focused ion beam (FIB) use for analysis of challenging regions of interest (ROI) has grown. In this chapter, the authors focus on highlighting commercially available and complementary FIB technologies and their implementation challenges and application trends.

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Chris Park, Amir Avishai, David Pan, Brett Lewis, Alex Buxbaum, FIB Overview, Microelectronics Failure Analysis: Desk Reference, 7th ed., Edited By Tejinder Gandhi, ASM International, 2019, p 335–350, https://doi.org/10.31399/asm.tb.mfadr7.t91110335

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