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STEM in SEM: Introduction to Scanning Transmission Electron Microscopy for Microelectronics Failure Analysis

ASM Technical Books

STEM in SEM: Introduction to Scanning Transmission Electron Microscopy for Microelectronics Failure Analysis

By

Jason D. Holm

Jason D. Holm

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Benjamin W. Caplins

Benjamin W. Caplins

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ASM International

DOI:

https://doi.org/10.31399/asm.tb.stemsem.9781627082921

ISBN electronic:

978-1-62708-292-1

Publication date:

2020

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