STEM in SEM: Introduction to Scanning Transmission Electron Microscopy for Microelectronics Failure Analysis
Chapter 2: Imaging and Diffraction with a Programmable Pixelated Detector
This chapter discusses the setup and use of a transmission electron detector in a typical scanning electron microscope (SEM). It describes the arrangement and function of the primary components in the detector, following the signal path from the sample to a micromirror array where it is directed by the user to either a CMOS sensor (to record diffraction patterns) or a photomultiplier tube (to observe real-space images). The chapter discusses some of the nuances of digital imaging and diffraction and includes examples in which transmission electron detectors are used to analyze gold films, carbon nanotubes, zeolite sheets, and monolayer graphene. It also describes emerging techniques, including four-dimensional STEM, thermal diffuse scattering, energy filtering, aberration correction, and atomic resolution imaging.
Imaging and Diffraction with a Programmable Pixelated Detector, STEM in SEM: Introduction to Scanning Transmission Electron Microscopy for Microelectronics Failure Analysis, By Jason D. Holm, Benjamin W. Caplins, ASM International, 2020, p 20–33, https://doi.org/10.31399/asm.tb.stemsem.t56000020
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