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Zhou Yongkai
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Proceedings Papers
ISTFA2014, ISTFA 2014: Conference Proceedings from the 40th International Symposium for Testing and Failure Analysis, 215-217, November 9–13, 2014,
Abstract
View Papertitled, Failure Mechanism Studies and Root Cause Identification of Nonstick on Pad on Microchip Al Bondpads
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for content titled, Failure Mechanism Studies and Root Cause Identification of Nonstick on Pad on Microchip Al Bondpads
It is well-known that underetch material, contamination, particle, pinholes and corrosion-induced defects on microchip Al bondpads will cause non-stick on pads (NSOP) issues. In this paper, the authors will further study NSOP problem and introduce one more NSOP failure mechanism due to Cu diffusion caused by poor Ta barrier metal. Based on our failure analysis results, the NSOP issue was not due to the assembly process, but due to the wafer fabrication. The failure mechanism might be that the barrier metal Ta was with pinholes, which caused Cu diffused out to the top Al layer, and then formed the “Bump-like” Cu defects and resulted in NSOP on Al bondpads during assembly process.