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Zbigniew Iwinski
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Journal Articles
Journal: EDFA Technical Articles
EDFA Technical Articles (2000) 2 (4): 36–38.
Published: 01 November 2000
Abstract
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Recent advances in spectrometers now give sufficient sensitivity to measure the spectral content of the very weak light emission produced by failing semiconductor devices. This article examines light spectra from the most common defect classes in order to demonstrate the strengths and weakness of spectral analysis in the context of semiconductor failure investigations. The conclusion is that signature analysis may not provide a definitive root cause, but it can help confirm the root cause after further analysis is performed.
Proceedings Papers
Daniel L. Barton, Paiboon Tangyunyong, Jerry M. Soden, Christopher L. Henderson, Edward I. Cole, Jr. ...
ISTFA1999, ISTFA 1999: Conference Proceedings from the 25th International Symposium for Testing and Failure Analysis, 57-67, November 14–18, 1999,
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The device physics necessary to gain theoretical insight into the relationship between the bias conditions and the associated electric field for semiconductor structures in various failure conditions such as forward and reverse biased junctions, MOSFET saturation, latchup, and gate oxide breakdown are examined. The relationships are verified by light emission spectra collected from test samples under various bias conditions. Several examples are included that demonstrate the utility and limitations of spectral analysis techniques for defect identification and the associated, non-electric field related information contained in the spectra.