This paper shows for the first time chip level electron beam probing on fully functional 10nm and 14nm node FinFET chips with sub-fin level resolution using techniques developed in house. Three novel electron beam probing techniques were developed and used in the debug and fault isolation of advanced node semiconductor devices. These techniques were E-beam logic state imaging, electron-beam signal image mapping, and E-beam device perturbation. Two tools that can offer all three techniques were constructed and used in production. The techniques have been successfully applied to real case chip debug and fault isolation on advanced 10nm and 14nm FinFET on production tools developed in-house. Sub-fin level resolution was achieved for the first time.

The present study aims to elaborate the particle in-flight behavior during plasma spraying and its significance in determining the microstructure and mechanical properties of plasma sprayed yttria partially stabilized zirconia (YPSZ) based thermal barrier coatings (TBCs). The as-sprayed YPSZ coatings were characterized in terms of the defects (such as porosity, unmelted particles, cracks and micro-cracks), hardness, elastic modulus and fracture toughness. The results showed that the total defects percentage, porosity, unmelted particles and crack content were found to decrease significantly with the improvement of temperature of in-flight particles. The mechanical properties were associated with the microstructure of these coatings, such as total defects, porosity, unmelted particles and cracks. It was confirmed that the mechanical properties, including hardness, elastic modulus and fracture toughness, notably enhanced with the total defects, porosity, unmelted particles and cracks decreased. The SAPS (supersonic atmospheric plasma spraying) coatings sprayed at 3401 } 3.76 °C and 482 ± 2.18 m/s and a spraying distance of 100 mm possessed the lowest microstructural defects percentage and the most favorable mechanical properties among the 15 coatings.

When failure analysis is performed on a circuit composed of FinFETs, the degree of defect isolation, in some cases, requires isolation to the fin level inside the problematic FinFET for complete understanding of root cause. This work shows successful application of electron beam alteration of current flow combined with nanoprobing for precise isolation of a defect down to fin level. To understand the mechanism of the leakage, transmission electron microscopy (TEM) slice was made along the leaky drain contact (perpendicular to fin direction) by focused ion beam thinning and lift-out. TEM image shows contact and fin. Stacking fault was found in the body of the silicon fin highlighted by the technique described in this paper.

In this paper, a workflow consisting of a pico-second laser tool followed by a broad argon beam tool is proposed as a solution for extremely large area preparation with surfaces suitable for SEM and FIB based analysis directly after polishing in the broad argon beam tool. Results are presented discussing the advantages of this workflow in terms of speed, size and quality of the surface for electron microscopy analysis. The use of the broad argon beam tool to complete the process produces near perfect interfaces especially compared to mechanical preparation techniques on the multilayers with vastly different properties found in advanced packages. Additionally, the tool can be used for backside thinning and reducing front side delayering.

Phase composition and microstructure of hydroxyapatite (HA) significantly affects the biological and mechanical properties of final hydroxyapatite (HA) coating. In the present study, HA coatings were deposited on Ti-6Al-4V by micro-plasma spraying (MPS) using different spray parameters. The influence of spray parameters on the composition and microstructure of the coatings were investigated. To understand the formation mechanism of HA coatings, the in-flight particles and splats were examined as well. The morphologies of coatings surface, cross-sections, initial powder, in-flight particles and splats were characterized by scanning electron microscopy (SEM). Xray diffraction (XRD) was employed to analyze the phase composition. Three typical HA coatings were fabricated. The results indicated that the coating composition and microstructure were tightly related to the melting state of inflight particles. And this was influenced by the spraying parameters. The formation mechanisms of these coatings were discussed.

NiCr-Mo composite coating was prepared by plasma spraying of shell-core-structured NiCr-Mo powders. The morphologies of the NiCr-Mo powders and microstructure of the corresponding NiCr-Mo coating were characterized by SEM. Furthermore, the erosion behavior of the NiCr-Mo coating at impact angles of both 30° and 90° was investigated, and was further compared with that of the Ni20Cr coating and the In-738 alloy bulk. Results showed that fully-dense and homogenous NiCr-Mo coating with excellent interface bonding and no pure Mo inclusions was obtained. Furthermore, the erosion test results showed that the erosion rate of the optimized NiCr-Mo coating is lower than that of NiCr coating at both impact angles. Moreover, the NiCr-Mo coating presented excellent erosion resistance which was comparable as that of In-738 alloy bulk, attributing to the fully-dense microstructure and metallurgical interface bonding within coating.

Commercial available Ni and Ti powder were blended together and deposited on stainless steel by atmospheric plasma spray(APS). Subsequently the as-sprayed coatings were laser remelted with a Nd -YAG pulsed laser source. Cross-sections of as-sprayed and laser-remelted coatings were characterized by scanning electron microscopy (SEM). Prior to SEM observations, the laser remelted coatings were polished and etched by Kroll etchant. Meanwhile, the energy dispersive spectrometer (EDS) was employed to analyze the chemical distribution of the coating both as-sprayed and laser remelted. The results indicated that APS sprayed NiTi coatings presented a dense microstructure with Ni splats and Ti splats distributing uniformly. Oxygen partial pressure in the argon leads to the burning of Ti splats during the laser remelting process. And Ti oxides located at the bottom of the laser molten pool because of the laser stiffness and molten flow. Moreover, the top part of the molten pool mainly involved in Ni columnar grains.

In this work, micro-plasma spraying is used to produce hydroxyapatite coatings on Ti-6Al-4V substrates. To understand coating formation mechanisms, in-flight particle velocity and surface temperature were monitored under different spraying conditions. XRD measurements show that the resulting coatings have a high degree of crystallinity with little amorphous or metastable phases. Some of the coatings were also found to have a uniformly distributed columnar structure, corresponding to a strong (002) texture and excellent stability in Hanks’ salt solution even after 14 days of immersion.

This study evaluates the thermal cycling performance of thick thermal barrier coatings (TTBCs). YSZ topcoats with segmentation cracks were deposited by suspension plasma spraying (SPS) on Ni-base superalloy substrates with the aid of a CoNiCrAlY bond coat applied by HVOF spraying. The as-sprayed SPS coatings were characterized based on surface morphology, cross-sectional microstructure, and phase composition. Thermal cycling tests were then carried out on a burner rig that heated the coating surface to 1523 K, followed by quenching to 423 K using compressed air. The SPS coatings exhibited longer thermal shock life than atmospheric plasma sprayed (APS) YSZ, which is attributable to improved strain tolerance due to the presence of vertically segmented cracks.

This paper summarizes the results of a decade-long study on nanoparticle reconstitution and its role in thermal spraying. The effect of the reconstitution process on coating nanostructure was investigated for different materials and applications, a number of which are covered in this report, including Al 2 O 3 -TiO 2 , SiC-Al 2 O 3 -ZrO 2 , and zirconia-based TBCs.

In this study, laser glazing is used to densify plasma-sprayed YSZ coatings on carbon steel substrates. Melt pool characteristics are assessed for different laser settings and treatment conditions, including substrate preheating. SEM examination of coating surfaces and cross-sections before and after laser treatment shows how microstructure responds to process parameters. It also shows how preheating widens the melt pool, deepens the laser-glazed layer, and reduces the surface density of cracks, thus improving coating quality.

In this study, MCrAlY-Al 2 O 3 composite powders were produced by ball milling and deposited by plasma, HVOF, and cold spraying. The results show that Al 2 O 3 fractions can be well controlled using composite powder due to non-preferential impact debonding of the matrix and Al 2 O 3 . The microstructure of spray powders is well retained in HVOF and cold-sprayed coatings due to the unmelted or partially molten condition of the spray particles. In the case of plasma-sprayed coatings, however, most Al 2 O 3 particles segregate at lamellar interfaces, forming a continuous oxide scale on the splat. The cold-spray coatings exhibit the highest hardness due to the work hardening effect of kinetic deposition.

In this study, WC-CoWC coatings were produced by HVOF spraying using bimodal-structured WC-Co powder with both micro- and nano-sized WC particles. Due to the melting characteristics of the powder during spraying, the microsized particles are retained in the deposit, but the nanosized particles dissolve into the Co matrix, forming a Co-W-C ternary phase. Compared to coatings sprayed from conventional WC-CoWC powder, the bimodal coatings are more resistant to corrosion and wear and are comparable in microhardness.

In this study, acoustic emission sensing is used to monitor interfacial cracking in thermal barrier coatings during uniaxial tensile adhesion testing. The TBCs consist of a ZrO 2 topcoat and a NiCrAl bond coat, both of which are applied by atmospheric plasma spraying. Tensile testing was performed to failure and the resulting fracture surfaces were examined by SEM and XRD analysis. Experimental results show that cracks usually initiate in the ceramic layer then propagate toward the metallic-ceramic interface where failure occurs. Finite element simulations were also conducted, confirming the experimental findings.

The aim of this work is to fabricate a particle-reinforced FeAl composite coating by cold spraying. Fe, Al, and WC powders were placed in a ball mill and mechanically alloyed for up to 36 h in order to obtain a nanostructured Fe(Al) solid solution reinforced with a high volume fraction of WC particles. The powder was examined and then cold sprayed on stainless steel substrates using N 2 as the accelerating gas. The as-sprayed deposits exhibited rough surface morphology and dense cross-sectional microstructure with dual-scale WC dispersoids distributed uniformly in the Fe(Al) matrix. The coatings were annealed at 650 °C and subsequently reexamined. In-situ phase transformation from the solid solution to an intermetallic compound occurred after the post-spray treatment along with an improvement in microstructure.

In this study, Al-SiC composite coatings are produced by cold spraying ball-milled Al powders with different volume fractions of SiC particles. The morphology and microstructure evolution of the powder during ball milling are evaluated along with the effect of SiC content on the microstructure and wear behavior of the coatings. The results show that dense Al-SiC coatings with different volume fractions of SiC particles can be fabricated by cold spraying and that abrasive wear resistance is improved by raising the volume fraction of SiC particles. Wear surfaces indicate that the predominant wear mechanism is gouging of the soft Al matrix in the early stages and cracking and spalling of SiC particles in the latter stages. The dispersed SiC particles serve to protect the matrix from wear products thus raising the wear resistance of the coatings.

Sub-micro-structured titanium nitrides (TiN) coatings on Al 2 O 3 substrates were fabricated by vacuum cold spray (VCS) process using ceramic powders, which were ball-milled at room temperature. The microstructure features and crystal structures of the VCS TiN coatings were analyzed by scanning electron microscopy and X-ray diffraction. The adhesion between the coating and the substrate was evaluated with a scratch tester. The sheet resistance of the VCS TiN coatings was measured by using a four-point probe method. The effects of nozzle traverse speed on the microstructure, adhesion to substrate and electrical properties of the coatings were investigated. It was found that the adhesion improves greatly with the nozzle traverse speed increasing from 5 to 15mm/s, and the electrical resistivity levels of the coatings is decreased significantly. The resistivity of sub-micron-structured TiN coatings is substantially lower than those of nano-structured ones fabricated by the same VCS process. And a minimum resistivity of 1.16×10 -4 Ω·m is achieved.

The use of a liquid feedstock carrier in suspension plasma spray (SPS) permits injection of fine powders, providing the possibility of producing sprayed coatings that are both thin and dense and have fine microstructures. These characteristics make SPS an attractive process for depositing highly efficient electrodes and electrolytes for solid oxide fuel cell (SOFC) applications. In the present study, NiO-yttria stabilized zirconia (YSZ) anode and YSZ electrolyte half cells were successfully deposited on porous Hastelloy X substrates by SPS. The NiO-YSZ anode deposition process was optimized by design of experiment. The YSZ electrolyte spray process was examined by changing one parameter at a time. The results from the design-of-experiment trials indicate that the porosity of the as-deposited coatings increased with an increase of suspension feed rate while it decreased with an increase of total plasma gas flow rate and standoff distance. The deposition efficiency increased with an increase of total plasma gas flow rate, suspension feed rate and standoff distance. The microstructure examination by SEM shows that the NiO and YSZ phases were homogeneously distributed and that the YSZ phase had a lamellar structure. It was observed that the density of the YSZ electrolyte layer increased as input power of the plasma torch increased.

Mullite and mullite/ZrO 2 bi-layer systems are being considered as environment barrier coatings (EBCs) for protection of Si-based (Si 3 N 4 , SiC) substrates against water vapor corrosion for application in forthcoming turbine engines. An approach to reduce the thermal expansion mismatch between mullite and ZrO 2 layers in those coatings would be to tailor intermediate mullite/Y-ZrO 2 composite layers. The feasibility of these composite layers is studied in a comparative manner by plasma spraying both single mullite and bi-layer coatings of mullite and of mullite/ Y-ZrO 2 (75/25 vol %.) over Hexoloy SiC substrates. All feedstock materials are equally prepared using spray drying methods as the mix powders are not commercially available. Singular spraying conditions are used to assure enhanced crystallization of the mullite phase. Coatings are aged for 100 h at 1300 °C in a controlled water vapor environment. The effect of water corrosion on the exposed coatings is comparatively investigated, determining changes in crystalline phase by X-ray diffraction (XRD), the crystallization of amorphous phases is highlighted by the use of differential thermal analysis (DTA) tools and the microstructure of the polished coatings is analyzed by scanning electron microscopy (SEM).

Mullite (Al 6 Si 2 O 13 ) is the basis of efficient environmental barrier coatings (EBCs) for protecting Si-based ceramic matrix composites (CMCs) selected to replace specific hot-section metallic components in advanced gas turbines. Furthermore, YSZ-mullite multilayer architectures with compositional grading between the bond coat and YSZ top coat were envisioned as solutions to ease their coefficient of thermal expansion (CTE) mismatch induced stress. Consequently, a proper understanding of the mechanical properties such as the elastic modulus, hardness or plastic/elastic recovery work serve for an efficient design of such refractory oxide multilayers. In this work, three different mullite powder morphologies (fused and crushed, spray-dried and freeze-granulated) were employed. Using depth-sensing indentation with loads in the range 100 – 500 mN, the role of the microstructure and morphology of the powder feedstock on the mechanical behaviour of air plasma sprayed mullite bond coats deposited on SiC Hexoloy substrates was investigated. Fully crystalline as-sprayed mullite coatings were engineered under controlled deposition conditions. Mechanical properties were measured for the as-sprayed coatings as well as for coatings heat-treated at 1300°C, in water vapour environment, for periods up to 500 h. Both E and H values of the coatings are found to be highly dependent on the morphology of the starting powders.