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Wolfgang Schaller
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Proceedings Papers
ISTFA2015, ISTFA 2015: Conference Proceedings from the 41st International Symposium for Testing and Failure Analysis, 344-348, November 1–5, 2015,
Abstract
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Multiple emission microscopy can be used to obtain a comprehensive overview of device emission during IDDQ-test. In this new approach an emission microscopy image is taken for each pattern of the IDDQ-test. Then the extensive amount of images is analyzed for correlation with IDDQ current levels. As a result, for each increased current level concurrent spots can be identified and further analyzed.
