Titanium particles were deposited on a steel substrate by the impact of high velocity in warm spraying. In the process, nitrogen gas at various flow rates was mixed to control the temperature of a supersonic gas flow generated by combustion. TEM and other techniques were used to analyze the microstructure of the interface between the titanium coatings and the substrate. At the lower nitrogen flow rate, thick oxide double layers in the interface region were observed. The adhesive strength of the coating was high even at lower particles’ velocity possibly because the mechanical interlocking between the titanium particle and the substrate could be enhanced by the high deformability of heated particles. As the nitrogen flow rate increased, however, just a little oxide and a very thin oxide layer covering on the titanium splats were locally detected. The highly localized pressure and the resultant intensive shear stress generated within a titanium particle by the impact could reveal the fresh metal surface through break-up of the thin oxide films on the particle and the substrate. As a result, the metallic bonding between the deposited particle and the substrate was formed and increased the adhesive strength remarkably beyond a certain impact velocity.

Thermal spraying of dense titanium coatings in the air atmosphere was achieved by using a two-stage high velocity oxy-fuel process (HVOF) called the Warm Spray Process. In the process nitrogen gas is mixed with the combustion gas to lower the gas temperature. Gas dynamics modeling of the flow field of the gas in the spray apparatus as well as the acceleration and heating of titanium powder injected from the powder feed ports were conducted. Based on the obtained temperature history of a titanium powder particle, its oxidation during flight was also predicted by using a Wagner-type oxidation model. These results were compared with measured velocity and temperature of sprayed particles by DPV2000 and the properties of deposited coatings. Significant discrepancy in the temperature of sprayed particles was found between the calculation and measurement whereas the measured velocity was closer to the model calculation. The model prediction of oxygen content was in a good agreement with the analysis of actual coatings. Furthermore, properties of the sprayed coatings such as porosity, oxygen content were correlated with the particle velocities and temperatures. Nitrogen gas was highly effective in lowering the oxygen content, but excessive nitrogen addition caused the coating porosity to increase due to insufficient particle temperatures.

This paper shows that in-line voltage contrast inspection can be used to monitor and debug mechanisms causing via and contact opens using ungrounded chain test structures. This opens up a large number of new opportunities to the benefits of in-line VC inspection. A theory explaining the VC appearance of a broken chain is proposed and experimentally verified. The methodology used at IBM’s 300mm fab to apply this phenomenon is described along with some use cases.

Cu coating was deposited by microplasma spraying system under a low power of 2.8 to 4.2kW. The effects of the main processing parameters including plasma arc power, operating gas flow and spray distance on particle velocity during spraying, and the microstructure and properties of the coating were investigated. The coating microstructure was examined with optical microscopy. The coating properties were characterized by cross sectional microhardness. The particle velocity during in-flight was examined using a particle velocity/temperature measurement system based on thermal radiation. The experiment results showed that particle velocity was increased with the increase in operating gas flow, and was not influenced significantly by plasma arc power and spray distance. Moreover, the microhardness of the coating was increased with the increase in arc power and with the decrease in spray distance. The operating gas flow showed no significant influence on the microhardness of the coating. The analysis suggested that the microhardness of the coating is influenced significantly by particle temperature. The comparison showed that the microhardness of the Cu coating deposited by microplasma spray is comparable to that of the coating deposited by conventional plasma spray system at power level of 30kW.

In-flight particle analysis via infrared sensing has proven helpful in the development and control of thermal spray processes. The aim of this work is to assess the effect of optical system design on thermal measurement accuracy. Through experimental testing and theoretical analyses, investigators show how variations in optical component sizes, alignments, and arrangements affect the amplitude and shape of sensor voltage waveforms and signal peaks. It is observed that only when photodetectors are in saturation, marked by the trapezoidal shape of their output signals, can they provide information about particle velocity, temperature, and size, and in some cases, even volume distribution. Correlation tests are carried out by means of plasma spraying molybdenum powder. Paper includes a German-language abstract.