Sintering ceramics have been widely used in industries which require electrical and mechanical properties. Thermal sprayed ceramics coatings are also applied for the industries, however the coating which has micron size pores are limited their applications due to inferior electrical and mechanical properties compared with sintering bulk. To expand thermal sprayed ceramics coating applications, dense coatings prepared by suspension plasma spraying are widely studied. Dense Al 2 O 3 coatings are applicable to fabricating equipment for electronics devices, such as ESC. There are no reports regarding electric properties of plasma sprayed dense Al 2 O 3 coating with different spray conditions. In this study to achieve a electric properties of dense Al 2 O 3 coating, spray parameters such as plasma power, gas flow rate and spray distance are investigated. Suspension materials prepared with three microns Al 2 O 3 powder are sprayed by high power suspension plasma spraying system. Spray conditions, plasma power, gas flow rate, and stand-off distance affect the coating density, crystal phase, and mechanical and electrical properties. Mechanism of coating formation by plasma spraying with fine powder suspensions will be discussed based on the findings. Al 2 O 3 coatings obtained by the plasma spraying is applied for application to application utilizing the electrical insulation properties of such electronics devise manufacturing equipment components is proceeding.

In recent years, thermal barrier coatings (TBC) have been used in advanced gas turbine plants for improved durability and performance. Typically, TBCs consist of an inner layer of metallic bond coating (MCrAlY) and an outer layer of ceramic top coating (8wt% yttria stabilized zirconia (YSZ)). According to several studies, the failure of coating is induced by thermal stress due to formation of oxides at the interface between YSZ and MCrAlY. Therefore, it is important to investigate kinetics of oxidation at the interface. In this work, the interface between YSZ and MCrAlY is studied and characterized. TBC specimens are thermally aged at 1000 deg. C to simulate the surface temperature of first rotating blades. After aging, thermally grown oxide (TGO) is formed at the interface. The TGO has two layers of different contrasts. One layer is black, and is closer to MCrAlY; the other layer is gray, and is closer to YSZ. The black layer is identified as Al 2 O 3 by energy dispersive X-ray spectroscopy (EDX) and electron probe micro analyzer (EPMA). The EDX and EPMA spectra of the gray layer contain various peaks of Al, Cr, Co, Ni, and O, which suggests that the layer can be mixed oxide which is a combination of NiO, CoO, Cr 2 O 3 , and Ni(Cr, Al) 2 O 4 . However, the outer layer of mixed oxide contains only Cr and O. Accordingly, Cr 2 O 3 forms at the outer layer of mixed oxide, and the other oxides are distributed at the inner layer of mixed oxide. The thickness of the two oxide layers increases with aging time. While the formation of mixed oxide layer obeys a parabolic law, the formation of an alumina layer cannot be expressed in terms of a parabolic law. Due to the formation of protective mixed oxide on the alumina layer, the oxidation rate of alumina decreases as the thickness of mixed oxide increases.