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Seema Samani
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Proceedings Papers
ISTFA2022, ISTFA 2022: Conference Proceedings from the 48th International Symposium for Testing and Failure Analysis, 125-128, October 30–November 3, 2022,
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Recently, electron beam probing (EBP) has had a resurgence in failure analysis communities due to its clear resolution advantage compared to optical techniques. This paper describes an approach for a detailed advanced logic e-beam probing system, capable of measuring both high bandwidth waveforms and frequency maps. An investigation of optimizing the signal-to-noise of the pulsed beam is presented. By minimizing the working distance and the use of quadrature signal analysis, the e-beam prober is capable of high bandwidth and high-resolution data with adequate signal-to-noise. The use of such system provides a scalable solution for electrical failure analysis for advanced logic integrated circuits.