In the failure analysis (FA) process, a large amount and variety of data are involved: product information, images created by lab equipment, requester and accounting information, etc. Instead of using separate tools for image handling, sample tracking, report creation, and email, workflows can be improved by integrating all these functions in one single IT system. This paper describes the process and result of developing a dedicated FA software tool. The discussion provides details of the specification, main features, and architecture of the system. This system has been rolled out at 15 labs and is used by approx. 500 analysts and several thousands of company-internal FA customers. The flexible architecture made the adaptation to all the different business processes possible and provides a future-proof solution.

A new localization method called LIA-SDL is introduced and applied to scan shift problems. The method combines local thermal stimulation technique with lock-in technique applied to periodical test pattern. The localization capability on soft defects is shown in comparison with SDL. Same localization results are obtained. LIA-SDL technique requires no special LSM (Laser Scan Microscope) facilities and is quite easy to handle. Limits and prospects of this new methodology are shown at several analysis examples.