Failure localization is one of the vital processes in the field of failure analysis. However, as newer fabrication processes emerge and demand for smaller transistors keeps on increasing, the complexity of failure analysis fault isolation involving micro-probing also increases along with the challenges on fault isolation equipment such as limited magnification and susceptibility to vibrations. In this paper, the capability of Focused Ion Beam (FIB) to perform circuit edit was utilized along with Avalon CAD navigation to pinpoint the location of the defects without the need of micro-probing while doing fault isolation. Results showed that through this technique, physical defect locations were successfully identified in three different case studies.

Completion of failure analysis (FA) cases require a lot of expensive equipment and tools. Equipment Management System (EMS) is a must to safeguard the equipment from being down/damaged due to uncertified/untrained and high number of users and to avoid high repair cost of the FA laboratory equipment. The purpose of this paper is to present the RFID-based equipment management system for failure analysis laboratory equipment which has the capability to limit the equipment usage to authorized and certified users, locks and unlocks the equipment, and controls the real-time status of the equipment.