Practice and training samples have been manufactured using 3D-printing methods. These 3D-printed samples mimic the exact geometry of focused ion beam (FIB) prepared specimens and can be used to help master ex situ and in situ lift out micromanipulation methods. An additively manufactured array of samples yields numerous samples needed for repetition and deliberate practice necessary to master the lift out and micromanipulation steps. The 3D-printed samples are cost effective and negates expensive FIB time needed to prepare FIB specimens.

Low energy (i.e., 5 keV, 3 keV) Xe+ plasma FIB methods were applied to Si ex situ lift out specimens. Cs-corrected STEM imaging reveals the Si dumbbell structure indicating excellent surface quality achieved during the low energy polishing steps.

Vacuum assisted ex situ lift out may be used for fast, easy, and reproducible plan view specimen preparation. Manipulation of samples via beveled hollow glass probes whose plane of interest is parallel to slotted grids allow for conventional FIB milling for S/TEM analysis.

Ex situ lift out is fast, easy, and reproducible, and adds flexibility for either frontside or backside manipulation of focused ion beam milled specimens. ex situ lift out methods may be enhanced by eliminating electrostatic forces. In addition, optimizing the geometry of the specimen relative to the probe improves the Van der Waals forces responsible for the lift out and subsequent manipulation of focused ion beam prepared specimens.

Ex situ lift out (EXLO) is performed outside of the FIB instrument on a system basically consisting of a light optical microscope, stage, and manipulator. EXLO may be used to lift out very large specimens prepared using plasma FIB instruments. This paper combines a vacuum micropipetting module with an EXLO station, making use of both suction vacuum forces and adhesion forces for the pick and place of a FIB milled free specimen onto a slotted EXpressLO grid. The geometry for manipulation to EXpressLO grids is detailed in this paper. It is observed that the vacuum assisted lift out optimizes specimen positioning for easy placement on the novel EXpressLO grid. Once on the new grid, an electron transparent specimen may be analyzed directly by S/TEM or other analytical techniques. The specimen on this grid can also be further FIB milled or processed prior to analysis.

Ex situ lift out (EXLO) was historically the first lift out technique to be developed for site specific removal and manipulation of focused ion beam (FIB)-prepared specimens to a suitable carrier. In this paper, fast plasma FIB (PFIB) preparation of large scanning/transmission electron microscope specimens is combined with fast conventional EXLO and EXpressLO "pick and place" solutions. The combination of large material removal rates with PFIB and EXLO allows for efficiency and high throughput of FIB lift out specimens.

A new method and grid design is described for implementation of ex-situ lift-out of FIB prepared specimens. This technique negates all prior disadvantages to ex-situ liftout and provides a method for higher throughput and rethinning of ex-situ specimens. In particular, this method allows for easy, fast, and routine manipulation for subsequent backside FIB milling and analysis.