1-1 of 1
Kirin Wang
Close
Save search
Follow your search
Access your saved searches in your account
Would you like to receive an alert when new items match your search?
Close Modal
Sort by
Proceedings Papers

In-line High-Resistance Tungsten Plug Defect Monitoring with an Advanced e-beam System

Mingsheng Tsai, J. H. Yeh, Hermes Liu, Scott Lin, Kirin Wang ...
ISTFA2005, ISTFA 2005: Conference Proceedings from the 31st International Symposium for Testing and Failure Analysis, 448-450, November 6–10, 2005,
https://doi.org/10.31399/asm.cp.istfa2005p0448
Abstract
In-line e-beam inspection is performed to detect dark voltage contrast (DVC) defects on normally bright W-plugs. Cross-sectional SEM and TEM in an FA lab verified that the different gray level values (GLV) of DVC defects are caused by different resistances of the W-plugs. We found that DVC defects with lower GLV (GLV1) are W-plugs that are open and almost open. DVC defects with GLV2 are caused by partially open W-plugs and in-plug voids.
View Papertitled, In-line High-Resistance Tungsten Plug Defect Monitoring with an Advanced e-beam System View PDF for content titled, In-line High-Resistance Tungsten Plug Defect Monitoring with an Advanced e-beam System