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Kevin T. Wu
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Proceedings Papers

In-Line Voltage Contrast Inspection of Ungrounded Chain Test Structures for Timely and Detailed Characterization of Contact and Via Yield Loss

Oliver D. Patterson, Horatio Wildman, Alex Ache, Kevin T. Wu
ISTFA2005, ISTFA 2005: Conference Proceedings from the 31st International Symposium for Testing and Failure Analysis, 401-406, November 6–10, 2005,
https://doi.org/10.31399/asm.cp.istfa2005p0401
Abstract
This paper shows that in-line voltage contrast inspection can be used to monitor and debug mechanisms causing via and contact opens using ungrounded chain test structures. This opens up a large number of new opportunities to the benefits of in-line VC inspection. A theory explaining the VC appearance of a broken chain is proposed and experimentally verified. The methodology used at IBM’s 300mm fab to apply this phenomenon is described along with some use cases.
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