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Jon M. Hiller
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Proceedings Papers
ISTFA2014, ISTFA 2014: Conference Proceedings from the 40th International Symposium for Testing and Failure Analysis, 274-277, November 9–13, 2014,
Abstract
View Papertitled, Ex-Situ Lift Out of Plasma Focused Ion Beam Prepared Site Specific Specimens
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for content titled, Ex-Situ Lift Out of Plasma Focused Ion Beam Prepared Site Specific Specimens
Ex situ lift out (EXLO) was historically the first lift out technique to be developed for site specific removal and manipulation of focused ion beam (FIB)-prepared specimens to a suitable carrier. In this paper, fast plasma FIB (PFIB) preparation of large scanning/transmission electron microscope specimens is combined with fast conventional EXLO and EXpressLO "pick and place" solutions. The combination of large material removal rates with PFIB and EXLO allows for efficiency and high throughput of FIB lift out specimens.