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Jin Jie
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Proceedings Papers
ISTFA2022, ISTFA 2022: Conference Proceedings from the 48th International Symposium for Testing and Failure Analysis, 135-143, October 30–November 3, 2022,
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Electrooptical investigations such as laser voltage probing (LVP) and dynamic laser stimulation (DLS) are very popular electrical fault isolation techniques (EFI) that use lasers on semiconductor circuits to study the functionality of transistors while the device is in operation. While many studies have been undertaken to understand interaction between laser and planar devices, three-dimensional devices such as FinFETs have interesting physiologies that have not been fully explored. In this work, we study the interaction of polarized light with the n-type metal oxide semiconductor (NMOS) FinFETs, experimentally and through Multiphysics simulations. We report highly directional electrooptical interactions in the FinFET. LVP signals are stronger when the laser used is polarized parallel to the fin and laser stimulation stronger when the laser used is polarized parallel to the gate. These findings affect future laser stimulation and probing investigations for EFI.
Proceedings Papers
ISTFA2019, ISTFA 2019: Conference Proceedings from the 45th International Symposium for Testing and Failure Analysis, 160-163, November 10–14, 2019,
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Dynamic Photon Emission Microscopy (D-PEM) is an established technique for isolating short and open failures, where photons emitted by transistors are collected by sensitive infra-red detectors while the device under test is electrically exercised with automated test equipment (ATE). Common tests, such as scan, use patterns that are generated through Automatic Test Pattern Generator (ATPG) in compressed mode. When these patterns are looped for D-PEM, it results in indeterministic states within cells during the load or unload sequences, making interpretation of emission challenging. Moreover, photons are emitted with lower probability and lesser energies for smaller technology nodes such as the FinFET. In this paper, we will discuss executing scan tests in manners that can be used to bring out emission which did not show up in conventional test loops.