Temperature humidity bias (THB) test is widely used to evaluate the moisture resistance of non-hermetic packages in semiconductor industry. During THB test, one kind of 90FBGA was found severely burned and the evidence has been completely destroyed. This brings a great challenge to failure analysis. In this paper, a double daisy chain structure substrate was designed to reproduce the short and burn failure. The substrate layout design, bias and high humidity environment were proved to be the three key factors inducing dendrite growth and burn failure. A “corner-missing” phenomenon inspected through nano-focus X-ray was reported and it could finally verify the theory of electrochemical migration. The countermeasure to prevent burn failure was proposed to the designers. The insulation property degradation due to THB test was evaluated.

Multi-Chip Package (MCP) decapsulation is now becoming a rising problem. Because for traditional decapsulation method, acid can’t dissolve the top silicon die to expose the bottom die surface in MCP. It makes inspecting the bottom die in MCP is difficult. In this paper, a new MCP decapsulation technology combining mechanical polishing with chemical etching is introduced. This new technology can remove the top die quickly without damaging the bottom die using KOH and Tetra-Methyl Ammonium Hydroxide (TMAH). The technology process and relative application are presented. The factors that affect the KOH and TMAH etch rate are studied. The usage difference between the two etchant is discussed.