Presentation slides for the ISTFA 2024 Tutorial session “Transmission Electron Imaging AND Diffraction in an SEM (aka, STEM-in-SEM): What, Why, and How To Do This in Your Microscope.”

This presentation covers the theory and practice of scanning transmission electron microscopy in a scanning electron microscope or STEM-in-SEM. It provides a detailed overview of the measurement physics, the equipment required, the importance of collection angle control, and contrast interpretation. It explains how and why different detectors are used and how they are calibrated. It addresses the issue of beam damage and explains how to quantify and deal with it. It also covers advanced concepts, including 4D STEM-in-SEM, nanoscale strain and temperature mapping, and the use of programmable STEM detectors for imaging and diffraction, and provides examples demonstrating the capabilities of the various measurement setups.

This presentation covers the principles of STEM-in-SEM technology and its application in materials research and failure analysis. Part 1 describes the arrangement and function of major components in TEM-in-STEM systems, compares and contrasts imaging modes, and explains how different types of images are obtained by adjusting imaging parameters. Part 2 covers the implementation and use of 4D STEM-in-SEM. It provides examples showing how the method is used to examine diffraction patterns, capture images of materials susceptible to low-energy beam damage, and produce nanoscale strain, grain orientation, and temperature maps. It also includes a wide range of images obtained using a programmable STEM detector.