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J. H. Yeh
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Proceedings Papers

In-line High-Resistance Tungsten Plug Defect Monitoring with an Advanced e-beam System

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Mingsheng Tsai, J. H. Yeh, Hermes Liu, Scott Lin, Kirin Wang ...
ISTFA2005, ISTFA 2005: Conference Proceedings from the 31st International Symposium for Testing and Failure Analysis, 448-450, November 6–10, 2005,
https://doi.org/10.31399/asm.cp.istfa2005p0448
Abstract
In-line e-beam inspection is performed to detect dark voltage contrast (DVC) defects on normally bright W-plugs. Cross-sectional SEM and TEM in an FA lab verified that the different gray level values (GLV) of DVC defects are caused by different resistances of the W-plugs. We found that DVC defects with lower GLV (GLV1) are W-plugs that are open and almost open. DVC defects with GLV2 are caused by partially open W-plugs and in-plug voids.
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