X-ray photoelectron spectroscopy (XPS) is a very popular tool for identification of the chemical state of fluorine contamination on aluminum (Al) bond pads. To date, as far as the authors are aware the detailed microstructures of fluorine corrosion on bond pads have not been reported. This paper reports the microstructure evolution of fluorine corrosion on bond pads in a plastic box under specific environment conditions by using transmission electron microscopy (TEM), optical microscopy, focused ion beam and scanning electron microscopy (SEM). The elemental distributions and chemical bonding were performed by using Gatan Image Filter/TEM, energy dispersive X-ray/Scanning TEM (STEM), Auger electron spectroscopy and XPS, respectively. On Al pads with 35 atomic %, fluorine residual, corrosion was observed after around 10 days of storage and became more severe with time. The corrosion layers consist of nano-crystalline and amorphous for both single and double-layer structures.