The control of microstructure of TiO 2 coating through preparation methods influences significantly the performance of the coating. In this study, vacuum cold spray process as a new coating technology is employed to deposit nanocrystalline TiO 2 coatings on glass and stainless steel substrates. TiO 2 deposits were formed using two types of nanocrystalline TiO 2 powders having mean particle diameters of 200 nm and 25 nm. The microstructure of the coating was characterized by scanning electron microscopy, x-ray diffraction analysis. The results demonstrate that a thick nanocrystalline TiO 2 coating can be deposited by vacuum cold spray process. The coating was stacked of particles in agglomerate of several hundred nanometers. The coating presents a mesoporous microstructure which would be effective for applications in photocatalytic degradation, dye-sensitized solar cell and so on.